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CN-224212828-U - Air inlet structure and crystal growth furnace

CN224212828UCN 224212828 UCN224212828 UCN 224212828UCN-224212828-U

Abstract

The utility model provides an air inlet structure and a crystal growth furnace, which relate to the technical field of silicon carbide crystal growth, the air inlet structure provided by the utility model comprises an air inlet pipe and a light-transmitting lens, the air inlet pipe is provided with a main air inlet channel and an auxiliary air inlet channel which are independently arranged, the main air inlet channel and the auxiliary air inlet channel extend along the axial direction of the air inlet pipe, and the light-transmitting mirror is arranged on the air inlet pipe and is positioned at one end of the auxiliary air inlet channel. The air inlet structure provided by the utility model can ensure that the air is more uniformly distributed in the production cavity, and the air entering from the auxiliary air inlet channel can also avoid the deposition of ash on the light-transmitting mirror, so that the air inlet function of the air inlet pipe, the auxiliary monitoring function as a monitoring channel, the film plating prevention function of preventing silicon carbide steam from plating on the light-transmitting mirror and the blowing function of preventing ash dust from polluting the light-transmitting mirror are organically combined.

Inventors

  • GUO YINSHENG

Assignees

  • 杭州晶驰机电有限公司

Dates

Publication Date
20260508
Application Date
20250606

Claims (10)

  1. 1. The utility model provides an inlet structure, its characterized in that includes intake pipe (1) and printing opacity mirror (2), intake pipe (1) have main inlet channel (11) and the auxiliary air inlet channel (12) of independent setting, main inlet channel (11) with auxiliary air inlet channel (12) are all followed the axial extension of intake pipe (1), printing opacity mirror (2) install in intake pipe (1) and be located auxiliary air inlet channel (12)'s one end.
  2. 2. An air intake structure according to claim 1, characterized in that the axis of the auxiliary air intake passage (12) coincides with the axis of the air intake pipe (1), and the main air intake passage (11) is located on the peripheral side of the auxiliary air intake passage (12).
  3. 3. The air inlet structure according to claim 1, wherein the air inlet pipe (1) comprises a first pipe body (13) and a second pipe body (14) sleeved outside the first pipe body (13) and connected with the first pipe body (13), the first pipe body (13) is surrounded to form the auxiliary air inlet channel (12), the main air inlet channel (11) is formed between the second pipe body (14) and the first pipe body (13), and the light-transmitting mirror (2) is connected with the first pipe body (13).
  4. 4. A gas inlet structure according to claim 3, characterized in that the gas inlet pipe (1) further comprises a connecting seat (15), the connecting seat (15) is connected with one end of the first pipe body (13) and presses the light-transmitting mirror (2) to the end face of the first pipe body (13).
  5. 5. An air inlet structure according to claim 4, characterized in that a sealing member (16) is arranged between the light-transmitting mirror (2) and the end face of the first pipe body (13), and/or an elastic pad (17) is arranged between the side of the light-transmitting mirror (2) facing away from the end face of the first pipe body (13) and the connecting seat (15).
  6. 6. An air intake structure according to claim 3, characterized in that the first tube body (13) and the second tube body (14) have a unitary structure.
  7. 7. A gas inlet structure according to claim 3, characterized in that an auxiliary gas inlet is provided at an end of the auxiliary gas inlet channel (12) close to the light-transmitting mirror (2), and an auxiliary gas outlet is provided at an end of the auxiliary gas inlet channel (12) remote from the light-transmitting mirror (2); The main air inlet channel (11) is close to one end of the light-transmitting mirror (2) and is provided with a main air inlet, and one end of the main air inlet channel (11) far away from the light-transmitting mirror (2) is provided with a main air outlet.
  8. 8. The air intake structure according to claim 7, characterized in that the first pipe body (13) is provided with a first air intake hole (131) communicating with the auxiliary air intake port and a second air intake hole (132) communicating with the main air intake port.
  9. 9. A crystal growing furnace, characterized by comprising a furnace body (3) and an air intake structure according to any one of claims 1-8, the furnace body (3) having a growth cavity (31), the main air intake channel (11) and the auxiliary air intake channel (12) both communicating with the growth cavity (31).
  10. 10. Crystal growth furnace according to claim 9, characterized in that a heat-insulating base (4) is arranged in the furnace body (3), the heat-insulating base (4) is provided with a first air inlet channel (41) communicated with the auxiliary air inlet channel (12), and a second air inlet channel (42) communicated with the main air inlet channel (11) is formed between the heat-insulating base (4) and the furnace body (3).

