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CN-224212760-U - Workpiece supporting structure of chemical vapor deposition furnace

CN224212760UCN 224212760 UCN224212760 UCN 224212760UCN-224212760-U

Abstract

The utility model relates to the field of sintering furnaces, in particular to a workpiece supporting structure of a chemical vapor deposition furnace, which comprises a supporting frame, wherein a furnace body is fixed on the supporting frame, a lifting mechanism is arranged on the supporting frame, a lifting object placing table is fixed on the lifting mechanism, a first opening capable of lifting the object placing table to enter and exit is formed in the bottom of the furnace body, a clamping mechanism is arranged on the furnace body, the clamping mechanism comprises two first oil cylinders which are fixed on the furnace body and are bilaterally symmetrical, a piston rod of each first oil cylinder extends into the furnace body, a clamping frame is detachably connected to the end part of each piston rod, the clamping frame comprises an outer side plate fixedly connected with the end part of the piston rod, and an inverted U-shaped plate is fixed on the inner side surface of the outer side plate.

Inventors

  • XU WEI
  • Sun kuang

Assignees

  • 浙江晨华科技有限公司

Dates

Publication Date
20260508
Application Date
20250521

Claims (7)

  1. 1. The utility model provides a chemical vapor deposition furnace workpiece supporting structure, its characterized in that, includes support frame (1), be fixed with furnace body (2) on support frame (1), be equipped with elevating system (3) on support frame (1), elevating system (3) are last to be fixed with liftable put thing platform (4), the bottom of furnace body (2) has been seted up liftable put first opening (5) of thing platform (4) business turn over, be equipped with clamping mechanism (6) on furnace body (2), clamping mechanism (6) are including fixing two first hydro-cylinders (7) that are bilateral symmetry on furnace body (2), every piston rod (8) of first hydro-cylinder (7) stretch into the inside of furnace body (2), the tip detachably of piston rod (8) is connected with centre gripping frame (9), centre gripping frame (9) include with outer curb plate (10) of piston rod (8) tip fixed connection, be fixed with on outer curb plate (10) medial surface and fall U style of calligraphy board (11).
  2. 2. The workpiece supporting structure of the chemical vapor deposition furnace according to claim 1, wherein the inner side surface of the inverted U-shaped plate (11) on the left side is provided with an inverted U-shaped inserting groove (12), and the inner side surface of the inverted U-shaped plate (11) on the right side is provided with an inverted U-shaped inserting block (13) matched with the inverted U-shaped inserting groove (12).
  3. 3. The workpiece supporting structure of the chemical vapor deposition furnace according to claim 2, wherein a supporting plate (14) is fixed on the outer side wall of the furnace body (2), the first oil cylinder (7) is fixed on the supporting plate (14), the outer end of the bottom of the supporting plate (14) is fixed with the outer upper end of an inclined supporting plate (15), and the inner lower end of the inclined supporting plate (15) is fixed on the outer side wall of the furnace body (2).
  4. 4. The workpiece support structure of the chemical vapor deposition furnace according to claim 1, wherein the support frame (1) comprises a base (16), the base (16) is connected with a top seat (18) through a plurality of support rods (17), and the furnace body (2) is fixed on the top seat (18).
  5. 5. The workpiece supporting structure of a chemical vapor deposition furnace according to claim 4, wherein the lifting mechanism (3) comprises a motor (19) fixed at the left end of the base (16), a first bevel gear set is fixed on a rotating shaft of the motor (19), the first bevel gear set is arranged in a first protection box (20), the first protection box (20) is fixed on the base (16), the first bevel gear set is connected with the lower end of a first screw rod (21), the upper end of the first screw rod (21) is rotatably connected to the top seat (18), a first nut seat (22) matched with the first screw rod is arranged on the first screw rod (21), the first bevel gear set is connected to the left end of a connecting shaft (23), the right end of the connecting shaft (23) is connected with a second bevel gear set, the second bevel gear set is arranged in a second protection box (24), the second protection box (24) is fixed on the base (16), the second bevel gear set is connected with the lower end of the first screw rod (21), the second bevel gear set is connected with a second screw rod (25) and a lifting plate (27) is fixed between the second screw rod (26) and the lifting plate (4).
  6. 6. The workpiece supporting structure of the chemical vapor deposition furnace according to claim 1, wherein the liftable object placing table (4) comprises a fixed column (28) fixed on the lifting mechanism (3), the fixed column (28) is hollow, a second oil cylinder (29) is arranged in the fixed column, a piston rod of the second oil cylinder (29) penetrates through a limiting plate (30), the limiting plate (30) is fixed on the fixed column (28), a second opening (31) matched with the limiting plate (30) is formed in the top seat (18), an object placing plate (32) is fixed at the end of the piston rod of the second oil cylinder (29), a first fixed frame (33) is fixed on the bottom surface of the object placing plate (32), a second fixed frame (34) is fixed on the limiting plate (30), and a slot (35) matched with the first fixed frame (33) is formed in the second fixed frame (34).
  7. 7. A chemical vapor deposition furnace workpiece support structure according to claim 6, characterized in that the length of the second opening (31) is greater than the length of the first opening (5).

