CN-224212747-U - Glass coating equipment and glass production system

Abstract

The application provides glass coating equipment and a glass production system, wherein the glass coating equipment comprises a cavity, a cathode, a vacuum pump, a sputtering power supply, a first cooling device and a second cooling device; the cavity is provided with a coating cavity, the cathode is contained in the coating cavity and used for bearing a target, the vacuum pump is used for pumping air in the coating cavity to enable the coating cavity to form a vacuum environment, the sputtering power supply is electrically connected with the cathode, the first cooling device is connected with the cathode in a heat exchange mode to cool the cathode, and the second cooling device is connected with the sputtering power supply and the vacuum pump in a heat exchange mode to cool the sputtering power supply and the vacuum pump. The glass coating equipment provided by the application effectively improves the cooling effect on the cathode, the sputtering power supply and the vacuum pump, thereby effectively improving the reliability of the glass coating equipment.

Inventors

• DONG QINGSHI
• SHUAI JIANZHONG
• LIU LIFENG

Assignees

• 信义超薄玻璃(东莞)有限公司

Dates

Publication Date

20260508

Application Date

20250423

Claims (10)

1. 1. A glass coating device is characterized in that, the glass coating device comprises: the cavity is provided with a coating cavity; the cathode is accommodated in the coating cavity and used for bearing a target; The vacuum pump is used for pumping air in the coating cavity so as to enable the coating cavity to form a vacuum environment; a sputtering power supply electrically connected to the cathode; the first cooling device is connected with the cathode in a heat exchange way so as to cool the cathode; And the second cooling device is connected with the sputtering power supply and the vacuum pump in a heat exchange manner so as to cool the sputtering power supply and the vacuum pump.
2. 2. The glass coating apparatus according to claim 1, wherein the first cooling device comprises a first inner circulation cooling component and a first outer circulation cooling component, the first inner circulation cooling component is used for circulating a first cooling medium and is connected with the cathode in a heat exchange mode so as to cool the cathode, and the first outer circulation cooling component is used for circulating a second cooling medium and is connected with the first inner circulation cooling component in a heat exchange mode so as to cool the first cooling medium.
3. 3. The glass coating apparatus of claim 2, wherein the first cooling medium is purified water or cooling oil.
4. 4. The glass coating apparatus of claim 2, wherein the first external circulation cooling assembly comprises a first cooling tower and a first reservoir for storing the second cooling medium, the first cooling tower being in line with the first reservoir for delivering the second cooling medium from the first reservoir to the first cooling tower.
5. 5. The glass coating apparatus of claim 4, wherein the first cooling tower is disposed above the first reservoir.
6. 6. The glass coating apparatus according to any one of claims 1 to 5, wherein the second cooling device comprises a second inner circulation cooling module for circulating a third cooling medium and heat-exchanging connected to the sputtering power supply and the vacuum pump to cool the sputtering power supply and the vacuum pump, and a second outer circulation cooling module for circulating a fourth cooling medium and heat-exchanging connected to the second inner circulation cooling module to cool the third cooling medium.
7. 7. The glass coating apparatus of claim 6, wherein the third cooling medium is purified water or cooling oil.
8. 8. The glass coating apparatus according to claim 6, wherein the second external circulation cooling module includes a second cooling tower and a second reservoir for storing the fourth cooling medium, the second cooling tower being in line with the second reservoir for transporting the fourth cooling medium from the second reservoir to the second cooling tower.
9. 9. The glass coating apparatus of claim 8, wherein the second cooling tower is disposed above the second reservoir.
10. 10. A glass production system comprising the glass coating apparatus according to any one of claims 1 to 9.

Description

Glass coating equipment and glass production system Technical Field The application relates to the technical field of glass manufacturing, in particular to glass coating equipment and a glass production system. Background In the process of manufacturing glass, in order to make the glass have the functions of heat reflection, light reflection and the like, a glass coating device is generally used for coating the surface of the glass. Glass coating equipment typically includes a cathode, a vacuum pump, a sputtering power supply, and a cooling device for circulating a cooling medium to cool the cathode, the vacuum pump, and the sputtering power supply waiting for cooling components. However, the cooling medium in the cooling device flows through each part to be cooled in turn, so that the temperature of the cooling medium is continuously increased, and the cooling effect of the part to be cooled positioned at the downstream position is poor, which is not beneficial to improving the reliability of the glass coating equipment. Disclosure of utility model The application aims to provide glass coating equipment and a glass production system, and aims to solve the technical problem of reliability of glass coating equipment in the related art. The technical scheme includes that the glass coating equipment comprises a cavity, a cathode, a vacuum pump, a sputtering power supply, a first cooling device and a second cooling device, wherein the cavity is provided with a coating cavity, the cathode is contained in the coating cavity and used for bearing a target, the vacuum pump is used for pumping air in the coating cavity to enable the coating cavity to form a vacuum environment, the sputtering power supply is electrically connected to the cathode, the first cooling device is connected to the cathode in a heat exchange mode to cool the cathode, and the second cooling device is connected to the sputtering power supply and the vacuum pump in a heat exchange mode to cool the sputtering power supply and the vacuum pump. The glass coating equipment provided by the embodiment of the application has the advantages that the first cooling device and the second cooling device are arranged, the first cooling device is used for cooling the cathode, and the second cooling device is used for cooling the sputtering power supply and the vacuum pump, so that the cooling medium in the first cooling device and the cooling medium in the second cooling device can be isolated from each other, the heat of the cooling medium in the first cooling device cannot be mutually transferred with the heat of the cooling medium in the second cooling device, the cooling effect on the cathode, the sputtering power supply and the vacuum pump is effectively improved, and the reliability of the glass coating equipment is effectively improved. In some embodiments of the application, the first cooling device comprises a first inner circulation cooling component for circulating a first cooling medium and heat-exchanging connected to the cathode for cooling the cathode, and a first outer circulation cooling component for circulating a second cooling medium and heat-exchanging connected to the first inner circulation cooling component for cooling the first cooling medium. In some embodiments of the application, the first cooling medium is purified water or cooling oil. In some embodiments of the application, the first external circulation cooling assembly includes a first cooling tower and a first reservoir for storing a second cooling medium, the first cooling tower being in line with the first reservoir to deliver the second cooling medium from the first reservoir to the first cooling tower. In some embodiments of the application, the first cooling tower is disposed above the first reservoir. In some embodiments of the present application, the second cooling device includes a second inner circulation cooling assembly for circulating a third cooling medium and heat-exchanging connected to the sputtering power supply and the vacuum pump to cool the sputtering power supply and the vacuum pump, and a second outer circulation cooling assembly for circulating a fourth cooling medium and heat-exchanging connected to the second inner circulation cooling assembly to cool the third cooling medium. In some embodiments of the application, the third cooling medium is purified water or cooling oil. In some embodiments of the application, the second external circulation cooling assembly includes a second cooling tower and a second reservoir for storing a fourth cooling medium, the second cooling tower being in line with the second reservoir to deliver the fourth cooling medium from the second reservoir to the second cooling tower. In some embodiments of the application, the second cooling tower is disposed above the second reservoir. In a second aspect, an embodiment of the present application provides a glass production system, including a glass coating apparatus according t