CN-224212745-U - PVD coating equipment

Abstract

The utility model discloses PVD (physical vapor deposition) coating equipment, which relates to the technical field of coating equipment and comprises a coating box, a circulating orifice plate, a stirring mechanism and a stirring mechanism, wherein the circulating orifice plate is fixedly connected to the position, close to the bottom, in the coating box, the circulating orifice plate is fixedly connected with a storage tank, the stirring mechanism is arranged in the storage tank and used for stirring raw materials, the stirring mechanism comprises a driving part, a first stirring blade rod and a second stirring blade rod, and the second stirring blade rod is rotatably connected to the center in the storage tank. This PVD coating equipment, through stirring the use of mechanism, can make the raw materials flow the processing, the raw materials be heated evenly when guaranteeing to heat, accomplish the effect of evaporation to, improve production efficiency, reduce manufacturing cost, and ensure the stability of technology, this PVD coating equipment through the use of accuse flow mechanism, can control the inside air current of coating film case, makes inside air current contact product steadily, guarantees the result of use, overall structure is simple, and is simple and convenient to use, improves the result of use.

Inventors

• GUO FENGMING
• GUO GUANGYU

Assignees

• 科汇纳米技术（深圳）有限公司

Dates

Publication Date

20260508

Application Date

20250521

Claims (6)

1. 1. A PVD coating apparatus, comprising: a film plating box (1); The circulating pore plate (3), the circulating pore plate (3) is fixedly connected to the position, close to the bottom, in the coating box (1), and the circulating pore plate (3) is fixedly connected with a storage tank (17); The stirring mechanism is arranged in the storage tank (17) and used for stirring raw materials, the stirring mechanism comprises a driving part, a first stirring blade rod (13) and a second stirring blade rod (12), the second stirring blade rod (12) is rotationally connected to the center in Chu Liaocao (17), the first stirring blade rod (13) is rotationally connected to the second stirring blade rod (12), the driving part is arranged at the bottom of the circulating orifice plate (3) and is connected with the second stirring blade rod (12) and the first stirring blade rod (13), and The flow control mechanism is arranged in the coating box (1) and used for controlling air flow in the coating box (1), and comprises a linkage part, a synchronization part and a plurality of fan blades (4), wherein the synchronization part is arranged at the inner bottom of the coating box (1), the linkage part is arranged in the coating box (1), and the fan blades (4) are all arranged on the synchronization part.
2. 2. The PVD coating equipment according to claim 1, characterized in that the driving part comprises a driving motor (14), a driving bevel gear (16) and a transmission assembly, the driving motor (14) is fixedly connected to the bottom of the circulation orifice plate (3), the driving bevel gear (16) is fixedly connected to the output end of the driving motor (14), the transmission assembly is arranged on the second stirring blade rod (12), and the transmission assembly is connected with the first stirring blade rod (13).
3. 3. A PVD coating apparatus according to claim 2, wherein the transmission assembly comprises a first driven bevel gear (9) and a second driven bevel gear (10), the first driven bevel gear (9) being fixedly connected to the bottom of the first stirring blade bar (13), the second driven bevel gear (10) being fixedly connected to the bottom of the second stirring blade bar (12), the first driven bevel gear (9) and the first stirring blade bar (13) being both intermeshed with the driving bevel gear (16).
4. 4. A PVD coating apparatus according to claim 3, wherein the synchronizing member comprises a plurality of synchronizing gears (5) and a synchronizing toothed disc (15), wherein a plurality of the synchronizing gears (5) are rotatably connected to the inner bottom of the coating tank (1) at equal intervals, the synchronizing toothed disc (15) is rotatably connected to the inner bottom of the coating tank (1), and the synchronizing toothed disc (15) is engaged with the plurality of synchronizing gears (5).
5. 5. The PVD coating equipment according to claim 4, wherein the linkage part comprises a driving gear (8), a linkage toothed belt (7) and a linkage gear (6), the linkage gear (6) is fixedly connected to the bottom of one of the synchronous gears (5), the driving gear (8) is fixedly connected to the bottom of the first stirring blade rod (13), the linkage toothed belt (7) is sleeved on the driving gear (8) and the linkage gear (6), and the linkage toothed belt (7) is meshed with the driving gear (8) and the linkage gear (6).
6. 6. The PVD coating equipment according to claim 5, wherein a box door (2) is fixedly connected to one side of the outer surface of the coating box (1), and a heating plate (11) is fixedly connected to the inside of the storage groove (17).

