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CN-224212252-U - Plane target hoisting device

CN224212252UCN 224212252 UCN224212252 UCN 224212252UCN-224212252-U

Abstract

The utility model discloses a plane target hoisting device, which comprises a base and an end grabbing mechanism. The two end grabbing mechanisms are arranged on the base and located below the hanging beam, the two end grabbing mechanisms are arranged along the length direction of the hanging beam, each end grabbing mechanism comprises a grabbing frame and a backboard fixing piece, each grabbing frame is provided with a backboard abutting surface, each backboard abutting surface is vertically arranged, each backboard fixing piece is arranged on each grabbing frame and can fix or loosen one end of the backboard in contact with each backboard abutting surface, and when the backboard fixing pieces fix the backboard to the grabbing frames, the plane target material is parallel to each backboard abutting surface. Because backplate butt joint face is vertical during hoist and mount, the gravity direction of plane target is the same rather than width direction this moment, resists the deformation of middle part under the dead weight of plane target through the width of the bigger size of plane target to the sagging deformation when restraining plane target hoist and mount reduces the risk of fracture when plane target hoist and mount.

Inventors

  • LIU HONGDA
  • FENG XIN
  • WU LONGHAI
  • GE CHUNQIAO

Assignees

  • 中山智隆新材料科技有限公司

Dates

Publication Date
20260508
Application Date
20250527

Claims (10)

  1. 1. The utility model provides a plane target hoist device which characterized in that includes: a base (100) provided with a hanging beam (110), wherein the hanging beam (110) is arranged along the left-right direction; Two tip snatchs mechanism (200), set up in base (100) and be located the below of hanging beam (110), two tip snatchs mechanism (200) are followed the length direction of hanging beam (110) arranges, tip snatchs mechanism (200) are including snatch frame (210) and backplate mounting (220), snatch frame (210) are provided with backplate butt face (211), backplate butt face (211) are vertical to be set up, backplate mounting (220) set up in snatch frame (210) and can fix or loosen with backplate one end of backplate that backplate butt face (211) contacted, backplate mounting (220) will the backplate is fixed in when snatching frame (210), plane target with backplate butt face (211) are parallel to each other.
  2. 2. The planar target hoisting device according to claim 1, wherein the base (100) further comprises two adjusting mechanisms (120), the two adjusting mechanisms (120) are arranged along the length direction of the hanging beam (110), the adjusting mechanisms (120) comprise adjusting frames (121) and locking pieces, the adjusting frames (121) are movably connected to the hanging beam (110) along the length direction of the hanging beam (110), the locking pieces are arranged between the hanging beam (110) and the adjusting frames (121) and used for locking or unlocking the positions of the hanging beam (110), the end grabbing mechanisms (200) are arranged on the adjusting frames (121), and the two end grabbing mechanisms (200) are in one-to-one correspondence with the two adjusting frames (121).
  3. 3. The planar target hoisting device according to claim 2, wherein the adjusting mechanism (120) further comprises a first hoisting rope (122), and the adjusting frame (121) is connected with the grabbing frame (210) through the first hoisting rope (122).
  4. 4. The planar target lifting device according to claim 2, wherein the end grabbing mechanism (200) further comprises a lifting connecting piece (230), the lifting connecting piece (230) is pivoted to the upper end of the grabbing frame (210) and the rotation axis is arranged in the left-right direction, and the lifting connecting piece (230) is connected with the adjusting mechanism (120).
  5. 5. The planar target hoisting device according to claim 4, wherein the hoisting connecting piece (230) is arc-shaped, two ends of the hoisting connecting piece (230) are respectively pivoted with the grabbing frame (210), a hoisting rope abdication hole (231) is formed between the hoisting connecting piece (230) and the grabbing frame (210), the adjusting mechanism (120) further comprises a first hoisting rope (122), the first hoisting rope (122) is penetrated through the hoisting rope abdication hole (231), and two ends of the first hoisting rope (122) are connected with the adjusting frame (121).
  6. 6. The planar target hoisting device according to claim 2, wherein the base (100) further comprises a hoisting ring (130) and a second hoisting rope (140), the hoisting ring (130) is located above the hoisting beam (110), two ends of the second hoisting rope (140) are connected with the two adjusting frames (121) in a one-to-one correspondence manner, and the middle part of the second hoisting rope (140) is connected with the hoisting ring (130).
  7. 7. The planar target lifting device according to claim 1, wherein the end gripping mechanism (200) is provided with at least two back plate fixing members (220) arranged in an up-down direction.
  8. 8. The planar target lifting device according to claim 7, wherein the grabbing frame (210) is strip-shaped and extends in an up-down direction, and the backboard abutting surface (211) is located on the front side of the grabbing frame (210).
  9. 9. The planar target hoisting device according to claim 7, wherein the back plate fixing member (220) is a threaded fastener, the grabbing frame (210) is provided with a mounting through hole along the front-rear direction, and the threaded fastener is arranged through the mounting through hole.
  10. 10. The planar target lifting device according to claim 1, wherein a concave portion (212) is provided on a front side of the gripping frame (210), and the concave portion (212) forms the back plate abutting surface (211).

