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CN-224212759-U - Graphene preparation carrier

CN224212759UCN 224212759 UCN224212759 UCN 224212759UCN-224212759-U

Abstract

The utility model relates to the technical field of graphene preparation and discloses a graphene preparation carrier which comprises a fixing piece, wherein the fixing piece is relatively provided with two openings along the gas conveying direction, a plurality of mounting positions suitable for placing substrates are arranged in the fixing piece, the arrangement direction of the mounting positions is perpendicular to the gas conveying direction, and the carrier piece is provided with a first fixing position suitable for placing the fixing piece along the vertical direction and a second fixing position suitable for placing the fixing piece along the horizontal direction.

Inventors

  • SUN JINGYU
  • Zhou kaixuan
  • JIA LI
  • WEI WENZE
  • LIU ZHONGFAN

Assignees

  • 北京石墨烯研究院
  • 苏州大学
  • 北京大学

Dates

Publication Date
20260508
Application Date
20250430

Claims (10)

  1. 1. The utility model provides a graphite alkene preparation carrier which characterized in that includes: The fixing device comprises a fixing piece (1), wherein the fixing piece (1) is provided with two openings relatively along the gas conveying direction, a plurality of installation positions suitable for placing a substrate (3) are arranged inside the fixing piece (1), the arrangement direction of the installation positions is perpendicular to the gas conveying direction, one installation position is suitable for installing one substrate (3), and the plane where the surface of the substrate (3) is positioned is parallel to the gas conveying direction; -a carrier member (2), the carrier member (2) having a first securing position (21) adapted to place the securing member (1) in a vertical direction, and a second securing position (22) to place the securing member (1) in a horizontal direction; When the fixing piece (1) is arranged on the first fixing position (21), the arrangement direction of the plurality of installation positions is parallel to the horizontal direction, and when the fixing piece (1) is arranged on the second fixing position (22), the arrangement direction of the plurality of installation positions is perpendicular to the horizontal direction.
  2. 2. The graphene-preparation carrier according to claim 1, wherein the first and second fixed bits (21, 22) are provided through.
  3. 3. The graphene-preparation carrier according to claim 2, wherein the carrier member (2) comprises an open slot (23), an inner slot wall of the open slot (23) forms a first fixing location (21) suitable for placing the fixing member (1), and two slot wall tops of the open slot (23) oppositely arranged are bent and extended along a horizontal direction in a direction away from each other to form a second fixing location (22) suitable for placing the fixing member (1).
  4. 4. A graphene-preparation carrier according to claim 3, wherein the carrier member (2) further comprises a limiting member (24), the limiting member (24) being arranged at the outer edges of the first and second fixed locations (21, 22), the limiting member (24) being adapted to limit the movement of the fixing member (1) in the gas conveying direction when the fixing member (1) is arranged at the first or second fixed location (21, 22).
  5. 5. The graphene-preparation carrier according to claim 4, wherein the carrier member (2) further comprises a positioning member (25), the positioning member (25) is disposed on a plate surface of the second fixing member (22) facing away from the fixing member (1), and the positioning member (25) is adapted to overlap an internal structure of the reaction chamber.
  6. 6. Graphene-preparation carrier according to any one of claims 1-5, characterised in that said carrier element (2) is provided with a plurality of lightening holes (26).
  7. 7. The graphene-preparation carrier according to any one of claims 1-5, wherein the fixing member (1) is a sleeve, the two ends of the sleeve along its axial direction form the opening, and the axial direction of the sleeve is arranged parallel to the gas conveying direction when the sleeve is placed in the first fixing location (21) or the second fixing location (22).
  8. 8. The graphene preparation carrier according to claim 7, wherein the sleeve comprises four flat plate pieces (11) which are sequentially connected end to end, two adjacent flat plate pieces (11) are mutually perpendicular, two opposite flat plate pieces (11) are mutually parallel, a plurality of mounting positions are arranged on inner plate surfaces of a pair of opposite flat plate pieces (11), a plurality of clamping pieces (12) protruding out of the inner plate surfaces are arranged on the pair of opposite flat plate pieces (11), and gaps between the two adjacent clamping pieces (12) form the mounting positions.
  9. 9. Graphene-preparation carrier according to claim 8, characterised in that the two flat pieces (11) provided with the mounting locations are provided with through holes suitable for balancing the gases.
  10. 10. The graphene-preparation carrier according to any one of claims 1-5, wherein the substrate (3) is a square glass substrate; and/or the fixing piece (1) is a quartz fixing piece, and the carrier piece (2) is a quartz carrier piece.