Description

Workpiece supporting structure of chemical vapor deposition furnace Technical Field The utility model relates to the field of sintering furnaces, in particular to a workpiece supporting structure of a chemical vapor deposition furnace. Background A chemical vapor deposition furnace (CVD furnace) is an apparatus that utilizes gaseous precursors to deposit solid materials on a substrate surface by chemical reaction. CVD technology is widely used in the fields of semiconductor fabrication, solar cells, photovoltaic devices, metal coatings, and the like. The core principle of CVD technology is to utilize gaseous precursors to chemically react on the substrate surface to form solid materials and deposit them. These precursors are typically gaseous chemicals (e.g., metal-organic, gas, etc.) that are heated, laser, plasma, etc. to initiate a reaction to form a thin film on the substrate surface. When the substrate is coated in the chemical vapor deposition furnace, the substrate needs to be supported by a supporting structure, the supporting structure can not avoid the part contacted with the substrate, and the part contacted with the supporting structure cannot be coated or covered, so that the integrity of the coating can be affected. The patent application number CN202411628609.3 discloses a workpiece supporting point switching device and a chemical vapor deposition furnace, where the workpiece supporting point switching device in the patent can change the position of the supporting point of the workpiece and the supporting column, expose the supporting point at the original supporting column position, and perform secondary deposition, and although the coating can also be performed on the supporting point on the workpiece, there are disadvantages that 1) the number of coating times at the supporting point is smaller than that of the surface where the supporting point is located, so that the coating at the supporting point is relatively thin, 2) gaps or print exist at the boundary between the supporting point and the surface where the supporting point is located, which can cause the condition that the coating is easy to fall off at the position, and also cause the integrity of the coating at the surface where the supporting point is located to be destroyed, affecting the integrity, continuity and aesthetic property of the surface coating. There is a need for a workpiece support structure that allows for uniform coating of a workpiece on each side during the coating process in a chemical vapor deposition furnace. Disclosure of utility model (One) solving the technical problems Aiming at the defects of the prior art, the utility model aims to provide a workpiece supporting structure of a chemical vapor deposition furnace, solves the problems existing in the prior art, and solves the problems existing in the prior art by arranging a clamping mechanism, the coating on each surface of the workpiece is complete and continuous, and meanwhile, the uniformity of the thickness of the coating on each coating surface is ensured, so that the firmness of the coating is improved, and the attractiveness is ensured. (II) technical scheme In order to achieve the purpose, the technical scheme is that the workpiece supporting structure of the chemical vapor deposition furnace comprises a supporting frame, a furnace body is fixed on the supporting frame, a lifting mechanism is arranged on the supporting frame, a lifting object placing table is fixed on the lifting mechanism, a first opening capable of lifting the object placing table to enter and exit is formed in the bottom of the furnace body, a clamping mechanism is arranged on the furnace body, the clamping mechanism comprises two first oil cylinders which are fixed on the furnace body and are bilaterally symmetrical, a piston rod of each first oil cylinder extends into the furnace body, a clamping frame is detachably connected to the end part of each piston rod, the clamping frame comprises an outer side plate fixedly connected with the end part of the piston rod, and an inverted U-shaped plate is fixed on the inner side surface of the outer side plate. Preferably, the inner side surface of the left inverted U-shaped plate is provided with an inverted U-shaped inserting groove, and the inner side surface of the right inverted U-shaped plate is provided with an inverted U-shaped inserting block matched with the inverted U-shaped inserting groove. Preferably, the support plate is fixed on the outer side wall of the furnace body, the first oil cylinder is fixed on the support plate, the outer end of the bottom of the support plate is fixed with the outer upper end of the inclined support plate, and the inner lower end of the inclined support plate is fixed on the outer side wall of the furnace body. Preferably, the support frame comprises a base, the base is connected with a top seat through a plurality of support rods, and a furnace body is fixed on the top seat. Preferably, the