Description

Plane target hoisting device Technical Field The utility model relates to target installation, in particular to a planar target hoisting device. Background In the sputtering coating process of the target material, a planar target material is required to be used, and the coating uniformity of a large-area substrate can be effectively improved by improving the length of the planar target material, and the film thickness fluctuation is reduced. The planar target comprises a back plate and a target piece bound on one side surface of the back plate, and is in a flat plate shape and is usually installed in a hoisting mode. The existing planar target lifting device is used for horizontally lifting the planar target by grabbing two ends of the backboard, however, due to the fact that the thickness of the planar target is thinner, when the length of the planar target is larger, the middle of the planar target is easy to droop and deform, so that the planar target is at risk of cracking, and the quality of a coating film is affected. Disclosure of utility model The present utility model aims to solve at least one of the technical problems existing in the prior art. Therefore, the utility model provides the plane target hoisting device, which can reduce the risk of cracking during hoisting of the plane target. The planar target hoisting device provided by the embodiment of the utility model comprises a base and an end grabbing mechanism. The base is provided with a hanging beam, the hanging beam is arranged in the left-right direction, two end grabbing mechanisms are arranged below the hanging beam and are arranged in the length direction of the hanging beam, each end grabbing mechanism comprises a grabbing frame and a backboard fixing piece, the grabbing frame is provided with a backboard abutting surface, the backboard abutting surface is vertically arranged, the backboard fixing piece is arranged at one end of the grabbing frame and can fix or loosen a backboard in contact with the backboard abutting surface, and when the backboard fixing piece is used for fixing the backboard to the grabbing frame, the plane target is parallel to the backboard abutting surface. According to the planar target hoisting device, when the planar target is hoisted through the planar target hoisting device, the two end grabbing mechanisms respectively grab two ends of the backboard of the planar target, at the moment, the grabbing frame is contacted with the backboard through the backboard abutting surface, so that the planar target is parallel to the backboard abutting surface, the backboard is fixed on the grabbing frame through the backboard fixing piece, and because the backboard abutting surface is vertical during hoisting, the gravity direction of the planar target is the same as the width direction of the planar target, the deformation of the middle part of the planar target under the dead weight is resisted through the width of the larger size of the planar target, the sagging deformation of the planar target during hoisting is restrained, and the cracking risk during hoisting of the planar target is reduced. According to some embodiments of the utility model, the base further comprises two adjusting mechanisms, the two adjusting mechanisms are arranged along the length direction of the hanging beam, the adjusting mechanisms comprise an adjusting frame and a locking piece, the adjusting frame is movably connected to the hanging beam along the length direction of the hanging beam, the locking piece is arranged between the hanging beam and the adjusting frame and used for locking or unlocking the position of the hanging beam, the end grabbing mechanisms are arranged on the adjusting frame, and the two end grabbing mechanisms are in one-to-one correspondence with the two adjusting frames. According to some embodiments of the utility model, the adjusting mechanism further comprises a first lifting rope, and the adjusting frame is connected with the grabbing frame through the first lifting rope. According to some embodiments of the utility model, the end grabbing mechanism further comprises a lifting connecting piece, wherein the lifting connecting piece is pivoted to the upper end of the grabbing frame, the rotation axis of the lifting connecting piece is arranged along the left-right direction, and the lifting connecting piece is connected with the adjusting mechanism. According to some embodiments of the utility model, the hoisting connecting piece is arc-shaped, two ends of the hoisting connecting piece are respectively pivoted with the grabbing frame, a hoisting rope abdication hole is formed between the hoisting connecting piece and the grabbing frame, the adjusting mechanism further comprises a first hoisting rope, the first hoisting rope is arranged in the hoisting rope abdication hole in a penetrating mode, and two ends of the first hoisting rope are connected with the adjusting frame. According to some embodiments of the uti