Description

Air inlet structure and crystal growth furnace Technical Field The utility model relates to the technical field of silicon carbide crystal growth, in particular to an air inlet structure and a crystal growth furnace. Background Silicon carbide, which is an important wide bandgap semiconductor material, has great application potential in the fields of power electronics, microwave radio frequency, photoelectric devices and the like due to excellent physical and chemical properties. In recent years, with the growing demand for high-performance semiconductor devices, the production technique of silicon carbide crystals has received attention. The growth method of the silicon carbide crystal mainly comprises a physical vapor transport method (PVT), a solution method, a high-temperature chemical vapor deposition method and the like, wherein the physical vapor transport method (PVT) is the most commonly used growth method of the silicon carbide single crystal in the industry at present. In the PVT method, silicon carbide crystals are grown by a crystal growth furnace. Specifically, the process is carried out in a sealed graphite crucible, raw material powder is placed at the bottom of the crucible, the raw material sublimates to form gaseous substances and migrates upwards in a high-temperature environment provided by a crystal growth furnace, and the raw material is re-coagulated and crystallized at a seed crystal with a slightly lower temperature, so that the growth of silicon carbide crystals is realized. The bottom of the crystal growth furnace is provided with the air inlet structure, and the air inlet structure has the effect of introducing specific gas, such as inert gas such as argon, into the growth cavity as carrier gas, so that on one hand, the pressure in the growth cavity can be regulated, on the other hand, volatilization of source materials can be promoted, harmful impurities are prevented from entering the growth area, and the quality and purity of the silicon carbide crystal are ensured. However, the air inlet structure in the prior art generally adopts a tube body with a circular section, has a single function and cannot ensure more uniform distribution of the air in the production cavity. Disclosure of utility model The utility model aims to provide an air inlet structure which can ensure more uniform distribution of air in a production cavity, and organically combines an air inlet function, an auxiliary monitoring function as a monitoring channel, a film plating prevention function for preventing silicon carbide steam from plating a film on a light-transmitting mirror and a blowing function for preventing dust and slag from polluting the light-transmitting mirror. There is additionally provided a crystal growing furnace comprising the above-described air intake structure. In order to achieve the above purpose, the present utility model provides the following technical solutions: In a first aspect, the present utility model provides an air intake structure, including an air intake pipe and a light-transmitting mirror, where the air intake pipe has a main air intake channel and an auxiliary air intake channel that are independently disposed, the main air intake channel and the auxiliary air intake channel extend along an axial direction of the air intake pipe, and the light-transmitting mirror is installed in the air intake pipe and located at one end of the auxiliary air intake channel. Further, the axis of the auxiliary air inlet channel coincides with the axis of the air inlet pipe, and the main air inlet channel is positioned on the periphery side of the auxiliary air inlet channel. Further, the air inlet pipe comprises a first pipe body and a second pipe body which is sleeved outside the first pipe body and connected with the first pipe body, the first pipe body surrounds the auxiliary air inlet channel, the main air inlet channel is formed between the second pipe body and the first pipe body, and the light-transmitting mirror is connected with the first pipe body. Further, the air inlet pipe further comprises a connecting seat, wherein the connecting seat is connected with one end of the first pipe body and presses the light-transmitting lens on the end face of the first pipe body. Further, a sealing element is arranged between the light-transmitting mirror and the end face of the first pipe body, and/or an elastic pad is arranged between one side of the light-transmitting mirror, which is away from the end face of the first pipe body, and the connecting seat. Further, the first pipe body and the second pipe body have an integral structure. Further, an auxiliary air inlet is formed in one end, close to the light transmission mirror, of the auxiliary air inlet channel, and an auxiliary air outlet is formed in one end, far away from the light transmission mirror, of the auxiliary air inlet channel; The main air inlet channel is close to one end of the lens and is provided with a main air inle