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CN-224212748-U - Multifunctional film coating mechanism

CN224212748UCN 224212748 UCN224212748 UCN 224212748UCN-224212748-U

Abstract

The application belongs to the field of vacuum coating, and particularly relates to a multifunctional coating mechanism which comprises a fixed main body, a coating target frame, a coating target assembly, a displacement driving assembly for driving the coating target frame to move, a rotary driving assembly for driving the coating target to rotate, and a cooling assembly for inputting and outputting cooling liquid. In the application, the film plating target is driven to move and simultaneously driven to rotate in real time, so that the uniformity, efficiency, quality and process flexibility of the film plating can be effectively improved, and the stability of the film plating process parameters can be maintained while the film plating time of the film plating mechanism is improved.

Inventors

  • Lu Zuojun
  • WANG DAWEN

Assignees

  • 广东森丰薄膜科技股份有限公司

Dates

Publication Date
20260508
Application Date
20250416

Claims (10)

  1. 1. The utility model provides a multi-functional coating film mechanism which characterized in that, this coating film mechanism includes: a fixing body; The coating target frame is movably arranged on one side of the fixed main body, a first dismounting piece and a second dismounting piece are respectively arranged at two ends of the coating target frame, and a dismounting position is formed between the first dismounting piece and the second dismounting piece; The coating target assembly comprises a coating target, a first target head and a second target head, wherein two ends of the coating target are respectively and rotatably connected with the first target head and the second target head, and the first target head and the second target head are respectively and detachably arranged on a first dismounting piece and a second dismounting piece so that the coating target is detachably arranged in the dismounting position; The displacement driving component is used for driving the film coating target frame to move, is arranged on the other side of the fixed main body, and movably penetrates through the fixed main body to be in driving connection with the film coating target frame; The rotary driving assembly is arranged on the other side of the fixed main body, movably penetrates through the fixed main body to be connected with the film coating target frame, and is in driving connection with the film coating target on the dismounting position; The cooling assembly is used for inputting and outputting cooling liquid, the cooling assembly is provided with a liquid inlet channel and a liquid outlet channel, the cooling assembly is arranged on the other side of the fixed main body, the cooling assembly movably penetrates through the fixed main body to be connected with the coating target frame, and the liquid outlet channel and the liquid inlet channel are communicated with a coating target on the disassembly and assembly position.
  2. 2. The multifunctional coating mechanism according to claim 1, wherein a circulating cooling channel is arranged in the coating target, and a discharge inlet and a discharge outlet which are communicated with the circulating cooling channel are further arranged on the second target head, and the liquid inlet channel and the liquid outlet channel are respectively communicated with the discharge inlet and the discharge outlet.
  3. 3. The multifunctional coating mechanism according to claim 2, wherein a first connecting channel and a second connecting channel are arranged in the second dismounting member, the liquid inlet channel is communicated with the discharge port through the first connecting channel, and the liquid outlet channel is communicated with the discharge port through the second connecting channel; The second dismounting piece is further provided with a plurality of positioning grooves which are communicated with the first connecting channel and the second connecting channel respectively, the second target head is further fixedly provided with a plurality of positioning convex rings which are respectively arranged on the outer side of the discharge port and the outer side of the discharge inlet in a surrounding mode, and the positioning convex rings are respectively inserted into the positioning grooves so that the first connecting channel and the second connecting channel are communicated with the liquid inlet channel and the liquid outlet channel respectively.
  4. 4. The multifunctional coating mechanism according to claim 3, wherein the coating target comprises an upper end cover, a lower end cover, a water guide rod, a yoke, a target body and a magnet, wherein the upper end cover is rotatably arranged on the second target head, the lower end cover is rotatably arranged on the first target head, the target body is sleeved outside the yoke, and two ends of the target body are respectively fixed with the upper end cover and the lower end cover; The circulating cooling channel comprises an inner water channel and an outer water channel, the discharging port is communicated with one end of the inner water channel, the other end of the inner water channel sequentially passes through the water guide rod and the yoke, one end of the outer water channel is communicated with the discharging port, the other end of the outer water channel sequentially passes through the upper end cover, the water guide rod, the yoke and the target body, and the other end of the outer water channel is communicated with the other end of the inner water channel.
