CN-224212823-U - Silicon carbide single crystal growth vacuum heating furnace with lifting rotating mechanism

CN224212823UCN 224212823 UCN224212823 UCN 224212823UCN-224212823-U

Abstract

The utility model discloses a silicon carbide single crystal growth vacuum heating furnace with a lifting rotating mechanism, which belongs to the technical field of silicon carbide single crystal growth and comprises a furnace body, an upper flange and a lifting rotating mechanism, wherein the upper flange is arranged at the top of the furnace body, the lifting rotating mechanism is arranged at the top of the upper flange, and the lifting rotating mechanism mainly comprises a guide post, a moving platform, a transmission screw, a magnetic fluid sealing device, a lifting rotating pipe, a first driving motor and a second driving motor. According to the utility model, the heater is stably and uniformly distributed in the furnace body by optimizing the fixing mode of the heater, and uniform heating in the furnace body is ensured. According to the utility model, through innovation of the structural structure of the upper flange and the lifting rotating mechanism, the upper flange and the lifting rotating mechanism are designed into an integrated structure, so that the lifting rotating mechanism is ensured to accurately control the vertical lifting and the rotation of the crucible. The innovative design of the vacuum heating furnace improves the overall performance and the working efficiency of the vacuum heating furnace.

Inventors

WANG CHENHAO
TONG XIAOGANG
LIU YANGYANG
ZHOU HAIFENG
YU ZHIMING
LIANG YANXIN

Assignees

山西天成半导体材料有限公司

Dates

Publication Date: 20260508
Application Date: 20250610

Claims (6)

1. A silicon carbide single crystal growth vacuum heating furnace with a lifting rotating mechanism comprises a furnace body, an upper flange and the lifting rotating mechanism, and is characterized in that the upper flange is arranged at the top of the furnace body, and the lifting rotating mechanism is arranged at the top of the upper flange; The bottom of the furnace body is provided with electrode holes, and electrode rods at the bottom of the heater are inserted in the electrode holes and extend from the electrode holes to the outside of the furnace body; The lifting rotating mechanism comprises a guide post, a moving platform, a transmission screw rod, a magnetic fluid sealing device, a lifting rotating pipe, a first driving motor and a second driving motor, wherein the guide post is vertically fixed on an upper flange and uniformly distributed along the periphery of the upper flange, the moving platform is sleeved on the guide post in a sliding mode, the transmission screw rod is vertically fixed on the upper flange and penetrates through the moving platform, the magnetic fluid sealing device is arranged at the central position of the upper flange, the lifting rotating pipe penetrates through the upper flange and is in sliding connection with the upper flange, the bottom end of the lifting rotating pipe is fixedly connected with a crucible, the top end of the lifting rotating pipe is fixedly connected with the lower half section of a rotating shaft of the magnetic fluid sealing device, a rotating driven gear is arranged at the upper half section of the rotating shaft of the magnetic fluid sealing device, the first driving motor is fixed on the moving platform, a lifting driving gear is arranged at the output end of the first driving motor, the lifting driving gear is in meshed connection with the transmission screw rod, and the second driving motor is fixed on the moving platform, a rotating driving gear is arranged at the output end of the second driving motor, and the rotating driving gear is in meshed connection with the rotating driven gear.
2. The vacuum heating furnace for growing silicon carbide single crystals with a lifting and rotating mechanism as set forth in claim 1, wherein a bellows is connected between the movable platform and the upper flange and is sleeved outside the lifting and rotating tube.
3. The vacuum heating furnace for growing silicon carbide single crystals with the lifting and rotating mechanism according to claim 1, wherein a quartz window is arranged at the top end of the rotating shaft of the magnetic fluid sealing device, and the sight line sequentially passes through the quartz window, the shaft hole of the rotating shaft of the magnetic fluid sealing device and the hole of the lifting and rotating tube and then enters the crucible.
4. The vacuum heating furnace for growing silicon carbide single crystals with a pulling and rotating mechanism as set forth in claim 1, wherein the pulling and rotating tube is a graphite tube.
5. The vacuum heating furnace for growing silicon carbide single crystals with a pulling and rotating mechanism as set forth in claim 1, wherein four guide posts are provided, and the four guide posts are fixed at four corners of the upper flange, respectively.
6. The vacuum heating furnace for growing silicon carbide single crystals with the lifting and rotating mechanism according to claim 2, wherein the top pipe orifice of the corrugated pipe is connected with the bottom surface of the movable platform in a sealing way, and the bottom pipe orifice of the corrugated pipe is connected with the top surface of the upper flange in a sealing way.

