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CN-224210234-U - Fixing mechanism for monocrystalline silicon piece processing

CN224210234UCN 224210234 UCN224210234 UCN 224210234UCN-224210234-U

Abstract

The utility model discloses a fixing mechanism for processing monocrystalline silicon pieces, which comprises a base, wherein a first adjusting component is arranged at the upper left of the base and comprises a first outer cover, a first fixing plate, a first motor, a first screw rod, a first screw sleeve, a connecting plate and a first sliding rod, a guide sleeve is fixedly arranged at the upper right of the base, a second sliding rod is slidably arranged in the guide sleeve, the second adjusting component is arranged above the first sliding rod and the second sliding rod, the second adjusting component comprises a second outer cover, a second fixing plate, a second motor, a rotating seat, a positioning disc, an electric push rod and a limiting head, and the first fixing component is arranged above the rotating seat. The product can clamp and fix square monocrystalline silicon wafers and round monocrystalline silicon wafers, and has wide adaptability.

Inventors

  • XUE JIAWEI
  • WANG HAIJUN
  • XUE JIAYONG

Assignees

  • 天津众晶半导体材料有限公司

Dates

Publication Date
20260508
Application Date
20250506

Claims (6)

  1. 1. The fixing mechanism for monocrystalline silicon wafer processing is characterized by comprising a base (1), wherein a first adjusting component (2) is arranged at the upper left side of the base (1), and the first adjusting component (2) comprises a first outer cover (3), a first fixing plate (4), a first motor (5), a first screw (6), a first screw sleeve (7), a connecting plate (8) and a first sliding rod (9); The guide sleeve (10) is fixedly arranged at the upper right part of the base (1), and a second sliding rod (11) is arranged in the guide sleeve (10) in a sliding manner; The second adjusting assembly (12) is arranged above the first sliding rod (9) and the second sliding rod (11), and the second adjusting assembly (12) comprises a second outer cover (13), a second fixing plate (14), a second motor (15), a rotating seat (16), a positioning disc (17), an electric push rod (18) and a limiting head (19); The first fixing assembly (20), the first fixing assembly (20) is arranged above the rotating seat (16), and the first fixing assembly (20) comprises a third fixing plate (21), a third threaded sleeve (22), a third screw rod (23), a first rotating button (24), a first threaded joint (25), a first limiting rod (26), a clamping plate (27) and a third sliding rod (28); the second fixing assembly (29), the second fixing assembly (29) is installed below the rotating seat (16), and the second fixing assembly (29) comprises a fourth fixing plate (30), a fourth threaded sleeve (31), a fourth screw rod (32), a second rotating button (33), a second threaded joint (34), a second limiting rod (35), a clamping ring (36) and a fourth sliding rod (37).
  2. 2. The fixing mechanism for monocrystalline silicon piece processing according to claim 1, wherein the surface of the base (1) is provided with mounting holes, a first access plate is mounted on the front side of the first outer cover (3) through a first countersunk head screw, and a second access plate is mounted on the top of the second outer cover (13) through a second countersunk head screw.
  3. 3. The fixing mechanism for monocrystalline silicon piece processing according to claim 1, wherein the first outer cover (3) is fixedly installed on the upper left side of the base (1), the first fixing plate (4) is fixedly installed inside the first outer cover (3), the first motor (5) is fixedly installed below the side face of the first fixing plate (4), an output shaft of the first motor (5) penetrates through the lower portion and is connected with the first screw rod (6) through a first coupler, the first screw rod (6) is respectively connected with the first outer cover (3) and the upper portion through a first bearing and is connected with the first fixing plate (4), the first screw sleeve (7) is in threaded connection with the outer side of the first screw rod (6), the connecting plate (8) is fixedly connected with the first screw sleeve (7), the first slide rod (9) is fixedly connected with the upper portion of the connecting plate (8), the first slide rod (9) is in contact with the first outer cover (3) through a first through hole (9), and the first slide rod (9) is in contact with the first slide rod (9) through a first through hole.
