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CN-224211921-U - Photomask substrate clamping device

CN224211921UCN 224211921 UCN224211921 UCN 224211921UCN-224211921-U

Abstract

The utility model relates to the field of semiconductor clamps, in particular to a photomask substrate clamping device which comprises a clamping main rod, wherein clamping heads with scratch-resistant adhesive tapes are respectively arranged at two ends of the clamping main rod, the two clamping heads clamp a photomask substrate together, and the photomask substrate clamping device further comprises a clamping counting unit, wherein the clamping counting unit can record and display the times of the clamping heads clamping the photomask substrate. And can make things convenient for operating personnel to judge after the number of times of use reaches the prescribed number of times to initiatively prevent scraping the change of adhesive tape, avoid appearing scraping the adhesive tape and use the fracture of too long time, cause the condition of photomask bottom plate damage.

Inventors

  • CAI JINLONG
  • LI JIAZHEN

Assignees

  • 绍兴芯链半导体科技有限公司

Dates

Publication Date
20260508
Application Date
20250530

Claims (10)

  1. 1. The utility model provides a photomask substrate presss from both sides and gets device, its characterized in that includes centre gripping mobile jib (1), centre gripping mobile jib (1) both ends are provided with respectively and have the clamp head (3) of preventing scraping adhesive tape (2), two clamp head (3) clamp photomask substrate (4) together, still including clamp and get counting unit (5), clamp and get counting unit (5) can take notes and show clamp the number of times that head (3) cliied photomask substrate (4).
  2. 2. The photomask substrate clamping device according to claim 1, further comprising a holding handle (6), wherein the holding handle (6) is arranged at one end of the holding main rod (1), the holding handle (6) is fixedly connected with the holding main rod (1), and the holding handle (6) intersects with an axis of the length direction of the holding main rod (1) to form an obtuse angle.
  3. 3. The photomask substrate clamping device according to claim 2, wherein a clamping head (3) close to the holding handle (6) is hinged to the clamping main rod (1), a pressing rod (7) is further arranged at the hinge joint of the clamping head (3) and the clamping main rod (1), and the pressing rod (7) controls the clamping head (3) to rotate.
  4. 4. A reticle substrate clamping device according to claim 3, characterized in that a clamping head (3) remote from the grip handle (6) is slidingly arranged on the clamping boom (1), the clamping head (3) being provided with a positioning unit (8).
  5. 5. A photomask substrate clamping device according to claim 3, characterized in that the clamping counting unit (5) comprises a counter with a screen display and a sensor, the counter is arranged on the holding handle (6), the sensor is arranged at the hinge joint of the clamping head (3) and the clamping main rod (1), and the sensor generates an electric signal and transmits the electric signal to the counter when the clamping head (3) rotates so as to count the counter.
  6. 6. The photomask substrate clamping device according to claim 1, wherein the clamping head (3) is further provided with a rotating chuck (301), the rotating chuck (301) is rotatably connected to the clamping head (3), the rotating chuck (301) is provided with a first clamping groove (302) adapting to the thickness of the photomask substrate (4), the first clamping groove (302) is arranged along the length direction of the rotating chuck (301) and penetrates through two ends of the rotating chuck (301), the rotating chuck (301) can rotate by 90 degrees relative to the clamping head (3), and when the rotating chuck (301) rotates, the notch orientation of the first clamping groove (302) is unchanged.
  7. 7. The mask substrate clamping device according to claim 6, wherein the first clamping groove (302) is disposed near an edge of the rotating chuck (301) such that a width of one side protrusion (303) formed by the first clamping groove (302) on the rotating chuck (301) is larger than a width of the other side protrusion (303).
  8. 8. The photomask substrate clamping device according to claim 1, wherein the clamping head (3) is provided with a first clamping groove (302) and a second clamping groove (304) which are perpendicular to each other, and the groove widths of the first clamping groove (302) and the second clamping groove (304) are matched with the thickness of the photomask substrate (4).
  9. 9. The photomask substrate clamping device according to claim 8, wherein the first clamping groove (302) is arranged along the length direction of the clamping head (3) and penetrates through one end of the clamping head (3), and the second clamping groove (304) is arranged at the edge position, far away from the clamping main rod (1), of the clamping head (3).
  10. 10. The photomask substrate clamping device according to any of claims 6 to 9, wherein a plurality of ring grooves (305) are formed in the clamping head (3) or the rotating chuck (301) along the direction of the first clamping groove (302), and the annular scraping-preventing adhesive strips (2) are sleeved on the clamping head (3) or the rotating chuck (301) through the ring grooves (305).