Description

PVD coating equipment Technical Field The utility model relates to the technical field of coating equipment, in particular to PVD coating equipment. Background PVD, physical vapor deposition, refers to a process of transferring a substance from a source to a substrate surface by using a physical process, and has the effect of spraying particles with special properties onto a precursor with lower properties, so that the precursor has better properties, and PVD basic methods include vacuum evaporation, sputtering and ion plating. The novel PVD coating equipment is recorded in the authority publication number CN214300324U, and comprises a device body, the inside bottom of device body is equipped with the fixed plate, the fixed plate top is equipped with the stock chest, device body top is equipped with the rotor plate, rotor plate bottom both sides all are equipped with the arc, the arc bottom is equipped with the regulation pole, regulation pole one end is equipped with the grip block, fixed plate bottom both sides all are equipped with the axis of rotation, the axis of rotation top outside is equipped with radiator fan. According to the utility model, through the arrangement of the clamping plates and the rotating plates, the distance between the two clamping plates can be adjusted by the hydraulic cylinder, so that the clamping plates can clamp and fix objects with different sizes, meanwhile, the rotating plates can be driven to rotate by the first motor to drive the objects to be coated to rotate, further, the coating of the objects is more uniform, and the two cooling fans can be driven to rotate by the second motor to further cool the heating plate. The above-mentioned patent can carry out the centre gripping and fix the not unidimensional object for the coating film of object is more even, can dispel the heat to the hot plate, but in the use, the inside raw materials of storage tank is in static state, can not guarantee to be heated evenly, guarantees the evaporation effect, simultaneously, can not control inside air current effect, influences the use. Disclosure of utility model The utility model provides PVD coating equipment, which can enable raw materials to flow through the use of an agitating mechanism, ensure that the raw materials are heated uniformly during heating, finish the evaporation effect, improve the production efficiency, reduce the production cost, ensure the process stability, control the air flow in a coating box through the use of a flow control mechanism, enable the air flow in the coating box to be in stable contact with products, ensure the use effect, and have the advantages of simple integral structure, simple and convenient use and improved use effect. In order to achieve the purpose, the utility model is realized by the following technical scheme that the PVD coating equipment comprises: a film plating box; The circulating pore plate is fixedly connected to the position, close to the bottom, in the film plating box, and is fixedly connected with the storage tank; The stirring mechanism is arranged in the storage tank and used for stirring raw materials and comprises a driving part, a first stirring blade rod and a second stirring blade rod, wherein the second stirring blade rod is rotationally connected to the center in the storage tank, the first stirring blade rod is rotationally connected to the second stirring blade rod, the driving part is arranged at the bottom of the circulation pore plate and is connected with the second stirring blade rod and the first stirring blade rod, and The flow control mechanism is arranged in the coating box and used for controlling air flow in the coating box, and comprises a linkage part, a synchronization part and a plurality of fan blades, wherein the synchronization part is arranged at the bottom in the coating box, the linkage part is arranged in the coating box, and the fan blades are all arranged on the synchronization part. Further, the drive part comprises a drive motor, a drive bevel gear and a transmission assembly, wherein the drive motor is fixedly connected to the bottom of the circulation pore plate, the drive bevel gear is fixedly connected to the output end of the drive motor, the transmission assembly is arranged on the second stirring blade rod, and the transmission assembly is connected with the first stirring blade rod. Further, the transmission assembly comprises a first driven bevel gear and a second driven bevel gear, wherein the first driven bevel gear is fixedly connected to the bottom of the first stirring blade rod, the second driven bevel gear is fixedly connected to the bottom of the second stirring blade rod, and the first driven bevel gear and the first stirring blade rod are mutually meshed with the driving bevel gear. Further, the synchronous component comprises a plurality of synchronous gears and synchronous fluted discs, the synchronous gears are equally and rotatably connected to the bottom in the coati