CN-224212758-U - ALD equipment is with automatic moisturizing device

Abstract

The utility model discloses an automatic water supplementing device for ALD equipment, which comprises a PLC (programmable logic controller), a process water bottle and a water storage bottle, wherein the top of the process water bottle is provided with a middle water inlet port, an equipment water supplementing port, a first air inlet port and a socket provided with a monitor, the top of the water storage bottle is provided with the middle water supplementing port, the water inlet port, a second air inlet port and the socket provided with the liquid level monitor, the equipment water supplementing port is provided with an equipment water supplementing pipeline, the first air inlet port is externally connected with high-pressure nitrogen through a high-pressure air pipe, the middle water inlet port is hermetically connected with the middle water supplementing port through a siphon pipeline, the water inlet port is provided with a water inlet pipeline, the second air inlet port is externally connected with high-pressure nitrogen through the high-pressure air pipe, all the pipelines are provided with corresponding valves, and all the valves and the liquid level monitor are respectively in signal connection with the PLC. By the mode, the automatic water supplementing device can realize automatic water supplementing of the ALD equipment, improve production efficiency and reduce production pause.

Inventors

• DENG FANGFANG

Assignees

• 鑫乐涵科技(苏州)有限公司

Dates

Publication Date

20260508

Application Date

20250512

Claims (6)

1. 1. The automatic water supplementing device for the ALD equipment is characterized by being arranged on the ALD equipment and comprising a PLC (programmable logic controller), a process water bottle and a water storage bottle, wherein a highest liquid level line and a lowest liquid level line are preset on the process water bottle and the water storage bottle, a middle water inlet interface, an equipment water supplementing interface, a first air inlet interface and a first monitor socket are arranged at the top of the process water bottle, and a middle water supplementing interface, a water inlet interface, a second air inlet interface and a second monitor socket are arranged at the top of the water storage bottle; The device comprises a first monitor jack, a second air inlet port, a device water supplementing port, a pure water carrying valve, a first air inlet valve, a second air supplementing valve, a first air inlet valve, a second air inlet valve and a water inlet valve, wherein the first liquid level monitor is inserted in the first monitor jack in a sealing manner, the second air inlet port is inserted in the second air inlet port in a sealing manner, the second liquid level monitor is inserted in the second air inlet port in a sealing manner, the device water supplementing port is arranged in the device water supplementing port and is connected with a device water supplementing pipeline in the reaction cavity of the ALD device in a sealing manner, the pure water carrying valve is arranged on the device water supplementing pipeline, the first air inlet port is externally connected with high-pressure nitrogen through a first high-pressure air pipe, the second air inlet port is connected with the middle water supplementing port of the water storage bottle in a sealing manner through a siphon pipeline, one end of the siphon pipeline is inserted in the water storage bottle, a pipe orifice is positioned below a preset lowest liquid level line of the water storage bottle, the other end of the siphon pipeline is inserted in the process bottle, the pipe orifice is positioned above a preset highest water level line of the process bottle, the siphon pipeline is arranged on the water inlet port of the water storage bottle, the first air inlet port is externally connected with the pure water inlet pipeline, the second air inlet valve is arranged on the water inlet port, the second air inlet port is connected with the second air inlet valve, and one end of the water inlet valve is connected with the water inlet valve; The PLC controller is in signal connection with the first liquid level monitor, the second liquid level monitor, the pure water air valve, the first water supplementing valve, the second water supplementing valve, the first air inlet valve and the second air inlet valve respectively.
2. 2. The automatic water replenishing device for ALD equipment according to claim 1, wherein a pressure relief branch pipe is further arranged on the water inlet pipeline, the pressure relief branch pipe is positioned between the second water replenishing valve and the water inlet of the water storage bottle, a pressure relief valve is arranged on the pressure relief branch pipe, and the pressure relief valve is in signal connection with the PLC.
3. 3. The automatic water replenishment device for an ALD apparatus according to claim 1, wherein the apparatus water replenishment pipe, water inlet pipe, siphon pipe, gas pipe and pressure relief pipe are all metal pipes.
4. 4. The automatic water replenishment device for an ALD apparatus according to claim 1, wherein the first inlet port on the process water bottle and the second inlet port on the water storage bottle are connected to the same high pressure nitrogen source.
5. 5. The automatic water replenishing device for ALD equipment according to claim 1, wherein the high-pressure nitrogen gas has a pressure ranging from 0.1 to 0.2 mpa.
6. 6. The automatic water replenishment device for ALD equipment according to claim 1, wherein the water amount under a preset minimum liquid level line on the process water bottle can meet the water replenishment requirement of at least one equipment.

