CN-224212339-U - Semiconductor device jumbo size work piece hoist and mount system

Abstract

The utility model discloses a large-size workpiece hoisting system of semiconductor equipment, which comprises a trolley, a lifting frame, a hoisting device, a hoisting support, a sliding rail and a lifting moving device, wherein the sliding rail is arranged on the hoisting support, the lifting moving device comprises a lifting seat, lifting rods, hoisting belts, a lifting driving mechanism, a translation seat and a translation driving mechanism, the translation seat is arranged on the sliding rail, the translation driving mechanism and the lifting seat are fixed on the translation seat, the lifting rods are positioned under the lifting seat, the lifting rods are connected with the lifting driving mechanism through a plurality of hoisting belts, the lifting frame is arranged under the front end of the sliding rail in the hoisting support and can upwards lift the hoisting device in the trolley and separate from the trolley, lower hanging structures are arranged at two ends of the hoisting device, and upper hanging structures matched with the lower hanging structures are arranged on the lifting rods. Through the mode, the lifting and transferring stability can be improved, and the damage probability of workpieces is reduced.

Inventors

• HUANG BAILIN
• ZHAO YUE

Assignees

• 常熟市兆恒众力精密机械有限公司

Dates

Publication Date

20260508

Application Date

20250620

Claims (10)

1. 1. The semiconductor equipment large-size workpiece hoisting system is characterized by comprising a trolley, a lifting frame, a lifting appliance, a hoisting support, a sliding rail and a lifting moving device; The lifting moving device comprises a lifting seat, lifting rods, lifting belts, a lifting driving mechanism, a translation seat and a translation driving mechanism, wherein the translation seat is arranged on the lifting support by means of the sliding rails, the translation driving mechanism is arranged on the translation seat and can drive the translation seat to horizontally reciprocate along the sliding rails, the lifting seat is fixed on the translation seat, the lifting seat comprises two side plates which are symmetrically arranged and a top plate which is connected with the tops of the two side plates, the lower ends of the two side plates are also provided with connecting bottom rods, the lifting driving mechanism is arranged on the top plate, the lifting rods are positioned under the top plate, a plurality of hanging belt holes are formed in the top plate, each hanging belt hole is internally provided with a lifting belt which is connected with the lifting rods and the lifting driving mechanism, and the outer sides of the two side plates are symmetrically provided with triangular positioning blocks which are fixedly connected with the translation seat; the lifting appliance can be transversely placed at the top of the trolley, the lifting frame is installed right below the front end of the sliding rail in the lifting support, the trolley can push a workpiece and the lifting appliance to enter the lifting frame, the lifting frame can lift the lifting appliance upwards and separate from the trolley, lower hanging structures are installed at two ends of the lifting appliance, and upper hanging structures matched with the lower hanging structures and hanging strip connecting positions corresponding to positions of lifting strips one by one are arranged on a rod body of the lifting rod.
2. 2. The large-size workpiece hoisting system of semiconductor equipment according to claim 1, wherein the lifting frame comprises a lifting driving motor, driving rollers, driving belts and supporting walls, the two supporting walls are symmetrically arranged on two sides of the front end of the hoisting frame, a plurality of connecting rods are arranged on the rear sides of the two supporting walls, the distance between the two supporting walls is just matched with the width of the trolley, vertical limit rails are symmetrically arranged in each supporting wall, a limit sliding seat capable of moving up and down along the vertical limit rails is mounted on each vertical limit rail, driving belt chucks are arranged on the limit sliding seat, brackets are arranged on the inner sides of the limit sliding seats, two ends of the driving rollers are symmetrically and rotatably mounted on the back parts of the two supporting walls, synchronous wheel shafts are respectively arranged at the two ends of the driving rollers, corresponding lifting guide frames are arranged at the top of each supporting wall, two driving belts are respectively fixed on one driving belt chuck, the other end of each driving belt is vertically upwards connected with the synchronous wheel shafts on the same side through the corresponding lifting guide frames, and the driving shafts are connected with the driving shafts through the driving shafts, and the driving shafts are fixedly connected with the lifting shafts of the lifting shafts on the middle of the lifting shafts.
3. 3. The large-size workpiece hoisting system of semiconductor equipment according to claim 2, wherein the hoisting tool comprises a hoisting rod, two lower hanging structures are symmetrically arranged at two ends of the hoisting rod, each lower hanging structure comprises a hanging seat and at least two hanging clamping blocks fixed on the inner side of the hanging seat, the hanging clamping blocks on each hanging seat are symmetrically distributed on two sides above the hoisting rod, positioning pressing blocks matched with the shape of a hoisting tool bracket are also arranged on the end on the outer side of the hanging seat, the upper hanging structure on the rod body of the lifting rod comprises a hanging plate, the hanging plate is fixedly arranged below the rod body and can be just clamped between the two hanging seats along with the movement of the lifting rod and clamped by the hanging clamping blocks.
4. 4. The semiconductor device large-sized workpiece lifting system as recited in claim 1, wherein, The lifting seat is characterized in that lifting rod limiting rails are symmetrically arranged on the inner sides of side plates on two sides of the lifting seat, end plates are symmetrically arranged at two ends of the lifting rods, a plurality of groups of limiting columns matched with the lifting rod limiting rails are arranged on each end plate, ball bearings are arranged on the top ends of each limiting column, and the ball bearings extend into the corresponding lifting rod limiting rails.
5. 5. The semiconductor device large-scale workpiece hoisting system of claim 1, wherein a sling plunger is rotatably mounted in a sling hole on the top plate.
6. 6. The large-size workpiece hoisting system of semiconductor equipment according to claim 1, wherein the lifting driving mechanism comprises lifting driving rollers and synchronous lifting motors, the synchronous lifting motors are installed above the lifting seat in a pairwise opposite mode, the lifting driving rollers are located right above the top plate, two ends of the lifting driving rollers are simultaneously connected with power output ends of the two synchronous lifting motors through couplings, a plurality of hanging pulleys are arranged on a roller body of the lifting driving rollers, a hanging belt is installed on each hanging pulley, and the tail ends of the hanging belts vertically penetrate through corresponding hanging belt holes downwards and then are connected with the lower portion.
7. 7. The system of claim 1, wherein a support column connected to the translation stage is mounted under the body of the lift drive motor.
8. 8. The large-size workpiece hoisting system of semiconductor equipment according to claim 1, wherein the translation seat comprises two sliding tables symmetrically arranged on two sliding rails, the triangular positioning blocks are arranged in the middle of the corresponding sliding tables, the front ends of the two sliding tables are connected together through a front connecting rod, a reinforcing rod is further arranged between the front connecting rod and the lifting seat, a group of driven wheels are mounted at the rail surface contact position of the front end inside of the sliding table and the corresponding sliding rail, a group of driving wheels are mounted at the rail surface contact position inside the rear end inside of the sliding table and the corresponding sliding rail, the translation driving mechanism comprises a translation driving motor and a translation driving roller, two ends of the translation driving roller are respectively connected with driving wheel groups at the front ends of the two sliding tables, the translation driving motor is fixed on the top plate, the power output end of the translation driving motor is connected with the middle of the translation driving roller through a right-angle turning gear group, and a protection shell is mounted at the outer side of the translation driving roller.
9. 9. The semiconductor device large-sized workpiece hoisting system according to claim 8, wherein a front impact sensor is mounted at a front end of each slide table, and a rear impact sensor is mounted at a rear end of each slide table.
10. 10. The semiconductor device large-size workpiece hoisting system according to claim 8, wherein a front rail clamping wheel set is installed below the front end of each sliding table, and a rear rail clamping wheel set is installed below the rear end of each sliding table.