  5. 5. The multifunctional film plating mechanism according to claim 1, wherein the first detachable member is positioned below the second detachable member, the first detachable member is provided with an insertion hole, the first target head comprises an insertion part and a fixing part, the insertion part is fixedly arranged on the lower side of the fixing part, the insertion part extends into the insertion hole, the fixing part is abutted against the first detachable member, and a first locking member for locking the first detachable member and the first detachable member is arranged between the fixing part and the first detachable member; The side edge of the insertion hole penetrates through one end, far away from the coating target frame, of the first dismounting piece to form an insertion hole, and the insertion hole is matched with the insertion part; The second dismounting part comprises a dismounting part and two limiting plates, wherein the two limiting plates are respectively and fixedly arranged on the left side and the right side of the dismounting part, a limiting groove is formed between the second dismounting part and the two limiting plates, the second target head is arranged in the limiting groove, the left side and the right side of the second target head are respectively attached to the two limiting plates, and the second target head is detachably connected with the dismounting part.
  6. 6. The multifunctional coating mechanism according to claim 1, wherein the displacement driving assembly comprises a displacement driving piece, a displacement mounting seat and a push-pull rod, the displacement driving piece is fixedly arranged on the displacement mounting seat, one end of the push-pull rod movably penetrates through the displacement mounting seat and the fixing body to be fixed with the coating target frame, and the other end of the push-pull rod is in driving connection with the displacement driving piece; one side of the displacement mounting seat is embedded into the fixed main body, and a first insulating sleeve is arranged between the displacement mounting seat and the fixed main body; a first guide sleeve is arranged between the push-pull rod and the displacement mounting seat; and a first oil seal is arranged between the push-pull rod and the displacement mounting seat.
  7. 7. The multifunctional film plating mechanism according to claim 1, wherein the rotary driving assembly comprises a rotary driving member, a rotary mounting seat, a first gear and a rotary telescopic rod group capable of stretching and retracting while being driven to rotate by the rotary driving member, the second gear is arranged on the film plating target, the rotary mounting seat is fixedly arranged on the fixed main body, the rotary driving member is fixedly arranged on the rotary mounting seat, one end of the rotary telescopic rod group is in driving connection with the rotary driving member, the other end of the rotary telescopic rod group penetrates through the rotary mounting seat and the fixed main body to extend into a disassembling position of the film plating target frame, the first gear is sleeved at the other end of the rotary telescopic rod group, and the first gear is meshed with the second gear.
  8. 8. The multifunctional coating mechanism according to claim 7, wherein the rotary telescopic rod group comprises a rotary rod and a telescopic rod, the rotary driving member is in driving connection with the rotary rod, a telescopic cavity which limits the telescopic rod from rotating relative to the rotary rod is arranged in the rotary rod, one end of the telescopic rod is arranged in the telescopic cavity in a telescopic manner, the other end of the telescopic rod penetrates through the rotary mounting seat and the fixing body to extend into a mounting and dismounting position of the coating target frame, and the first gear is sleeved at the other end of the telescopic rod.
  9. 9. The multifunctional film plating mechanism according to claim 8, wherein the rotary driving member comprises a motor, the motor is fixedly arranged on the rotary mounting seat, a third gear is fixedly arranged on the outer side of the rotary rod, a fourth gear is fixedly arranged on an output shaft of the motor, and the fourth gear is meshed with the third gear; One side of the rotary mounting seat is embedded into the fixed main body, and a second insulating sleeve is arranged between the rotary mounting seat and the fixed main body; A second guide sleeve is arranged between the telescopic rod and the rotary mounting seat; A second oil seal is arranged between the telescopic rod and the rotary mounting seat; The rotary telescopic rod group further comprises a guide post, the guide post can pass through the rotary mounting seat and the fixed main body in a telescopic and movable mode, and the guide post is sleeved on the outer side of the telescopic rod in a rotatable and movable mode; A bearing is arranged between the telescopic rod and the guide post; and a third oil seal is arranged between the telescopic rod and the guide post.
  10. 10. The multifunctional coating mechanism according to claim 1, further comprising a shutter assembly which is automatically opened when the coating target is coated, wherein two ends of the shutter assembly are respectively movably arranged on the first target head and the second target head; The baffle assembly comprises a movable baffle and two rotary check rings, wherein two ends of the movable baffle are respectively fixed with the two rotary check rings, and the rotary check rings are respectively connected with the coating target in a damping rotary manner; The rotation process of the rotary check ring comprises a first position for shielding the coating target and a second position for exposing the coating target; the first dismounting piece or/and the second dismounting piece is/are provided with a limiting piece which limits the rotation of the movable baffle when the movable baffle rotates to a first position in a first direction and rotates to a second position in a second direction; A limiting block is arranged on the rotary baffle ring, and the limiting piece corresponds to the limiting block; One side of the two limiting plates, which is far away from the limiting groove, is detachably provided with a fixed baffle, and the coating target is positioned between the two fixed baffles.

