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CN-224212757-U - Spray plate, film plating device and solar cell manufacturing production line

CN224212757UCN 224212757 UCN224212757 UCN 224212757UCN-224212757-U

Abstract

The application relates to a spray plate, a film plating device and a solar cell manufacturing production line. The spray plate is provided with a spray face, the spray face is provided with a spray area and an air inlet area, the spray area comprises a plurality of spray hole groups, the spray hole groups comprise a plurality of spray holes, the air inlet area is provided with a first air inlet hole and a second air inlet hole, the first air inlet hole is communicated with all spray holes of part of the spray hole groups, the second air inlet hole is communicated with all spray holes of the rest of the spray hole groups, the spray area comprises an edge area and a central area, the distance between every two adjacent spray hole groups in the edge area is larger than the distance between every two adjacent spray hole groups in the central area in the length direction of the spray plate, and/or the distance between every two adjacent spray holes in the edge area is larger than the distance between every two adjacent spray holes in the central area in the width direction of the same spray hole group. The spray plate, the coating device and the solar cell manufacturing production line provided by the application can improve the uniformity of the coating.

Inventors

  • CHEN FANGXU

Assignees

  • 淮安捷泰新能源科技有限公司

Dates

Publication Date
20260508
Application Date
20250512

Claims (10)

  1. 1. The utility model provides a spray board, its characterized in that, spray board has spray face (10), spray face (10) have spray district (12) and intake district (11), intake district (11) are around the circumference setting of spray district (12), spray district (12) include along spray board's length direction (X) interval sets up multiunit spray hole group (20), spray hole group (20) include along spray board's width direction (Y) interval sets up a plurality of spray holes (21), intake district (11) have seted up first inlet port (30) and second inlet port (40), first inlet port (30) and second inlet port (40) are followed spray board's width direction (Y) interval sets up, just first inlet port (30) and second inlet port (40) all set up in spray board's length direction (X) looks setting up both ends, first inlet port (30) and part spray hole group (20) all spray hole (21) are followed, all are connected with the other spray hole (20) of spray hole group; The spraying area (12) comprises an edge area (121) and a central area (123), wherein the central area (123) is positioned in an area formed by surrounding the edge area (121), the distance between every two adjacent spraying hole groups (20) of the edge area (121) is larger than the distance between every two adjacent spraying hole groups (20) of the central area (123) in the length direction (X) of the spraying plate, and/or the distance between every two adjacent spraying holes (21) of the edge area (121) is larger than the distance between every two adjacent spraying holes (21) of the central area (123) in the width direction (Y) of the same spraying hole group (20).
  2. 2. The shower plate according to claim 1, wherein the shower zone (12) further comprises a transition zone (122), the transition zone (122) being located in a region around the edge zone (121) and the transition zone (122) being located on opposite sides of the central zone (123) in the width direction (Y) of the shower plate, wherein the distance between each adjacent two sets of shower holes (20) of the edge zone (121) is greater than the distance between each adjacent two sets of shower holes (20) of the transition zone (122) in the length direction (X) of the shower plate, and/or wherein the distance between each adjacent two shower holes (21) of the transition zone (122) is smaller than the distance between each adjacent two shower holes (21) of the edge zone (121) and greater than the distance between each adjacent two shower holes (21) of the central zone (123) in the width direction (Y) of the shower plate in the same shower hole sets (20).
  3. 3. The shower plate according to claim 2, wherein in the length direction (X) of the shower plate, the distance between each two adjacent sets of shower holes (20) of the edge region (121) is L1, the distance between each two adjacent sets of shower holes (20) of the transition region (122) is L2, the distance between each two adjacent sets of shower holes (20) of the central region (123) is L3, L1 is 2.5mm, L2 is 2mm, L3 is 1.5mm; in the same spraying hole group (20), in the width direction (Y) of the spraying plate, the distance L4 between every two adjacent spraying holes (21) of the edge area (121), the distance L5 between every two adjacent spraying holes (21) of the transition area (122), the distance L6 between every two adjacent spraying holes (21) of the central area (123), L4 less than or equal to 2.5mm, L5 less than or equal to 1.5mm, L6 less than or equal to 1.5mm.
  4. 4. The shower plate according to claim 2, characterized in that in the same set of shower holes (20), in the width direction (Y) of the shower plate, the distance between two shower holes (21) adjacent to the transition region (122) and the central region (123) is smaller than the distance between two shower holes (21) adjacent to the transition region (122) and the edge region (121).
  5. 5. The shower plate according to claim 1, wherein the distance between each two adjacent shower hole groups (20) is gradually reduced from outside to inside along the length direction (X) of the shower plate, and the distance between each two adjacent shower holes (21) in the same shower hole group (20) is gradually reduced from outside to inside along the width direction (Y) of the shower plate.
  6. 6. The shower plate according to claim 1, wherein the shower holes (21) have a diameter of R,1.5mm R3 mm.
  7. 7. The shower plate according to claim 1, wherein all the shower hole groups (20) comprise a plurality of first shower hole groups (20 a) and a plurality of second shower hole groups (20 b), the shower plate having therein a first air inlet passage (50), a second air inlet passage (60), a plurality of first transition passages (70) and a plurality of second transition passages (80), the first transition passages (70) being in one-to-one correspondence with the first shower hole groups (20 a), the second transition passages (80) being in one-to-one correspondence with the second shower hole groups (20 b); The first air inlet hole (30), the first air inlet channel (50), the first transition channel (70) and the spraying holes (21) of the first spraying hole group (20 a) corresponding to the first transition channel (70) are sequentially communicated, and the second air inlet hole (40), the second air inlet channel (60), the second transition channel (80) and the spraying holes (21) of the second spraying hole group (20 b) corresponding to the second transition channel (80) are sequentially communicated.
  8. 8. The shower plate of claim 7, wherein the first and second sets of shower holes (20 a, 20 b) are alternately arranged along a length direction (X) of the shower plate, and the first and second transition passages (70, 80) are alternately arranged along the length direction (X) of the shower plate.
  9. 9. A coating device, characterized in that the coating device comprises: A film plating main body having a reaction chamber and an opening communicating with the reaction chamber, and The shower plate according to any one of the preceding claims 1 to 8, which covers the opening with the shower face (10) facing the reaction chamber.
  10. 10. A solar cell manufacturing line, characterized in that it comprises a coating device according to claim 9.

