CN-224212761-U - Novel graphite boat

CN224212761UCN 224212761 UCN224212761 UCN 224212761UCN-224212761-U

Abstract

The novel graphite boat comprises a graphite block and a plurality of boat sheets which are arranged in parallel, wherein the graphite block and the boat sheets form an included angle of 90 degrees, and the graphite block is connected with the boat sheets together through graphite screws. According to the utility model, the non-equidistant design is adopted, the outer layer boat sheet distance of the graphite boat is increased, the potential difference of the adjacent boat sheets at the outer layer is reduced during the process to optimize the film forming color difference caused by the temperature difference, so that the effect of consistent film forming appearance color is achieved, reworking and damage can be effectively reduced, the primary yield is improved, the cost is further reduced, and the production efficiency is improved.

Inventors

WANG HONGBO
ZHANG MENG

Assignees

湖北华昶能源科技有限公司

Dates

Publication Date: 20260508
Application Date: 20250607

Claims (3)

1. The novel graphite boat comprises a graphite block (1) and a plurality of boat pieces (2) which are arranged in parallel, wherein the graphite block (1) and the boat pieces (2) form an included angle of 90 degrees, and the graphite block (1) is connected with the boat pieces (2) through graphite screws (3), and the novel graphite boat is characterized in that a fixed interval (4) is arranged between every two adjacent boat pieces (2), and the width of the fixed interval (4) is gradually increased from the center to the two sides.
2. A novel graphite boat as claimed in claim 1, wherein the width of the fixed gap (4) is increased by 0.2 mm.
3. The novel graphite boat as claimed in claim 1, wherein the number of the boat pieces (2) is 27.

Description

Novel graphite boat Technical Field The utility model relates to the field of solar cell manufacturing, in particular to a novel graphite boat. Background In the current production of the battery piece, surface coating is a key process for manufacturing the battery piece, and a layer of silicon nitride film is required to be deposited in the previous process after the original silicon wafer is processed in the previous process, so that the purposes of antireflection and passivation are realized. The silicon nitride film can be prepared only by meeting the conditions of vacuum, high temperature, discharge and plasma special gas, and the silicon nitride film can be reworked due to the fact that the silicon nitride film has huge differences in appearance and performance and cannot meet the requirements of users. Under the current industry background of cost reduction, efficiency improvement and large-size battery pieces, as the diameter of a furnace tube of equipment is gradually increased, the width and the height of a graphite boat of a corresponding silicon wafer carrier are also increased, so that the boat pieces, which are close to the furnace tube, of the graphite boat in the furnace tube are quickly heated to reach the process temperature, and the middle of the graphite boat needs a heat transfer process to be heated after the temperature is increased, so that the internal and external temperatures of the boat are inconsistent when the heating process time is ended. When the special gas is introduced, the temperature is inconsistent, and the special gas molecules cannot be ionized sufficiently, so that the deposition rates of the silicon nitride films are different in the discharge process, and the film thickness is uneven, so that the color appearance is huge. Disclosure of Invention The utility model aims to overcome the defects and the shortcomings of the prior art and provide the novel graphite boat which has the advantages of simple structure, low reworking and breakage rate and capability of effectively improving the production efficiency. In order to achieve the purpose, the technical scheme is that the novel graphite boat comprises graphite blocks and a plurality of boat pieces which are arranged in parallel, wherein the graphite blocks and the boat pieces form an included angle of 90 degrees, and the graphite blocks are connected with the boat pieces through graphite screws. The increase in the fixed gap width is 0.2 mm. The number of the boat pieces is 27. According to the utility model, the non-equidistant design is adopted, the outer layer boat sheet distance of the graphite boat is increased, the potential difference of the adjacent boat sheets at the outer layer is reduced during the process to optimize the film forming color difference caused by the temperature difference, so that the effect of consistent film forming appearance color is achieved, reworking and damage can be effectively reduced, the primary yield is improved, the cost is further reduced, and the production efficiency is improved. Drawings Fig. 1 is a schematic structural view of the present utility model. In the figure, graphite blocks 1, boat sheets 2, graphite screws 3, fixed intervals 4, edge fixed intervals 5, secondary edge fixed intervals 6 and center fixed intervals 7 are shown. Detailed Description The utility model is described in further detail below with reference to the accompanying drawings and detailed description. Referring to fig. 1, the novel graphite boat is a cuboid with a length of 1603 mm, a width of 375 mm and a height of 223 mm, and comprises a graphite block 1 and 27 boat pieces 2 which are arranged in parallel, wherein the graphite block 1 and the boat pieces 2 form an included angle of 90 degrees, the graphite block 1 is connected with the boat pieces 2 through graphite screws 3, a fixed interval 4 is arranged between the adjacent boat pieces 2, the widths of the central parts of the fixed intervals 4 are basically the same, the widths of the fixed intervals 4 gradually increase from the center to the two sides, the increasing amplitude of the widths of the fixed intervals 4 is 0.2mm, for example, the width of an edge fixed interval 5 is 0.4mm larger than the width of a secondary edge fixed interval 6, and the width of the secondary edge fixed interval 6 is 0.2mm larger than the width of a central fixed interval 7. According to the device, the interval between the outer layers of the graphite boat is increased through non-equidistant design, and the potential difference of the adjacent boat sheets at the outer layers is reduced during the process to optimize the difference of film forming colors caused by the temperature difference, so that the effect of consistent film forming appearance colors is achieved.