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CN-224209698-U - Double-sided plane grinding polisher

CN224209698UCN 224209698 UCN224209698 UCN 224209698UCN-224209698-U

Abstract

The utility model discloses a double-sided plane grinding and polishing machine, relates to the technical field of grinding and polishing equipment, and aims to solve the technical problem that the existing double-sided lapping machine is easy to damage ultrathin or fragile products. According to the utility model, the free star wheel is composed of the hollow ring and the butt joint gear ring, the reinforcing frame is arranged in the hollow ring, unnecessary materials are removed on the premise of ensuring the strength of the free star wheel, the mass of the free star wheel is reduced, so that inertia is reduced, meanwhile, the free star wheel is internally provided with the composite buffer structure, the first buffer layer of the composite buffer structure is made of elastic rubber, most of impact force generated by the free star wheel due to inertia can be absorbed, the damping layer is made of viscoelastic damping material, the propagation of vibration can be effectively inhibited, the second buffer layer is made of silica gel, the acting force on a product is further buffered and dispersed, and the phenomenon of damage in the processing process of ultrathin or fragile products can be avoided.

Inventors

  • HU GUANGLIN

Assignees

  • 成都庄辰精密工具有限公司

Dates

Publication Date
20260508
Application Date
20250429

Claims (6)

  1. 1. The utility model provides a two-sided plane lapping and polishing machine, its characterized in that, including two-sided lapping machine (1), outer cooperation circle (2), lower grinding disc (3), butt joint seat (4) and trip star gear (5) equipartition are arranged on two-sided lapping machine (1) pedestal, butt joint seat (4) are located outer cooperation circle (2), and butt joint seat (4) coaxial with outer cooperation circle (2), lower grinding disc (3) are located between outer cooperation circle (2) and butt joint seat (4), trip star gear (5) are placed on lower grinding disc (3), trip star gear (5) include fretwork circle (501) and butt joint ring gear (502), butt joint ring gear (502) are arranged in the outside of fretwork circle (501), compound buffer structure (6) are first buffer layer (601), layer (602) and second buffer layer (603) in proper order from outside to inside; The second buffer layer (603) is divided into an outer ring (604) and an inner ring (605), the outer ring (604) is of a honeycomb structure, and the inner ring (605) is of a corrugated structure.
  2. 2. The double-sided plane grinding and polishing machine according to claim 1, wherein a matching gear ring (201) is arranged on the inner wall of the outer matching ring (2), a driving gear disc (401) is arranged on the butt joint seat (4), and the matching gear ring (201) is meshed with the driving gear disc (401) and the butt joint gear ring (502).
  3. 3. The double-sided plane grinding and polishing machine according to claim 1, wherein a plurality of groups of reinforcing frames (503) are equidistantly arranged inside the hollowed-out ring (501), and the reinforcing frames (503) are respectively connected with arc-shaped sides inside the hollowed-out ring (501).
  4. 4. A double-sided planar grinding polisher according to claim 3 wherein the stiffening frame (503) is comprised of two sets of X-brackets, each set of X-brackets being arranged at a 45 degree incline.
  5. 5. The double-sided planar grinding polisher of claim 1 wherein the honeycomb holes of the outer ring (604) are hexagonal.
  6. 6. The double-sided planar polishing machine according to claim 1, wherein the first buffer layer (601) is made of elastic rubber, the damping layer (602) is made of viscoelastic damping material, and the second buffer layer (603) is made of silica gel.

Description

Double-sided plane grinding polisher Technical Field The utility model relates to the technical field of grinding and polishing equipment, in particular to a double-sided plane grinding and polishing machine. Background The double-sided plane grinding polisher is mainly used for the double-sided lapping of parts such as silicon wafers, quartz crystals, glass, ceramics, sapphire, gallium arsenide, lithium niobate and the like, and is also suitable for the double-sided lapping of valve plates, optical fibers, computer storage discs and other sheet-shaped metal and nonmetal parts. When the existing double-sided lapping machine is used for carrying out double-sided polishing treatment on ultrathin or fragile products, the planetary wheel is a component which rotates at a high speed in the double-sided lapping machine and drives the products to move, and because the planetary wheel has certain mass and rotation speed, according to the principle of inertia, an object has the property of keeping the original movement state, when the planetary wheel is started, stopped or the rotation speed is changed, the tendency of resisting the change of the movement state can be generated due to the inertia of the planetary wheel, and the inertia can impact and possibly damage the products. Disclosure of utility model The utility model aims to overcome the defects of the prior art, adapt to the actual needs, and provide a double-sided plane grinding polisher so as to solve the technical problem that the current double-sided lapping machine is easy to cause ultrathin or fragile product damage. In order to solve the technical problems, the utility model provides the technical scheme that the double-sided plane grinding polisher comprises a double-sided lapping machine, an outer matching ring, a lower grinding disc, a counter seat and a free star wheel, wherein the outer matching ring, the lower grinding disc, the counter seat and the free star wheel are uniformly arranged on a pedestal of the double-sided lapping machine, the counter seat is positioned in the outer matching ring, the counter seat and the outer matching ring are coaxial, the lower grinding disc is positioned between the outer matching ring and the counter seat, the free star wheel is arranged on the lower grinding disc, the free star wheel comprises a hollowed ring and a counter gear ring, the counter gear ring is arranged outside the hollowed ring, a composite buffer structure is arranged inside the hollowed ring, and the composite buffer structure sequentially comprises a first buffer layer, a damping layer and a second buffer layer from outside to inside; The second buffer layer is divided into an outer ring and an inner ring, the outer ring is of a honeycomb structure, and the inner ring is of a corrugated structure. The utility model discloses a novel honeycomb structure, which comprises a hollow ring, a butt joint gear ring, a reinforcing frame, a composite buffer structure, a damping layer, an outer ring and an inner ring, wherein the hollow ring is formed by the hollow ring and the butt joint gear ring, the reinforcing frame is arranged in the hollow ring, unnecessary materials are removed under the premise of ensuring the strength of the hollow ring, the mass of the hollow ring is reduced, so that inertia is reduced, meanwhile, a composite buffer structure is arranged in the hollow ring, a first buffer layer material of the composite buffer structure is elastic rubber and can absorb most of impact force generated by the inertia of the hollow ring, the damping layer material is viscoelastic damping material, the propagation of vibration can be effectively restrained, a second buffer layer material is silica gel, the acting force on a product is further buffered and dispersed, the phenomenon of damage to the product can be avoided in the processing process of the ultrathin or fragile product, the outer ring is in a honeycomb structure, the inner ring is in a wavy structure, the wavy structure is provided with a plurality of undulation and bending parts, when the undulation parts are impacted by external force, the contact time and the contact area of the buffer pad and the product are increased, the action time of the average acting force can be reduced under the condition that the inertia is certain impulse quantity, the action time of the impact force can be effectively reduced, and the impact force can be further spread along the impact force of the ultrathin or the ultrathin corrugated structure in the processing process of the ultrathin or the fragile structure, and the fragile structure can be further prevented from being more uniformly dispersed in the processing process of the ultrathin or the fragile structure. Preferably, a matched gear ring is arranged on the inner wall of the outer matched ring, a driving gear disc is arranged on the butt joint seat, and the matched gear ring is meshed with the driving gear disc and the butt joint gear ring. Pr