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CN-224212753-U - Vacuum coating uniformity regulating device

CN224212753UCN 224212753 UCN224212753 UCN 224212753UCN-224212753-U

Abstract

The utility model discloses a vacuum coating uniformity regulating device ‌ ‌, which relates to the technical field of vacuum coating, and comprises a regulating device body, wherein the bottom of the regulating device body is fixedly connected with a bottom plate, and the vacuum coating uniformity regulating device also comprises a transmission component, the transmission component is arranged in the regulating device body, the transmission component comprises a first mechanical telescopic rod which is connected onto the regulating device body in a sliding way, one side of the first mechanical telescopic rod, which is far away from the regulating device body, is fixedly connected with a mounting bin, the mounting bin is connected with a fixing rod in a sliding way, the fixing rod is fixedly connected with a second fixing block, the second fixing block is connected with a third transmission rod in a sliding way, and the third transmission rod is connected with a sliding block in a sliding way.

Inventors

  • DENG CHUANZHONG

Assignees

  • 湖北加恒实业有限公司

Dates

Publication Date
20260508
Application Date
20250424

Claims (7)

  1. 1. The vacuum coating uniformity regulating device ‌ ‌ comprises a regulating device body (1), wherein the bottom of the regulating device body (1) is fixedly connected with a bottom plate (11), and the vacuum coating uniformity regulating device is characterized by further comprising a transmission assembly (2); The transmission assembly (2) is arranged in the regulating device body (1), the transmission assembly (2) comprises a first mechanical telescopic rod (21) which is connected onto the regulating device body (1) in a sliding mode, one side, far away from the regulating device body (1), of the first mechanical telescopic rod (21) is fixedly connected with a mounting bin (23), a fixing rod (24) is connected onto the mounting bin (23) in a sliding mode, a second fixing block (33) is fixedly connected onto the fixing rod (24), a third transmission rod (27) is connected onto the second fixing block (33) in a sliding mode, a sliding block (28) is connected onto the third transmission rod (27) in a sliding mode, a mounting frame (210) is fixedly connected onto the sliding block (28), one side, far away from the third transmission rod (27), of the sliding block (28) is connected onto the second transmission rod (26) in a sliding mode, a first transmission rod (25) is connected onto the second transmission rod (26), and a first fixing block (29) is connected onto the bottom of the first transmission rod (25) in a sliding mode; The novel mechanical telescopic device is characterized in that a rubber telescopic rod (6) is connected to the first mechanical telescopic rod (21) in a sliding mode, a fourth transmission rod (5) is fixedly connected to the rubber telescopic rod (6), a first sliding rod (51) is fixedly connected to the fourth transmission rod (5), a transmission block (22) is connected to the first sliding rod (51) in a sliding mode, a second sliding rod (52) is fixedly connected to the transmission block (22), and a plugging plate (53) is fixedly connected to the second sliding rod (52).
  2. 2. The vacuum coating uniformity control device ‌ ‌ as set forth in claim 1, wherein a slot is formed in the control device body (1) at a side close to the first mechanical telescopic rod (21), and the first mechanical telescopic rod (21) is slidably connected in the slot in the control device body (1).
  3. 3. The vacuum coating uniformity control device ‌ ‌ as set forth in claim 1, wherein the first rotating shaft (3) is rotatably connected to two ends of the third transmission rod (27), two ends of the third transmission rod (27) are rotatably connected to the second fixing block (33) and the mounting frame (210) through the first rotating shaft (3), two ends of the second transmission rod (26) are rotatably connected to the third rotating shaft (32), two ends of the second transmission rod (26) are rotatably connected to the sliding block (28) and the first transmission rod (25) through the third rotating shaft (32), two ends of the first transmission rod (25) are rotatably connected to the second rotating shaft (31), the second rotating shaft (31) at two ends of the first transmission rod (25) is rotatably connected to the fixing rod (24) and the first fixing block (29) respectively, and one side, far away from the second rotating shaft (31), of the first fixing block (29) is fixedly connected to the bottom plate (11).
  4. 4. The device ‌ ‌ for regulating uniformity of a vacuum coating film according to claim 1, wherein a spring is fixedly connected in the first mechanical telescopic rod (21).
  5. 5. The vacuum coating uniformity control device ‌ ‌ according to claim 4, wherein the control device body (1) is provided with openings, and the transmission block (22), the second sliding rod (52) and the blocking plate (53) are all slidably connected in the openings on the bottom plate (11).
  6. 6. The vacuum coating uniformity control device ‌ ‌ as set forth in claim 1, wherein a first universal joint (4) is fixedly connected between the mounting bin (23) and the fixed rod (24), and a second universal joint (41) is fixedly connected between the rubber telescopic rod (6) and the first mechanical telescopic rod (21).
  7. 7. The vacuum coating uniformity control device ‌ ‌ disclosed in claim 1, wherein a round bar is fixedly connected to the bottom of the fourth transmission bar (5), a slot is formed in one side, close to the fourth transmission bar (5), of the control device body (1), and the round bar at the bottom of the fourth transmission bar (5) is slidably connected in the slot at the bottom of the fourth transmission bar (5).