  4. 4. The fixing mechanism for monocrystalline silicon piece processing according to claim 1, wherein the second housing (13) is fixedly installed above the first sliding rod (9) and the second sliding rod (11) respectively, the second fixing plate (14) is fixedly installed inside the second housing (13) on the left side, the second motor (15) is fixedly installed on the side face of the second fixing plate (14), an output shaft of the second motor (15) penetrates through the second fixing plate (14) and is connected with the rotating seat (16) through a second coupler, the left side and the right side of the rotating seat (16) are both connecting shafts, the connecting shafts are connected with the second housing (13) through second bearings, the positioning disc (17) is fixedly installed at the end part of the connecting shafts on the right side, positioning grooves are distributed in an annular array at intervals on the side face of the positioning disc (17), one end of the electric push rod (18) is fixedly installed on the right side of the second housing (13), the electric push rod (19) is fixedly installed at the end part of the electric push rod (19), and the other end part of the electric push rod (19) is fixedly inserted into the limiting groove.
  5. 5. The fixing mechanism for processing monocrystalline silicon piece according to claim 1, wherein the third fixing plate (21) is fixedly installed above the rotating seat (16), the third threaded sleeve (22) is fixedly installed inside the third fixing plate (21), the third threaded rod (23) is screwed inside the third threaded sleeve (22), the first rotating knob (24) is fixedly installed at one end of the third threaded rod (23), the first threaded joint (25) is fixedly installed at the side surface of the third fixing plate (21), the first limiting rod (26) comprises a first sliding rod, a first rotating rod and a first threaded rod, the first sliding rod is fixedly connected between the first rotating rod and the first threaded rod, the side surface of the third fixing plate (21) is provided with a first through hole corresponding to the first threaded rod, the first threaded joint (25) is internally provided with a first threaded groove matched with the first threaded rod, the first threaded joint (24) is fixedly installed at one end of the third threaded rod, the first threaded rod is fixedly connected with the first threaded rod through the first threaded rod, the first threaded rod is fixedly installed at the other end of the first threaded rod (27) through the first threaded rod, the first threaded rod is fixedly installed at the other end of the first threaded rod is fixedly connected with the first threaded sleeve (27), the first threaded rod is fixedly installed at the side surface of the first threaded rod is fixedly connected with the first threaded rod through the first threaded rod (21), the third sliding rod (28) is in sliding contact with the third fixing plate (21), a third sliding through hole corresponding to the third sliding rod (28) is formed in the side face of the third fixing plate (21), the third sliding rod (28) penetrates through the third sliding through hole, and the clamping plate (27) is adhered with a first flexible pad.
  6. 6. The fixing mechanism for processing monocrystalline silicon piece according to claim 1, characterized in that the fourth fixing plate (30) is fixedly installed below the rotating seat (16), the fourth screw sleeve (31) is fixedly installed inside the fourth fixing plate (30), the fourth screw rod (32) is screwed inside the fourth screw sleeve (31), the second rotating knob (33) is fixedly installed at one end of the fourth screw rod (32), the second screw joint (34) is fixedly installed at the side surface of the fourth fixing plate (30), the second limiting rod (35) comprises a second sliding column, a second rotating rod and a second screw rod, the second sliding column is fixedly connected between the second rotating rod and the second screw rod, the side surface of the fourth fixing plate (30) is provided with a second through hole corresponding to the second screw rod, the inside of the second screw joint (34) is provided with a second screw groove matched with the second screw rod, the second screw joint (33) is fixedly installed at the side surface of the fourth screw rod, the second screw joint is fixedly installed at the side surface of the second screw rod is provided with a second through hole (36), the second screw rod is fixedly installed at the other end of the second screw rod is fixedly installed at the side surface of the fourth screw sleeve (36), the second screw joint is fixedly installed at the side surface of the second screw rod is provided with a second through the second through hole (36), the fourth slide bar (37) is in sliding contact with the fourth fixed plate (30), a fourth sliding through hole corresponding to the fourth slide bar (37) is formed in the side face of the fourth fixed plate (30), the fourth slide bar (37) penetrates through the fourth sliding through hole, and the clamping ring (36) is adhered with a second flexible pad.

