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CN-224212812-U - Micro-channel spray plating bath for high-speed copper electroplating

CN224212812UCN 224212812 UCN224212812 UCN 224212812UCN-224212812-U

Abstract

The utility model discloses a micro-channel spray plating bath for high-speed copper electroplating, which comprises a first spray plate, a second spray plate and nozzles arranged on the first spray plate and the second spray plate, wherein a first fixed rod is arranged on the first spray plate, a second fixed rod is arranged on the second spray plate, and an opening and closing component is arranged on the first fixed rod; the spray nozzle is of a split type structure and is detachably connected with the spray plate, processing difficulty is reduced, follow-up cleaning is facilitated, the negative pressure pipe and the negative pressure generator are arranged, negative pressure suction is carried out on one side of the spray nozzle in a spraying mode, spraying uniformity is improved, in addition, the spray range can be effectively controlled through the arrangement of the opening and closing component, water mist acting on the surface of a copper sheet can be more uniform through the cooperation of the spray nozzle structure, and the copper sheet can be rapidly taken out after spraying is finished.

Inventors

  • HUANG LEI
  • MENG LUQIANG
  • ZHOU WEI

Assignees

  • 江苏矽智半导体科技有限公司

Dates

Publication Date
20260508
Application Date
20250603

Claims (7)

  1. 1. A micro-channel spray plating tank for high-speed copper electroplating is characterized by comprising a first spray plate (1), a second spray plate (2) and spray nozzles (3) arranged on the first spray plate (1) and the second spray plate (2), wherein a main channel (4) through which water flows and a branch channel (18) communicated with the main channel (4) are arranged in the first spray plate (1) and the second spray plate (2), a plurality of spray nozzle mounting holes communicated with the branch channel (18) are formed in the surfaces of the first spray plate (1) and the second spray plate (2), water supply ports (5) communicated with the main channel (4) are formed in the back surfaces of the first spray plate (1) and the second spray plate (2), a first fixing rod (15) is arranged on the first spray plate (1), a second fixing rod (16) is arranged on the second spray plate (2), and an opening and closing component (17) is arranged on the first fixing rod (15).
  2. 2. The micro-channel spray plating tank for high-speed copper plating, as claimed in claim 1, is characterized in that the nozzle comprises a nozzle seat (11) and a nozzle head (12), the nozzle seat (11) comprises a pipeline (111) with external threads and a connecting seat (112) arranged at the front end of the pipeline (111), a cavity (113) is arranged in the connecting seat (112), the pipeline (111) is communicated with the cavity (113), the nozzle head (12) is detachably arranged in the cavity (113), the front end of the nozzle head (12) is provided with a spray hole (121), the nozzle head (12) is in threaded connection with the nozzle mounting hole, through holes (114) are arranged at two sides of the cavity (113), a water supply port (5) of each spray plate is connected with a Y-shaped joint (6), the Y-shaped joint (6) is connected with a water supply pipe (7) and a negative pressure pipe (8), the water supply pipe (7) is connected with the water supply pipe through a high-pressure pump body, the negative pressure pipe (8) is connected with the water supply pipe (7) and the negative pressure valve (8).
  3. 3. The micro-channel spray plating tank for high-speed copper plating, as claimed in claim 2, is characterized in that a positioning groove is formed in the outer side of the nozzle head (12), positioning protruding blocks matched with the positioning groove are arranged on the inner wall of the cavity (113), clamping protrusions are arranged on two sides of the rear end of the nozzle head (12), and clamping grooves are formed in the inner wall of the cavity (113).
  4. 4. A micro-channel spray plating tank for high-speed copper plating, as claimed in claim 3, characterized in that the negative pressure pipe (8) is also connected with a liquid recovery tank (9).
  5. 5. The micro-channel spray plating tank for high-speed copper electroplating according to claim 4, wherein a first limiting rod (151) is fixedly arranged on the side face of the first fixing rod (15), a second limiting rod (161) is fixedly arranged on the side face of the second fixing rod (16), the first limiting rod (151) and the second limiting rod (161) are in sliding connection, and a groove (152) is further formed in the first fixing rod (15).
  6. 6. A micro flow path shower type plating bath for high speed copper plating according to claim 5, wherein the opening and closing member (17) comprises a lower driving rack (171) fixedly provided on the second fixing rod (16), a driving gear (172) engaged with the lower driving rack (171), an upper driving rack (173) engaged with the lower driving gear (172), and a motor (174) connected with the driving gear (172).
  7. 7. A micro flow channel spray plating tank for high speed copper plating according to claim 6, wherein the upper driving rack (173) is fixedly arranged on the first fixing rod (15), and the lower driving rack (171) is matched with the groove (152).