Description

ALD equipment is with automatic moisturizing device Technical Field The utility model relates to the technical field of ALD (atomic layer deposition) processes, in particular to an automatic water supplementing device for ALD equipment. Background ALD equipment is special equipment which is formed by alternately pulsing gas phase precursors into a reaction chamber and performing gas-solid phase chemical adsorption reaction on the surface of a deposition substrate, and because the equipment has self-limiting property in the process of each deposition cycle reaction, the equipment not only can form uniform deposition films on complex morphology structures, but also can precisely control the thickness components and structures of the films, so that the ALD equipment is widely applied to the fields of high precision tips such as semiconductors, optics, photovoltaic cells and the like, the reaction cavity needs to be replenished with water according to the reaction condition during normal operation, and the ALD equipment generally uses a special process water bottle for replenishing water during the water replenishing at present, but because the volume of the process water bottle is limited, the equipment needs to be stopped for waiting after pure water in the process water bottle is consumed after a period of production, and the pure water in the process water bottle is manually replenished by field personnel. Disclosure of utility model The utility model mainly solves the technical problem of providing an automatic water supplementing device for ALD equipment, which can meet the requirement of automatic water supplementing of ALD equipment in use and improve the production efficiency. In order to solve the technical problems, the utility model adopts a technical scheme that an automatic water supplementing device for ALD equipment is provided, the automatic water supplementing device for ALD equipment is arranged on the ALD equipment and comprises a PLC (programmable logic controller), a process water bottle and a water storage bottle, wherein a highest liquid level line and a lowest liquid level line are preset on the process water bottle and the water storage bottle, a middle water inlet interface, an equipment water supplementing interface, a first air inlet interface and a first monitor socket are arranged at the top of the process water bottle, and a middle water supplementing interface, a water inlet interface, a second air inlet interface and a second monitor socket are arranged at the top of the water storage bottle; the device water supplementing port is provided with a device water supplementing pipeline which is connected with the reaction cavity of the ALD device in a sealing way, the device water supplementing pipeline is provided with a pure water carrying valve, the first air inlet port is externally connected with high-pressure nitrogen through a first high-pressure air pipe, the first high-pressure air pipe is provided with a first air inlet valve, the middle water inlet port of the process water bottle is connected with the middle water supplementing port of the water storage bottle in a sealing way through a siphon pipeline, one end of the siphon pipeline is inserted into the water storage bottle, the pipe orifice is positioned below the preset lowest liquid level line of the water storage bottle, the other end of the siphon pipeline is inserted into the process water bottle, the pipe orifice is positioned above the preset highest liquid level line of the process water bottle, the siphon pipeline is provided with a first water supplementing valve, the water inlet port of the water storage bottle is provided with a water inlet pipeline externally connected with pure water, the water inlet pipeline is provided with a second water supplementing valve, the second air inlet port is externally connected with the high-pressure water valve through a second high-pressure nitrogen pipe, the PLC is in signal connection with the first liquid level monitor, the second liquid level monitor, the pure water carrying air valve, the first water supplementing valve, the second water supplementing valve, the first air inlet valve and the second air inlet valve respectively. In a preferred embodiment of the utility model, the water inlet pipeline is further provided with a pressure relief branch pipe, the pressure relief branch pipe is positioned between the second water supplementing valve and the water inlet of the water storage bottle, the pressure relief branch pipe is provided with a pressure relief valve, and the pressure relief valve is in signal connection with the PLC. The water replenishing pipeline, the water inlet pipeline, the siphon pipeline, the air pipe and the pressure relief pipeline of the equipment are all metal pipelines. In a preferred embodiment of the present utility model, the first air inlet port on the process water bottle and the second air inlet port on the water storage bottle are c