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CN-224212746-U - Evaporation source device and evaporation equipment

CN224212746UCN 224212746 UCN224212746 UCN 224212746UCN-224212746-U

Abstract

The utility model discloses an evaporation source device and evaporation equipment, and relates to the field of coating equipment. The evaporation source device comprises a crucible assembly, a lifting mechanism and a flow promoting mechanism, wherein the crucible assembly is provided with an evaporation cavity with an upward opening, the crucible assembly is used for heating and evaporating materials contained in the evaporation cavity, the lifting mechanism is connected with the crucible assembly and used for driving the crucible assembly to move to a plurality of different height positions in the vertical direction, and the flow promoting mechanism is used for stirring the materials in the evaporation cavity. The evaporation source device provided by the utility model can improve the coating speed and the coating effect.

Inventors

  • XIANG JIANGXIONG
  • ZOU WEI
  • YANG SUPING
  • ZHANG BIN

Assignees

  • 天齐锂业新能源技术研究(眉山)有限公司

Dates

Publication Date
20260508
Application Date
20250611

Claims (10)

  1. 1. An evaporation source device, comprising: A crucible assembly (110) with an upward opening evaporation cavity (111), wherein the crucible assembly (110) is used for heating and evaporating materials contained in the evaporation cavity (111); the lifting mechanism (120) is connected with the crucible assembly (110) and is used for driving the crucible assembly (110) to move to a plurality of different height positions in the vertical direction; And a flow promoting mechanism (130) for stirring the material in the evaporation cavity (111).
  2. 2. The evaporation source device according to claim 1, further comprising a fixing plate (140) and a lifting guide rod (150) extending in a vertical direction, wherein the fixing plate (140) is used for being fixedly connected with an external structure, a top end of the lifting guide rod (150) is connected with the crucible assembly (110), and a bottom end of the lifting guide rod passes through the fixing plate (140) and is in sliding fit with the fixing plate (140).
  3. 3. The evaporation source device according to claim 2, wherein the lifting mechanism (120) comprises a lifting driving member (121), a worm (122), a worm wheel (123) and a lifting screw rod (124), the worm (122) and the worm wheel (123) are rotatably arranged on the fixed plate (140), and the lifting driving member (121) is in transmission connection with the worm (122) and is used for driving the worm (122) to rotate; The worm (122) is meshed with the outer side wall of the worm wheel (123), a screw hole is formed in the worm wheel (123) in a penetrating mode, the lifting screw rod (124) penetrates through the screw hole and is in threaded fit with the screw hole, and the top end of the lifting screw rod (124) is connected with the crucible assembly (110).
  4. 4. The evaporation source device according to claim 3, wherein the worm (122) and the worm wheel (123) are disposed on a bottom surface of the fixing plate (140), and the fixing plate (140) is provided with a relief hole through which the lifting screw (124) passes.
  5. 5. The evaporation source device according to claim 1, wherein the flow promoting mechanism (130) comprises a rotary driving member (131) and at least two rotating rollers (132), the at least two rotating rollers (132) are arranged in parallel in the evaporation cavity (111), and a plurality of blades (133) are erected on the side wall of each rotating roller (132); Each rotating roller (132) is coaxially sleeved with an input gear (134), the input gears (134) corresponding to any two adjacent rotating rollers (132) are meshed with each other, and the rotary driving piece (131) is in transmission connection with one rotating roller (132) and is used for driving each rotating roller (132) to rotate.
  6. 6. The evaporation source device according to claim 5, wherein the flow-promoting mechanism (130) further comprises two mounting seats (135), the two mounting seats (135) are respectively hung on two opposite sides of the opening of the evaporation cavity (111), and two ends of each rotating roller (132) are respectively rotatably arranged on the two mounting seats (135).
  7. 7. The evaporation source device according to claim 6, wherein the flow promoting mechanism (130) further comprises a transmission gear (136), a transmission chain (137), a driving sprocket (138), a driven sprocket (139) and a universal coupling (1391), the driving sprocket (138) is rotatably provided at the bottom of the crucible assembly (110), and the rotation driver (131) is connected to the driving sprocket (138) through the universal coupling (1391); The driven sprocket (139) is rotatably arranged at the top of the crucible assembly (110), the transmission chain (137) is sleeved between the driving sprocket (138) and the driven sprocket (139), and the transmission gear (136) is coaxially connected with the driven sprocket (139) and meshed with the input gear (134) corresponding to one of the rotating rollers (132).
  8. 8. The evaporation source device according to claim 1, further comprising a film thickness gauge (160), the film thickness gauge (160) being disposed above the evaporation chamber (111).
  9. 9. The evaporation source device according to claim 1, wherein the crucible assembly (110) comprises a housing (112) and a crucible (113) disposed in the housing (112), the crucible (113) defining the evaporation chamber (111), the housing (112) being connected to the lifting mechanism (120), and a heating coil (114) being disposed between the housing (112) and the crucible (113).
  10. 10. An evaporation apparatus, characterized by comprising the evaporation source device (100) according to any one of claims 1 to 9.