Description

Micro-channel spray plating bath for high-speed copper electroplating Technical Field The utility model relates to the technical field of electroplating equipment, in particular to a micro-channel spray electroplating bath for high-speed electroplating copper. Background Copper plating (copper plating) is an important component of protective decorative plating copper/nickel/chromium systems, flexible copper plating with low porosity, playing an important role in improving inter-plating adhesion and corrosion resistance. Copper plating is also used for localized carburization prevention, printed plate hole metallization, and as a surface layer for the printing roll. Copper plating is used for casting, nickel plating, chromium plating, silver plating and gold plating priming, repairing worn parts, preventing local carburization and improving conductivity, and in order to obtain a thinner fine smooth copper plating layer, usually, steel products with oil rust removed from the surface are used as cathodes, pure copper plates are used as anodes, and are hung in alkaline plating solutions containing cuprous cyanide, sodium carbonate and other components to carry out alkaline (cyanide) copper plating. Before carrying out electroplating process, at first need spray the copper sheet, the nozzle after the nozzle is blockked up hardly clearance restoration when prior art's spray set sprays, often leads to the nozzle to scrap, in addition, in order to make spraying effect better, when spraying, need control suitable spraying distance, need adjust spraying distance, after spraying simultaneously, current fixed interval of spray board is inconvenient to take out the copper sheet. Disclosure of utility model The utility model aims to provide a micro-runner spray plating tank for high-speed copper plating, which is used for solving the problems in the background technology. The micro-channel spray plating tank for high-speed copper electroplating is characterized by comprising a first spray plate, a second spray plate and spray nozzles arranged on the first spray plate and the second spray plate, wherein a main channel for water to pass through and a branch channel communicated with the main channel are arranged in the first spray plate and the second spray plate, a plurality of spray nozzle mounting holes communicated with the branch channel are formed in the surfaces of the first spray plate and the second spray plate, water supply ports communicated with the main channel are formed in the back surfaces of the first spray plate and the second spray plate, a first fixing rod is arranged on the first spray plate, a second fixing rod is arranged on the second spray plate, and an opening and closing component is arranged on the first fixing rod. The spray nozzle comprises a spray nozzle seat and a spray nozzle head, wherein the spray nozzle seat comprises a pipeline with external threads and a connecting seat arranged at the front end of the pipeline, a cavity is arranged in the connecting seat, the pipeline is communicated with the cavity, the spray nozzle head is detachably arranged in the cavity, spray holes are arranged at the front end of the spray nozzle head, the spray nozzle head is in threaded connection with the spray nozzle mounting holes, through holes are arranged at two sides of the cavity, a water supply port of each spray plate is connected with a Y-shaped joint, the Y-shaped joint is connected with a water supply pipe and a negative pressure pipe, the water supply pipe is connected with a liquid supply tank through a high-pressure pump body, the negative pressure pipe is connected with a negative pressure generator, and switch valves are arranged on the water supply pipe and the negative pressure pipe. Further, a positioning groove is formed in the outer side of the nozzle head, positioning protruding blocks matched with the positioning groove are arranged on the inner wall of the cavity, clamping protrusions are arranged on two sides of the rear end of the nozzle head, and clamping grooves are formed in the inner wall of the cavity. Further, the negative pressure pipe is also connected with a liquid recovery tank. Further, the first locating lever is fixedly arranged on the side face of the first fixing lever, the second locating lever is fixedly arranged on the side face of the second fixing lever, the first locating lever is slidably connected with the second locating lever, and a groove is further formed in the first fixing lever. Further, the opening and closing part comprises a lower driving rack fixedly arranged on the second fixed rod, a driving gear meshed with the lower driving rack, an upper driving rack meshed with the lower driving gear and a motor connected with the driving gear. Further, the upper driving rack is fixedly arranged on the first fixing rod, and the lower driving rack is matched with the groove. The copper sheet spraying device has the beneficial effects that the spray nozzle is o