Description

Photomask substrate clamping device Technical Field The utility model relates to the field of semiconductor clamps, and particularly provides a photomask substrate clamping device. Background The reticle substrate is a basic material for manufacturing a photomask. Transfer of the mask blank typically requires a special fixture to avoid damaging or contaminating the mask blank. When the photomask substrate is placed in the storage box vertically, the photomask substrate can be clamped parallel to the extending direction of the clamp head through the F-shaped clamp; when the photomask substrate is placed parallel to the placing surface, the photomask substrate can only be clamped perpendicular to the extending direction of the clamp chuck through the I-shaped clamp. In either case, the clamping device needs to be provided with a scratch-proof adhesive tape at the clamping head position so as to prevent the damage to the photomask substrate when the photomask substrate is clamped. However, as the practical times of the clamp are increased, the anti-scraping rubber strip can be cracked, and if the rubber strip is cracked in the use process of the clamp, the damage and the falling of the product are easily caused. Disclosure of utility model In order to solve the problems, the utility model provides a clamping device capable of recording the use times of clamping equipment and timely replacing the adhesive tape which is damaged and broken soon. The specific technical scheme is as follows: The utility model provides a photomask substrate presss from both sides and gets device, includes the centre gripping mobile jib, centre gripping mobile jib both ends are provided with respectively and have the clamp head of preventing scraping the adhesive tape, two the clamp head is equipped with the photomask substrate together, still includes to press from both sides and gets the count unit, press from both sides and get the count unit can take notes and show the number of times that clamp head pressed from both sides the photomask substrate. In the scheme, the practical times of the clamping device are recorded through the clamping technical unit and can be directly displayed, the service life of the scratch-resistant adhesive tape can be effectively judged, and a new clamping device and an old clamping device do not need to be specially distinguished. And can make things convenient for operating personnel to judge after the number of times of use reaches the prescribed number of times to initiatively prevent scraping the change of adhesive tape, avoid appearing scraping the adhesive tape and use the fracture of too long time, cause the condition of photomask bottom plate damage. Preferably, the clamping main rod further comprises a holding handle, the holding handle is arranged at one end of the clamping main rod and fixedly connected with the clamping main rod, and the holding handle is intersected with the axis of the length direction of the clamping main rod to form an obtuse angle. In this scheme, press from both sides and get the device and can supply operating personnel to use manually to through letting the hand (hold) handle form certain angle with the centre gripping mobile jib, let the practicality of device more convenient, also reduce the interference condition with other parts. Preferably, a clamping head close to the holding handle is hinged to the clamping main rod, a pressing rod is further arranged at the hinge joint of the clamping head and the clamping main rod, and the pressing rod is used for controlling the clamping head to rotate, so that an operator can conveniently clamp a photomask substrate manually. Preferably, a clamping head which is far away from the holding handle is arranged on the main clamping rod in a sliding manner, and a positioning unit is arranged on the clamping head. The distance between the two clamping heads can be adjusted by adjusting the position of the clamping head, which is far away from one end of the holding handle, on the clamping main rod so as to adapt to photomask substrates with different specifications. Preferably, the clamping counting unit comprises a counter with a screen display and a sensor, the counter is arranged on the holding handle, the sensor is arranged at the hinge joint of the clamping head and the clamping main rod, and when the clamping head rotates, the sensor generates an electric signal and transmits the electric signal to the counter to count the counter. In this scheme, press from both sides and get the head and rotate once, press from both sides once promptly and get, can both enable the counter count, let the whole clamp of pressing from both sides and get the device and get the number of times direct display on the counter, can let operating personnel audio-visual seeing the life-span condition of the clamp of getting the device that uses, be convenient for in time change prevent scraping the adhesive tape, avoid preventing scraping the prod