Description

Spray plate, film plating device and solar cell manufacturing production line Technical Field The application relates to the technical field of solar cells, in particular to a spray plate, a coating device and a solar cell manufacturing production line. Background Crystalline silicon solar cells are an important development trend in the photovoltaic industry. In order to maximize the photoelectric conversion efficiency of the crystalline silicon solar cell, the passivation process of the cell surface of the crystalline silicon solar cell is one of the necessary means for manufacturing Gao Xiaojing silicon solar cells, and is continuously improved with further improvement of the solar cell production technology. Atomic layer deposition (Atomic layer deposition, ALD) technology is a thin film deposition technology based on surface chemical vapor reaction. The gas phase precursor and the gas phase reaction substance are alternately led into the reaction cavity in pulse mode, so that the gas phase precursor and the gas phase reaction substance respectively generate surface chemical reactions with full saturation on the surface of the cell substrate, the substance can be plated on the surface of the substrate in a single atomic film mode, and the thickness and uniformity of the deposited film are accurately controlled within the atomic layer thickness range. In the prior art, a plurality of spraying hole groups on the spraying surface of the spraying plate are generally adopted to alternately introduce a gas phase precursor and a gas phase reactant into the reaction cavity, but are limited by the arrangement mode of the spraying hole groups on the spraying surface, the spraying hole groups cannot uniformly spray the gas phase precursor and the gas phase reactant into the reaction cavity, so that the uniformity of coating is affected, and the coating effect is poor. Disclosure of utility model In view of the above, it is necessary to provide a shower plate, a coating apparatus, and a solar cell manufacturing line that can improve uniformity of coating. The spray plate is provided with a spray surface, the spray surface is provided with a spray area and an air inlet area, the air inlet area is arranged around the circumference of the spray area, the spray area comprises a plurality of groups of spray hole groups which are distributed at intervals along the length direction of the spray plate, the spray hole groups comprise a plurality of spray holes which are distributed at intervals along the width direction of the spray plate, the air inlet area is provided with a first air inlet hole and a second air inlet hole, the first air inlet hole and the second air inlet hole are distributed at intervals along the width direction of the spray plate, the first air inlet hole and the second air inlet hole are arranged at two ends of the spray plate which are oppositely arranged along the length direction of the spray plate, the first air inlet hole is communicated with all spray holes of part of the spray hole groups, and the second air inlet hole is communicated with all spray holes of the rest part of the spray hole groups; The spraying area comprises an edge area and a central area, wherein the central area is positioned in an area formed by surrounding the edge area, the distance between every two adjacent spraying hole groups of the edge area is larger than the distance between every two adjacent spraying hole groups of the central area in the length direction of the spraying plate, and/or the distance between every two adjacent spraying holes of the edge area in the width direction of the spraying plate is larger than the distance between every two adjacent spraying holes of the central area in the same spraying hole group. In some embodiments, the spraying area further comprises a transition area, the transition area is located in an area formed by surrounding the edge area, the transition area is arranged on two opposite sides of the central area along the width direction of the spraying plate, the distance between every two adjacent spraying hole groups of the edge area is larger than the distance between every two adjacent spraying hole groups of the transition area in the length direction of the spraying plate, and/or the distance between every two adjacent spraying holes of the transition area in the width direction of the spraying plate is smaller than the distance between every two adjacent spraying holes of the edge area and larger than the distance between every two adjacent spraying holes of the central area. In some embodiments, in the length direction of the spray plate, the distance between every two adjacent spray hole groups in the edge area is L1, the distance between every two adjacent spray hole groups in the transition area is L2, the distance between every two adjacent spray hole groups in the central area is L3, L1 is less than or equal to 2.5mm, L2 is less than or equal to 1.5mm, L3 is less tha