Description

Vacuum coating uniformity regulating device Technical Field The utility model relates to the technical field of vacuum coating, in particular to a vacuum coating uniformity regulating device ‌ ‌. Background The vacuum coating uniformity regulating device is used for accurately regulating and controlling the deposition of a coating material on the surface of a substrate through various technical means in the vacuum coating process, ensuring the uniformity and consistency of the thickness, the performance and the like of a coating layer, and meeting the requirements of multiple fields such as optics, electronics, machinery and the like on high-quality coating; The prior art is compact in inner space, and parts are mutually shielded, so that maintenance personnel are difficult to access some key parts for checking, maintaining and replacing, for example, some evaporation sources, ion sources and other parts are installed in the deep of equipment, and a plurality of other parts are required to be disassembled for maintenance, so that the workload and time cost of maintenance are increased, and other parts are damaged in the disassembly process. Disclosure of utility model The utility model aims to provide a vacuum coating uniformity control device ‌ ‌ for solving the problems in the background technology. In order to achieve the aim, the utility model provides the technical scheme that the vacuum coating uniformity regulating device ‌ ‌ comprises a regulating device body, wherein the bottom of the regulating device body is fixedly connected with a bottom plate, and the regulating device also comprises a transmission component; The transmission assembly is arranged in the regulation and control device body and comprises a first mechanical telescopic rod which is connected with the regulation and control device body in a sliding mode, a mounting bin is fixedly connected to one side, far away from the regulation and control device body, of the first mechanical telescopic rod, a fixing rod is connected to the mounting bin in a sliding mode, a second fixing block is fixedly connected to the fixing rod, a third transmission rod is connected to the second fixing block in a sliding mode, a sliding block is connected to the third transmission rod in a sliding mode, a mounting frame is fixedly connected to the sliding block, a second transmission rod is connected to one side, far away from the third transmission rod, of the sliding block in a sliding mode, a first transmission rod is connected to the second transmission rod in a sliding mode, and a first fixing block is connected to the bottom of the first transmission rod in a sliding mode; The device comprises a first mechanical telescopic rod, a second mechanical telescopic rod, a first sliding rod, a second sliding rod, a sealing plate and a sealing plate, wherein the first mechanical telescopic rod is connected with the rubber telescopic rod in a sliding mode, the rubber telescopic rod is fixedly connected with a fourth transmission rod, the first sliding rod is fixedly connected with the fourth transmission rod, the first sliding rod is connected with a transmission block in a sliding mode, the second sliding rod is fixedly connected with the transmission block, and the sealing plate is fixedly connected with the second sliding rod. Further, a slot is formed in one side, close to the first mechanical telescopic rod, of the regulating device body, and the first mechanical telescopic rod is slidably connected in the slot of the regulating device body. By adopting the technical scheme, the first mechanical telescopic rod is arranged in the slot in the regulating device body in a sliding way, so that the sliding of the first mechanical telescopic rod in the regulating device body is guided. Further, the both ends of third transfer line all rotate and are connected with first pivot, the both ends of third transfer line rotate through first pivot respectively with second fixed block and installing frame and be connected, the both ends of second transfer line rotate and are connected with the third pivot, the both ends of second transfer line rotate through third pivot respectively with sliding block and first transfer line and be connected, the both ends of first transfer line all rotate and are connected with the second pivot, the second pivot at first transfer line both ends rotates with dead lever and first fixed block respectively to be connected, one side fixed connection that the second pivot was kept away from to first fixed block is on the bottom plate. By adopting the technical scheme, the first rotating shaft, the second rotating shaft and the third rotating shaft are arranged, so that the components are connected more smoothly. Further, a spring is fixedly connected in the first mechanical telescopic rod. By adopting the technical scheme, the first mechanical telescopic rod is internally fixedly connected with the spring, so that the first mechanical telescopi