Description

Multifunctional film coating mechanism Technical Field The application belongs to the field of vacuum coating, and particularly relates to a multifunctional coating mechanism. Background Vacuum coating technology is an important surface treatment process and is widely applied to various fields such as electronics, optics, decoration, machinery and the like. In the vacuum coating process, the performance and the structure of the coating target are critical to the quality and the efficiency of the coating, the traditional coating target has relatively simple structure and single function, and along with the continuous development of science and technology and the increasing of the requirements of various industries on the surface quality of products, the prior coating target structure has difficulty in meeting the requirements of the market on the high-quality and high-efficiency coating process. Disclosure of utility model In order to solve the problems, the utility model aims to provide a multifunctional coating mechanism which drives a coating target to move and simultaneously drives the coating target to rotate in real time, so that the uniformity, efficiency, quality and process flexibility of the coating can be effectively improved. Another object of the present utility model is to provide a multifunctional coating mechanism, which can improve the coating duration of the coating mechanism and maintain the stability of the coating process parameters. In order to achieve the above object, the present application has the following technical scheme. A multifunctional coating mechanism, the coating mechanism comprising: a fixing body; The coating target frame is movably arranged on one side of the fixed main body, a first dismounting piece and a second dismounting piece are respectively and vertically arranged at two ends of the coating target frame, and a dismounting position is formed between the first dismounting piece and the second dismounting piece; The coating target assembly comprises a coating target, a first target head and a second target head, wherein two ends of the coating target are respectively and rotatably connected with the first target head and the second target head, and the first target head and the second target head are respectively and detachably arranged on a first dismounting piece and a second dismounting piece so that the coating target is detachably arranged in the dismounting position; The displacement driving component is used for driving the film coating target frame to move, is fixedly arranged on the other side of the fixed main body, and penetrates through the fixed main body to be in driving connection with the film coating target frame; The rotary driving component is used for driving the coating target to rotate, is movably arranged on the other side of the fixed main body, and movably penetrates through the fixed main body to be connected with the coating target frame and is in driving connection with the coating target on the dismounting position; the cooling assembly is used for inputting and outputting cooling liquid, the cooling assembly is provided with a liquid inlet channel and a liquid outlet channel, the cooling assembly is movably arranged on the other side of the fixed main body, the cooling assembly penetrates through the fixed main body to be connected with the coating target frame, and the liquid outlet channel and the liquid inlet channel are communicated with a coating target on the disassembly and assembly position. In the application, based on the arrangement of the displacement driving assembly, the coating target frame can be controlled to drive the coating target to move, and the rotation driving assembly can continuously drive the coating target to rotate while the coating target moves, so the structural design has the following advantages: 1. The method has the advantages of wide coating uniformity, wide coating range, capability of covering a larger area with coating materials, capability of avoiding partial non-coating or over-thin coating, capability of ensuring that each part including bulges, depressions and the like is deposited with the coating materials, capability of ensuring the integrity and uniformity of the whole coating of the complex workpiece, capability of breaking the simple radial distribution mode of the coating materials by moving, capability of avoiding atom aggregation and capability of improving the uniformity of a microstructure; 2. The coating efficiency aspect is that more coating tasks can be completed in unit time, the production efficiency is greatly improved, the coating target can be rapidly moved to a key coating area, the coating quality of the key part is ensured, unnecessary long-time coating operation is reduced, and the coating pertinence and the coating efficiency are improved; 3. In the aspect of coating quality, the problem of uneven coating thickness caused by linear speed difference can be compensated, e