Search

CN-224212743-U - Evaporation coating device

CN224212743UCN 224212743 UCN224212743 UCN 224212743UCN-224212743-U

Abstract

The utility model provides an evaporation coating device which comprises a coating assembly, a shell assembly and a deposition source, wherein the coating assembly comprises a sealing shell, a movable inner rod, a rotary driving assembly and a baffle plate, the rotary driving assembly comprises a rotary driving motor and a coating piece, the shell assembly comprises a vacuum coating shell, a power mechanism, a guide post and a communicating pipe, the rotary driving motor is arranged in the sealing shell, the output end of the rotary driving motor extends from the bottom of the sealing shell to the outside of the sealing shell and is fixedly connected with the coating piece, the baffle plate is arranged on the lower side of the coating piece, the power mechanism is arranged at the top end of the vacuum coating shell, the output end of the power mechanism penetrates through the top end of the vacuum coating shell and is fixedly connected with the top of the sealing shell, the lifting of the coating piece can be driven by the lifting of the power mechanism, the distance between the deposition source and a substrate can be controlled and regulated in real time, and the evaporation quality of different substrates can be improved.

Inventors

  • XIAO CHANG
  • AN YONG

Assignees

  • 布勒莱宝光学设备（北京）有限公司

Dates

Publication Date
20260508
Application Date
20250220

Claims (9)

  1. 1. An evaporation coating device is characterized by comprising a coating component (1), a shell component (2) and a deposition source (3); The coating assembly (1) comprises a sealing shell (11), a movable inner rod (12), a rotary driving assembly (13) and a baffle plate (14), wherein the rotary driving assembly (13) comprises a rotary driving motor (131) and a coating piece (132); the shell component (2) comprises a vacuum coating shell (21), a power mechanism (22), a guide column (23) and a communicating pipe (24); The vacuum coating device comprises a vacuum coating shell (21), a movable inner rod (12) and a baffle plate (14), wherein the movable inner rod (12) is arranged inside the vacuum coating shell (21), the baffle plate (14) is fixedly connected with the top end of the sealing shell (11), a guide column (23) is fixedly connected with the top end of the vacuum coating shell (21), the movable inner rod (12) is inserted into the inner side of the guide column (23), a rotary driving motor (131) is arranged in the sealing shell (11), the output end of the rotary driving motor (131) extends from the bottom of the sealing shell (11) to the outside of the sealing shell (11) and is fixedly connected with a coating part (132), the baffle plate (14) is arranged on the lower side of the coating part (132), one end, close to the vacuum coating shell (21), of the baffle plate (14) is fixedly connected with the side end of the sealing shell (11) through a support arm, a power mechanism (22) is arranged on the top end of the vacuum coating shell (21), the output end of the power mechanism (22) penetrates through the top end of the vacuum coating shell (21) and is fixedly connected with the top of the sealing shell (11), and the other end of the baffle plate (14) is communicated with the vacuum coating shell (11).
  2. 2. The evaporation coating device according to claim 1, wherein two baffles (14) are provided, and the two baffles (14) are respectively positioned at two sides of the lower end of the coating member (132).
  3. 3. The evaporation coating apparatus according to claim 1, wherein the coating member (132) has a pan-shaped structure with a downward opening.
  4. 4. An evaporation coating apparatus according to claim 2, wherein the end of the baffle (14) remote from the vacuum coating housing (21) is inclined upwards.
  5. 5. The evaporation coating device according to claim 1, wherein a lifting base (31) is provided at the bottom of the deposition source (3), and the bottom end of the lifting base (31) is fixed to the bottom inner side of the vacuum coating housing (21).
  6. 6. The evaporation coating device according to claim 1, wherein a light control (111) is provided in the sealed housing (11).
  7. 7. The evaporation coating device according to claim 1, wherein the vacuum coating housing (21) comprises an upper housing (211) and a lower housing (212), the upper housing (211) and the lower housing (212) are connected in a sealing manner, and an object placing channel is formed on the outer surface of the upper housing (211) or the lower housing (212).
  8. 8. The evaporation coating device according to claim 1, wherein the number of the guide posts (23) is two, and the two guide posts (23) are symmetrically arranged at both sides of the top end of the vacuum coating housing (21).
  9. 9. The evaporation coating apparatus according to claim 1, wherein the upper surface of the baffle plate (14) is provided with a substrate fixing plate.

