CN-224208433-U - Multifunctional spin coating equipment

CN224208433UCN 224208433 UCN224208433 UCN 224208433UCN-224208433-U

Abstract

The utility model provides multifunctional spin coating equipment which comprises a plasma processing assembly, a spin coating assembly and a heating and cooling assembly. The top of spin coating subassembly sets up plasma processing subassembly, sets up heating cooling subassembly in the spin coating subassembly, and plasma processing subassembly, heating cooling subassembly can remove. The multifunctional spin coating equipment provided by the utility model has the functions of plasma treatment, spin coating glue, heating and cooling, so that the occupied space of the equipment is greatly reduced, the equipment cost is reduced, and the whole glue homogenizing process does not need to frequently move the sheet to be treated, so that the problem of dirt generated by the sheet to be treated due to the frequent movement of the sheet to be treated is avoided.

Inventors

ZHANG XIN
ZHAO SHAOU
SUN RU
MENG XIANGFENG
MAO XINYU

Assignees

浙江至格科技有限公司

Dates

Publication Date: 20260508
Application Date: 20250603

Claims (10)

1. The multifunctional spin coating equipment is characterized by comprising a plasma processing assembly, a spin coating assembly and a heating and cooling assembly; the plasma treatment assembly is arranged above the spin coating assembly, and the heating and cooling assembly is arranged in the spin coating assembly; The plasma processing assembly and the heating and cooling assembly can move.
2. The multi-function spin coating apparatus of claim 1, wherein the plasma processing assembly comprises a first drive motor, a first lead screw, a first slider, a first support frame, and a plasma processing apparatus; one end of the first screw rod is connected with a rotating shaft of the first driving motor, and a first sliding block is arranged on a lever body of the first screw rod; the bottom of the first support frame is provided with the plasma treatment equipment, and the first support frame is connected with the first sliding block.
3. The multifunctional spin coating apparatus of claim 1, wherein the spin coating assembly comprises a spin coating chamber, a spin coating carrier, a support column, and a second drive motor; The spin coater chamber is internally provided with the spin coater carrier, the top surface of the spin coater carrier is used for placing sheets to be treated, the bottom surface of spin-coating carrier with the top of support column is connected, the bottom of support column runs through the bottom of spin-coating cavity with the second driving motor is connected.
4. The apparatus according to claim 3, wherein the spin coater assembly further comprises a vacuum venting assembly including an adsorption tank, an adsorption hole, a first communication hole, a second communication hole, a pipe, and a vacuum pump; The center position of the spin coater carrier is provided with the adsorption hole, and the top surface of the spin coater carrier is provided with a plurality of adsorption grooves around the adsorption hole; The support column is internally provided with a first communication hole, the second driving motor is provided with a second communication hole, the top end of the first communication hole is communicated with the adsorption hole, the bottom end of the first communication hole is communicated with the top end of the second communication hole, the bottom end of the second communication hole is communicated with one end of a pipeline, and the other end of the pipeline is communicated with the vacuumizing pump.
5. The multi-functional spin coating apparatus of claim 3, wherein the heating and cooling assembly comprises a second support frame, a tray, a heating member, a cooling member, a third driving motor, a second screw, and a slide rail; The bottom end of the second support frame is fixed at the bottom of the spin chamber, and the top end of the second support frame is provided with the third driving motor; The tray is arranged in the spin chamber, a threaded hole is formed in the outer bottom surface of the tray bottom, and the slide rail is arranged on the side wall of the spin chamber; The bottom end of the second screw rod is connected with the rotating shaft of the third driving motor, and the top end of the second screw rod is connected with the threaded hole; The tray is provided with a heating part and a cooling part inside the tray bottom, and the side end of the tray is connected with the sliding rail through a sliding block.
6. The spin-on apparatus according to claim 5, wherein the heating member comprises a heating plate and an external lead, the heating plate is provided in the tray bottom at a position near the inner bottom surface, and the heating plate is connected to the external lead.
7. The multi-function spin coating apparatus of claim 5, wherein the cooling member includes a cooling channel and cooling water; the tray is provided with the cooling channel at a position close to the outer bottom surface inside the tray bottom; the cooling water can flow through the cooling channel.
8. The multifunctional spin coating apparatus of claim 5, further comprising an exhaust duct and a waste liquid discharge duct; The top end of the air suction pipeline penetrates through the side end of the tray, and the bottom end of the air suction pipeline penetrates through the bottom of the spin coating chamber; The top of the waste liquid discharge pipeline penetrates through the side end of the tray, and the bottom of the waste liquid discharge pipeline penetrates through the bottom of the spin chamber.
9. The apparatus of claim 3, further comprising a cover detachably disposed on top of the spin coating chamber.
10. The multifunctional spin coating apparatus of claim 5, further comprising a lifting assembly including a cylinder, a connecting rod, a supporting rod, and a penetration hole; the air cylinder is fixed on the second supporting frame, and the penetration holes are formed in the glue homogenizing carrying platform; one end of the connecting rod is connected with the air cylinder, and the other end of the connecting rod is connected with the supporting rod; the cylinder can drive the supporting rod to lift in the penetrating hole through the connecting rod.