Description

Evaporation source device and evaporation equipment Technical Field The utility model relates to the field of coating equipment, in particular to an evaporation source device and evaporation equipment. Background Vacuum coating is commonly performed in the market by using vapor deposition equipment. Specifically, the evaporation source device of the evaporation equipment comprises a crucible for containing and heating materials, and the materials are melted and evaporated under the heating of the crucible and reach the surface of a substrate to form a lithium film. In the evaporation equipment, the height of the crucible cannot be adjusted, the liquid level after the material is melted gradually decreases along with the evaporation process, the distance between the liquid level and the substrate gradually increases, the coating speed and the coating quality decrease, and impurities generated by the reaction of partial materials, such as lithium, are extremely easy to react with other substances to generate in the evaporation process to float on the liquid level, so that the evaporation speed gradually decreases, and the coating speed decreases and the coating effect becomes poor. Disclosure of utility model The utility model aims to provide an evaporation source device which can improve the coating speed and the coating effect. The utility model further aims to provide evaporation equipment which has the characteristics of higher coating speed and better coating effect. The embodiment of the utility model provides a technical scheme that: An evaporation source apparatus, comprising: the crucible assembly is provided with an evaporation cavity with an upward opening and is used for heating and evaporating materials contained in the evaporation cavity; the lifting mechanism is connected with the crucible assembly and used for driving the crucible assembly to move to a plurality of different height positions in the vertical direction; and the flow promoting mechanism is used for stirring the materials in the evaporation cavity. In an alternative embodiment, the crucible assembly further comprises a fixing plate and a lifting guide rod extending in the vertical direction, wherein the fixing plate is used for being fixedly connected with an external structure, the top end of the lifting guide rod is connected with the crucible assembly, and the bottom end of the lifting guide rod penetrates through the fixing plate and is in sliding fit with the fixing plate. In an alternative embodiment, the lifting mechanism comprises a lifting driving piece, a worm wheel and a lifting screw rod, wherein the worm and the worm wheel are respectively and rotatably arranged on the fixed plate, and the lifting driving piece is in transmission connection with the worm and is used for driving the worm to rotate; The worm is meshed with the outer side wall of the worm wheel, the worm wheel is provided with a threaded hole in a penetrating mode, the lifting screw rod penetrates through the threaded hole and is in threaded fit with the threaded hole, and the top end of the lifting screw rod is connected with the crucible assembly. In an alternative embodiment, the worm and the worm wheel are arranged on the bottom surface of the fixing plate, and the fixing plate is provided with a yielding hole for the lifting screw rod to pass through. In an alternative embodiment, the flow promoting mechanism comprises a rotary driving piece and at least two rotating rollers, wherein the at least two rotating rollers are arranged in parallel in the evaporation cavity, and a plurality of blades are vertically arranged on the side wall of each rotating roller; The rotary rollers are coaxially sleeved with input gears, the input gears corresponding to any two adjacent rotary rollers are meshed with each other, and the rotary driving piece is in transmission connection with one of the rotary rollers and is used for driving the rotary rollers to rotate. In an alternative embodiment, the flow promoting mechanism further includes two mounting seats, the two mounting seats are respectively hung on two opposite sides of the opening of the evaporation cavity, and two ends of each rotating roller are respectively rotatably arranged on the two mounting seats. In an alternative embodiment, the flow promoting mechanism further comprises a transmission gear, a transmission chain, a driving sprocket, a driven sprocket and a universal coupling, wherein the driving sprocket is rotatably arranged at the bottom of the crucible assembly, and the rotary driving piece is connected with the driving sprocket through the universal coupling; The driven sprocket is rotatably arranged at the top of the crucible assembly, the transmission chain is sleeved between the driving sprocket and the driven sprocket, and the transmission gear is coaxially connected with the driven sprocket and meshed with the input gear corresponding to one of the rotating rollers. In an alternative embo