Description

Semiconductor device jumbo size work piece hoist and mount system Technical Field The utility model relates to the field of semiconductor equipment processing, in particular to a large-size workpiece hoisting system of semiconductor equipment. Background The precision requirement is very high in the semiconductor processing process, so the production requirement on corresponding semiconductor processing equipment is also relatively high, for some semiconductor processing equipment components with larger volumes, the crane is usually used for completing the hoisting and transferring in different procedures, but the existing crane hoisting system generally has only one to two hoisting points, the vibration generated by the crane motion can be downwards amplified by the workpiece in the process of hoisting the workpiece by the crane, the work piece shaking amplitude is overlarge, the work piece shaking amplitude is unstable when entering a processing station, particularly when being electroplated and processed, the shaking amplitude is large and easily bumps around to cause the influence on the surface quality when being put into an electroplating pool, and therefore the stability of the whole operation process needs to be improved by optimizing the existing crane hoisting system, and the processing quality of the semiconductor equipment components is improved. Disclosure of utility model The utility model mainly solves the technical problem of providing a large-size workpiece hoisting system of semiconductor equipment, which can improve the stability of hoisting and transferring and ensure the processing quality of workpieces. In order to solve the technical problems, the utility model adopts a technical scheme that the utility model provides a large-size workpiece hoisting system of semiconductor equipment, which comprises a trolley, a lifting frame, a lifting appliance, a hoisting bracket, a sliding rail and a lifting moving device; the lifting device comprises a lifting seat, a lifting rod, lifting belts, a lifting driving mechanism, a translation seat and a translation driving mechanism, wherein the translation seat is arranged on the lifting support by the aid of the sliding rails, the translation driving mechanism is arranged on the translation seat and can drive the translation seat to horizontally reciprocate along the sliding rails, the lifting seat is fixed on the translation seat, the lifting seat comprises two side plates which are symmetrically arranged and a top plate which is connected with the tops of the two side plates, the lower ends of the two side plates are also provided with connecting bottom rods, the lifting driving mechanism is arranged on the top plate, the lifting rod is positioned under the top plate, a plurality of hanging belt holes are formed in the top plate, one lifting belt which is connected with the lifting rod and the lifting driving mechanism is arranged in each hanging belt hole, the outer sides of the two side plates are symmetrically provided with cams which are fixedly connected with the translation seat, the top positioning blocks of the trolley can be transversely placed on the top of the trolley, the trolley is arranged in front of the sliding rails in the lifting support, the trolley can be pushed down, the workpiece can be lifted up and down by the trolley, the lifting structure can be lifted up and lifted by the lifting trolley, the workpiece can be lifted up and lifted by the lifting trolley can be lifted by the lifting trolley, the lifting rod is characterized in that an upper hanging structure matched with the lower hanging structure and hanging strip connecting positions corresponding to the positions of the hanging strips one by one are arranged on the rod body of the lifting rod. In a preferred embodiment of the utility model, the lifting frame comprises two lifting driving motors, driving rollers, driving belts and supporting walls, wherein the two supporting walls are symmetrically arranged at two sides of the front end of the lifting frame, a plurality of connecting rods are arranged at the rear sides of the two supporting walls, the distance between the two supporting walls is just matched with the width of the trolley, vertical limiting rails are symmetrically arranged in each supporting wall, a limiting sliding seat capable of moving up and down along the vertical limiting rails is arranged on each vertical limiting rail, driving belt chucks are arranged on the limiting sliding seats, lifting tool brackets are arranged on the inner sides of the limiting sliding seats, two ends of the driving rollers are symmetrically and rotatably arranged on the back parts of the two supporting walls, synchronous wheel shafts are respectively arranged at the two ends of the driving rollers, corresponding lifting guide frames are arranged at the top parts of each supporting wall, two driving belts are respectively arranged at one end of each driving belt chuck, the