Description

Fixing mechanism for monocrystalline silicon piece processing Technical Field The utility model relates to the field of fixing mechanisms, in particular to a fixing mechanism for monocrystalline silicon piece processing. Background The monocrystalline silicon wafer is a silicon monocrystal, has a basically complete lattice structure, is a good semiconductor material, is mainly used for manufacturing semiconductor devices and solar cells, and is fixed by using a fixing mechanism in the processing process of cutting, grinding, polishing and the like, for example, patent application number 202121232711.3 discloses a fixing tool for monocrystalline silicon wafer processing, which comprises a processing table and a fixing assembly, wherein the fixing assembly is symmetrically arranged on the processing table, the fixing assembly comprises a transmission cavity, a lead screw, a slider, a connecting rod and a connecting plate, the transmission cavity is symmetrically connected with two sides on the processing table, the lead screw is horizontally arranged in the transmission cavity, the slider is symmetrically sleeved on the slider, the connecting plate is arranged on one side of the transmission cavity, and two ends of the connecting rod are respectively hinged on one side of the slider and the connecting plate. The fixing tool for monocrystalline silicon wafer processing has the advantages of being high in practicality, simple to use, capable of effectively fixing the silicon wafer, improving production efficiency, reducing production cost and high in applicability. However, the fixing component has the defect that the fixing component can only clamp and fix square monocrystalline silicon wafers, so that round monocrystalline silicon wafers cannot be clamped and fixed, and the adaptability is poor. Disclosure of utility model In view of the above-mentioned defects or shortcomings in the prior art, it is desirable to provide a fixing mechanism for monocrystalline silicon wafer processing, so that the fixing mechanism can clamp and fix square monocrystalline silicon wafers, and also can clamp and fix round monocrystalline silicon wafers, and has wide adaptability. According to the technical scheme provided by the embodiment of the utility model, the fixing mechanism for monocrystalline silicon wafer processing comprises a base, wherein a first adjusting component is arranged at the upper left side of the base and comprises a first outer cover, a first fixing plate, a first motor, a first screw rod, a first threaded sleeve, a connecting plate and a first sliding rod, the surface of the base is provided with a mounting hole, the front side of the first outer cover is provided with a first access plate through a first countersunk screw, the first outer cover is fixedly arranged at the upper left side of the base, the first fixing plate is fixedly arranged in the first outer cover, the first motor is fixedly arranged on the side surface of the first fixing plate below, an output shaft of the first motor penetrates through the lower side of the first fixing plate and is connected with the first screw rod through a first coupling, and the first screw rod is respectively connected with the first outer cover through a first bearing, the upper part of the base is connected with the first fixing plate, the first threaded sleeve is in threaded connection with the outer side of the first threaded rod, the connecting plate is fixedly connected with the first threaded sleeve, the first sliding rod is fixedly connected with the upper part of the connecting plate, the first sliding rod is in sliding contact with the first outer cover, a first sliding through hole corresponding to the first sliding rod is arranged on the surface of the first outer cover, the first sliding rod penetrates through the first sliding through hole, the guide sleeve is fixedly arranged on the upper right part of the base, a second sliding rod is arranged in the guide sleeve in a sliding manner, the second adjusting assembly is arranged above the first sliding rod and the second sliding rod, and comprises a second outer cover, a second fixed plate, a second motor, a rotating seat, a positioning disk, The top of the second housing is provided with a second access board through a second countersunk head screw, the second housing is fixedly arranged above the first slide bar and the second slide bar respectively, the second fixing board is fixedly arranged in the second housing at the left side, the second motor is fixedly arranged on the side surface of the second fixing board, an output shaft of the second motor penetrates through the second fixing board and is connected with the rotating seat through a second coupling, the left side and the right side of the rotating seat are both connecting shafts, the connecting shafts are connected with the second housing through a second bearing, the positioning disc is fixedly arranged at the end part of the co