Description

Evaporation coating device Technical Field The utility model relates to the technical field of coating, in particular to an evaporation coating device. Background At present, in the processing process of base materials such as glass, crystals, chips and the like, a vacuum coating mode is generally adopted on the surface of the formed base material to form a coating, and the principle is that under the vacuum condition, a physical method is adopted to gasify the surface of a material source into gas atoms, molecules or partial ionization into ions, and the gas is processed by low-pressure gas to deposit a film with a special function on the surface of the base material so as to meet the requirement of the base material in use, and in order to improve the adhesion effect of the film, evaporation treatment is generally carried out in the process of coating. In the existing coating process, aiming at base materials with complex structures or base materials with different materials and different coating requirements, evaporation is a non-negligible step in order to achieve coating quality meeting respective requirements, however, the existing coating device is usually provided with a fixed deposition source, the evaporation effect cannot be adjusted in real time according to the coating requirements of different base materials, the flexibility is poor, and the problems of good coating quality and the like are caused. Disclosure of utility model The technical scheme includes that the evaporation coating device comprises a coating assembly, a shell assembly and a deposition source, wherein the coating assembly comprises a sealing shell, a movable inner rod, a rotary driving assembly and a baffle, the rotary driving assembly comprises a rotary driving motor and a coating piece, the shell assembly comprises a vacuum coating shell, a power mechanism, a guide post and a communicating pipe, the coating assembly is arranged inside the vacuum coating shell, the movable inner rod is fixedly connected with the top end of the sealing shell, the guide post is fixedly connected with the top end of the vacuum coating shell, the movable inner rod is inserted into the inner side of the guide post, the rotary driving motor is arranged in the sealing shell, the output end of the rotary driving motor extends from the bottom of the sealing shell to the outside of the sealing shell and is fixedly connected with the coating piece, the baffle is arranged on the lower side of the coating piece, one end of the baffle close to the vacuum coating shell is fixedly connected with the side end of the sealing shell through a support arm, the power mechanism is arranged on the top end of the vacuum coating shell, the output end of the power mechanism penetrates through the top end of the vacuum coating shell and is fixedly connected with the top end of the sealing shell, and the communicating pipe extends to the outside of the sealing shell. Specifically, two baffles are arranged, and the two baffles are respectively positioned at two sides of the lower end of the film plating piece. Specifically, the coating piece is of a pot-shaped structure with a downward opening. Further, one end of the baffle, which is far away from the vacuum coating shell, is inclined upwards. Specifically, the bottom of the deposition source is provided with a lifting base, and the bottom end of the lifting base is fixed on the inner side of the bottom of the vacuum coating shell. Specifically, a light control is arranged in the sealing shell. Specifically, the vacuum coating shell comprises an upper shell and a lower shell, wherein the upper shell is in sealing connection with the lower shell, and an object placing channel is formed in the outer surface of the upper shell or the outer surface of the lower shell. Specifically, the number of the guide posts is two, and the two guide posts are symmetrically arranged on two sides of the top end of the vacuum coating shell. Specifically, the upper surface of baffle is provided with substrate fixed plate. The embodiment of the utility model has the technical effects that the lifting and lowering adjustment of the power mechanism can drive the lifting and lowering of the coating piece during coating, the movable inner rod moves up and down along the guide post along with the lifting and lowering of the output end of the power mechanism, the balance stability of the coating piece during coating is ensured, the coating piece is arranged into a pot shape and matched with the baffle plate, so that the sputtered coating material can stay between the coating piece and the baffle plate during coating, the coating material is effectively prevented from being sputtered into the cavity of the vacuum coating shell, the evaporation effect is prevented from being influenced by covering the deposition source, when different coating thickness requirements and quality requirements of the base materials are met, the distance between the base