Description

Multifunctional spin coating equipment Technical Field The utility model belongs to the technical field of diffraction optical waveguide manufacturing, and particularly relates to multifunctional spin coating equipment. Background The preparation method of the existing diffraction optical waveguide generally comprises the following steps: 1. an imprint master having a preset grating structure is prepared. Specifically, photoresist is spin-coated on a substrate, light beam interference exposure operation is carried out on the photoresist on the substrate, a photoresist mask with changed properties is obtained on the substrate, development operation is carried out on the photoresist mask with changed properties on the substrate, the substrate with the photoresist grating mask is obtained, and the substrate with the photoresist grating mask is etched, so that an imprinting master plate with a preset grating structure is obtained. 2. Transferring the grating structure of the imprinting master plate to a soft film through a nano imprinting process, and obtaining a reverse structure of the grating structure on the soft film. The method comprises the steps of uniformly spin-coating imprinting glue on an imprinting master, attaching a soft film substrate to the imprinting master, applying pressure to enable the imprinting glue to be filled into a grating structure of the imprinting master, obtaining a reverse structure of the grating structure on the imprinting glue, and transferring the imprinting glue with the reverse structure of the grating structure onto the soft film substrate by ultraviolet light curing and demolding to obtain the soft film with the reverse structure of the grating structure. 3. And transferring the inverse structure of the grating structure on the soft film to a glass wafer through a nano imprinting process to obtain the glass wafer with the grating structure, thereby obtaining the diffraction optical waveguide. Specifically, spin coating product glue on a glass wafer, attaching a soft film with a grating structure reverse structure to the product glue on the glass wafer, applying pressure to enable the product glue to be filled into the grating structure reverse structure of the soft film, obtaining a grating structure on the product glue, and separating the soft film with the grating structure reverse structure from the product glue with the grating structure by ultraviolet light curing and demolding to obtain the glass wafer with the grating structure, thereby obtaining the diffraction optical waveguide. The step of spin coating photoresist on a substrate or spin coating product glue on a glass wafer is called a spin coating process by a person skilled in the art, and the conventional spin coating process includes the steps of sequentially performing plasma treatment, spin coating glue, heating, cooling and the like on a sheet to be treated (substrate or glass wafer), where the sheet to be treated needs to be respectively put into corresponding functional equipment for treatment. And the sheet to be treated is respectively placed into corresponding functional equipment for treatment, so that on one hand, the sheet to be treated is easy to cause dirt when the sheet to be treated is frequently moved, and on the other hand, the equipment cost is high and the equipment volume is large. Disclosure of utility model In order to overcome the defects of the prior art, the utility model provides multifunctional spin coating equipment. The technical scheme of the utility model is as follows: the utility model provides multifunctional spin coating equipment which comprises a plasma processing assembly, a spin coating assembly and a heating and cooling assembly; the plasma treatment assembly is arranged above the spin coating assembly, and the heating and cooling assembly is arranged in the spin coating assembly; The plasma processing assembly and the heating and cooling assembly can move. Further, the plasma processing assembly comprises a first driving motor, a first lead screw, a first sliding block, a first supporting frame and plasma processing equipment; one end of the first screw rod is connected with a rotating shaft of the first driving motor, and a first sliding block is arranged on a lever body of the first screw rod; the bottom of the first support frame is provided with the plasma treatment equipment, and the first support frame is connected with the first sliding block. Further, the spin coating assembly comprises a spin coating chamber, a spin coating carrier, a support column and a second driving motor; The spin coater chamber is internally provided with the spin coater carrier, the top surface of the spin coater carrier is used for placing sheets to be treated, the bottom surface of spin-coating carrier with the top of support column is connected, the bottom of support column runs through the bottom of spin-coating cavity with the second driving motor is connected. Further, the spin