Description

Graphene preparation carrier Technical Field The utility model relates to the technical field of graphene preparation, in particular to a graphene preparation carrier. Background Chemical Vapor Deposition (CVD) is used as one of core technologies for preparing graphene films, and controllable synthesis of materials is realized by means of a high-temperature airtight reaction system. According to the method, gaseous or solid carbon sources (such as methane, ethanol and the like) are thermally cracked at high temperature, so that carbon source molecules are decomposed into high-activity carbon atoms or atomic groups, the active species migrate to the surface of an insulating substrate under the action of gaseous transport, and then physical and chemical processes such as adsorption, surface diffusion, chemical bonding and the like are sequentially carried out, so that a high-quality graphene film is finally deposited. In the current graphene preparation process, the substrate bearing mode is mainly divided into two technical routes of free stacking and an integrated carrier. The free stacking mode realizes the multilayer stacking of the substrates through the spacing pieces, can provide higher loading flexibility, is suitable for the substrate requirements of different sizes and shapes, but due to the lack of a mechanical fixing constraint mechanism, in the high-temperature reaction process, adjacent substrates are easy to relatively displace due to thermal stress or gas disturbance, so that the substrate spacing is difficult to accurately control, and meanwhile, the contact pressure between the spacing pieces and the surface of the substrates is easy to generate indentation defects, so that the uniformity and the yield of the graphene film are influenced. The integrated carrier can restrain relative dislocation among the substrates by fixing the substrates at specific positions, so that the stability of the deposition process is ensured. However, the structure of such a carrier is generally designed separately according to the growth direction (vertical or horizontal, etc.) of the graphene, and there is a limitation in the growth direction control. For example, when it is desired to achieve vertical growth of graphene, not only is a vertically disposed reaction chamber configured to direct deposition of carbon active species along a vertical path, but a dedicated integrated carrier structure is also required to be matched to ensure that the substrate is in an optimal growth orientation. Therefore, the process adjustment cost is obviously increased, and the application flexibility of the integrated carrier in various growth demand scenes is limited. Disclosure of utility model In view of this, the utility model provides a graphene preparation carrier to solve the problem that the integrated carrier cannot adapt to substrates with different graphene growth directions at the same time. The utility model provides a graphene preparation carrier, which comprises: The fixing piece is provided with two openings relatively along the gas conveying direction, a plurality of mounting positions suitable for placing substrates are arranged in the fixing piece, the arrangement direction of the mounting positions is perpendicular to the gas conveying direction, one mounting position is suitable for mounting one substrate, and the plane where the substrate plate surface is located is parallel to the gas conveying direction; A carrier member having a first securing location adapted to position the securing member in a vertical direction and a second securing location adapted to position the securing member in a horizontal direction; When the fixing piece is arranged on the first fixing position, the arrangement direction of the plurality of mounting positions is parallel to the horizontal direction; when the fixing piece is arranged on the second fixing position, the arrangement direction of the plurality of mounting positions is perpendicular to the horizontal direction. Optionally, the first fixing location and the second fixing location are disposed through. Optionally, the carrier member includes an open slot, an inner slot wall of the open slot forms a first fixing position suitable for placing the fixing member, and tops of two slot walls opposite to each other of the open slot are bent and extended along a horizontal direction in a direction away from each other to form a second fixing position suitable for placing the fixing member. Optionally, the carrier member further comprises a limiting member, the limiting member is disposed at an outer edge of the first fixed position and the second fixed position, and the limiting member is adapted to limit the movement of the fixing member along the gas conveying direction when the fixing member is disposed at the first fixed position or the second fixed position. Optionally, the carrier member further includes a positioning member, where the positioning member is disposed on