Description

Silicon carbide single crystal growth vacuum heating furnace with lifting rotating mechanism Technical Field The utility model belongs to the technical field of silicon carbide single crystal growth, and particularly relates to a silicon carbide single crystal growth vacuum heating furnace with a lifting and rotating mechanism. Background In the practical application of the vacuum heating furnace for the growth of the silicon carbide single crystal, the cooperative operation of the upper flange and the lifting mechanism is important to the growth flow of the silicon carbide single crystal. The traditional vacuum heating furnace has the problems that the positioning of a heater and a crucible is unstable, the positions of an upper flange and the heater are difficult to align accurately, the operation flexibility of a lifting mechanism is poor, and the like. For example, the deviation of the relative positions of the upper flange (crucible lifting rod) and the heater can affect the distribution uniformity of the thermal field in the crucible, and the lifting mechanism lacks precise vertical guiding and rotation control, so that the lifting and rotation operation of the crucible is difficult to meet the complex process requirements, and the production efficiency and the product quality are reduced. Therefore, there is a need for a vacuum heating furnace with an optimized design to solve the above technical problems. Disclosure of Invention The utility model aims to solve the problems in the prior art and provides a silicon carbide single crystal growth vacuum heating furnace with a lifting and rotating mechanism. The utility model is realized by the following technical scheme: A silicon carbide single crystal growth vacuum heating furnace with a lifting rotating mechanism comprises a furnace body, an upper flange and the lifting rotating mechanism, wherein the upper flange is arranged at the top of the furnace body, and the lifting rotating mechanism is arranged at the top of the upper flange. The furnace body is internally provided with a crucible and heaters, the crucible is arranged in the middle, the heaters are positioned around the crucible and uniformly distributed, the bottom of the furnace body is provided with electrode holes, and electrode rods at the bottom of the heaters are inserted in the electrode holes and extend to the outside of the furnace body from the electrode holes. The lifting rotating mechanism comprises a guide post, a moving platform, a transmission screw rod, a magnetic fluid sealing device, a lifting rotating pipe, a first driving motor and a second driving motor, wherein the guide post is vertically fixed on an upper flange and uniformly distributed along the periphery of the upper flange, the moving platform is sleeved on the guide post in a sliding mode, the transmission screw rod is vertically fixed on the upper flange and penetrates through the moving platform, the magnetic fluid sealing device is arranged at the central position of the upper flange, the lifting rotating pipe penetrates through the upper flange and is in sliding connection with the upper flange, the bottom end of the lifting rotating pipe is fixedly connected with a crucible, the top end of the lifting rotating pipe is fixedly connected with the lower half section of a rotating shaft of the magnetic fluid sealing device, a rotating driven gear is arranged at the upper half section of the rotating shaft of the magnetic fluid sealing device, the first driving motor is fixed on the moving platform, a lifting driving gear is arranged at the output end of the first driving motor, the lifting driving gear is in meshed connection with the transmission screw rod, and the second driving motor is fixed on the moving platform, a rotating driving gear is arranged at the output end of the second driving motor, and the rotating driving gear is in meshed connection with the rotating driven gear. Further, a corrugated pipe is connected between the movable platform and the upper flange, and the corrugated pipe is sleeved outside the lifting rotary pipe. Further, a quartz window is arranged at the top end of the rotating shaft of the magnetic fluid sealing device, and the sight line sequentially passes through the quartz window, the rotating shaft hole of the magnetic fluid sealing device and the lifting rotating pipe hole and then enters the crucible. Further, the lifting rotary pipe adopts a pipe body structure made of graphite. Further, the four guide posts are arranged, and the four guide posts are respectively fixed at four corners of the upper flange. Further, the top pipe orifice of the corrugated pipe is in sealing connection with the bottom surface of the movable platform, and the bottom pipe orifice of the corrugated pipe is in sealing connection with the top surface of the upper flange. According to the utility model, the heater is stably and uniformly distributed in the furnace body by optimizing the fixing mode of