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CN-224212831-U - Silicon carbide crystal safety separation device

CN224212831UCN 224212831 UCN224212831 UCN 224212831UCN-224212831-U

Abstract

The utility model discloses a silicon carbide crystal safe separation device, which relates to the technical field of silicon carbide crystal processing and comprises a rubber pad, wherein the left side and the right side of the rubber pad are fixedly connected with supporting seats, and the upper surface of each supporting seat is fixedly connected with a supporting plate. According to the silicon carbide crystal safe separation device, the sucker is arranged to absorb the crystal, the sleeve is used for transmitting the knocking force, the traditional separation mode that the crystal is grabbed by hands and the hammer is used for directly knocking the bottom support is changed, the sucker is firstly absorbed on the upper surface of the crystal, the sleeve is sleeved on the connecting rod, the lower edge of the sleeve is abutted to the upper surface of the bottom support, the sleeve is used for knocking the upper edge of the sleeve, the knocking force is transmitted to the bottom support, the crystal is separated from the bottom support, the hammer is prevented from directly contacting the crystal, the risk that the hammer is used for knocking the crystal to damage the crystal and injuring operators is greatly reduced, the safety of the operation process is remarkably improved, and the safety of the personnel and the crystal is effectively ensured.

Inventors

  • ZHANG DONG
  • LI WENYONG
  • CHEN RONGKUN
  • MA JINGJUN

Assignees

  • 河北天达晶阳半导体技术股份有限公司

Dates

Publication Date
20260508
Application Date
20250611

Claims (7)

  1. 1. The silicon carbide crystal safe separation device comprises a rubber pad (1), and is characterized in that the left side and the right side of the rubber pad (1) are fixedly connected with supporting seats (2), the upper surfaces of the supporting seats (2) are fixedly connected with supporting plates (3), the upper parts of the opposite sides of the two supporting plates (3) are jointly and slidably connected with transverse plates (4), the middle parts of the transverse plates (4) are rotationally connected with spherical connecting rods (5), the periphery threads of the lower parts of the spherical connecting rods (5) are connected with connecting rods (6), the middle parts of the connecting rods (6) are slidably connected with stop plates (8), and the middle parts of the stop plates (8) are movably connected with four mounting mechanisms (7) which are annularly distributed; The mounting mechanism (7) comprises a clamping block I (72), the clamping block I (72) is slidably connected to the middle of the stop plate (8), four limiting plates I (73) are fixedly connected to opposite sides of the clamping block I (72), shifting blocks (71) are fixedly connected to the upper surfaces of the limiting plates I (73) and the clamping block I (72) together, grooves are formed in the upper portions of the shifting blocks (71), and two compression springs I (75) are fixedly connected to the middle of one side, away from the clamping block I (72), of the limiting plates I (73).
  2. 2. The silicon carbide crystal safety separation device according to claim 1, wherein four clamping grooves (76) which are distributed in an annular mode are formed in the periphery of the middle of the connecting rod (6), the periphery of one side, opposite to the clamping block I (72), of each clamping block I is respectively and slidably connected to the inside of the corresponding clamping groove (76), two limiting rods I (74) are slidably connected to the middle of the limiting plate I (73), and the limiting rods I (74) are fixedly connected to the inside of the limiting plate (8).
  3. 3. The silicon carbide crystal safety separation device according to claim 1, wherein the upper part of the spherical connecting rod (5) is fixedly connected with a rotating wheel (14), the lower part of the periphery of the connecting rod (6) is slidably connected with a ring sleeve (10), the lower surface of the ring sleeve (10) is fixedly connected with a sucker (11), and the lower part of the connecting rod (6) is movably connected with a dismounting mechanism (9).
  4. 4. The silicon carbide crystal safety separation device according to claim 3, wherein the dismounting mechanism (9) comprises two clamping blocks (91), the two clamping blocks (91) are respectively and slidably connected to the front side and the rear side of the lower portion of the connecting rod (6), two limiting plates (92) are fixedly connected to opposite sides of the two clamping blocks (91), two limiting rods (93) are slidably connected to the left side and the right side of the two limiting plates (92), and two compression springs (94) distributed left and right are fixedly connected to opposite sides of the two limiting plates (92).
  5. 5. The silicon carbide crystal safety separation device according to claim 4, wherein positioning blocks (95) are fixedly connected to the left side and the right side of the inner cavity of the annular sleeve (10), positioning grooves (96) are formed in the left side and the right side of the lower portion of the connecting rod (6), and the positioning blocks (95) are slidably connected to the inside of the positioning grooves (96).
  6. 6. The silicon carbide crystal safety separation device according to claim 3, wherein the middle part of the upper surface of the rubber pad (1) is abutted against a base (12), crystals are adhered to the upper surface of the base (12), the lower surface of the sucker (11) is adsorbed on the upper surface of the crystals, and the upper surface of the base (12) is abutted against a sleeve (13).
  7. 7. The silicon carbide crystal safety separation device according to claim 1, wherein the upper portion of the supporting plate (3) is fixedly connected with electric push rods (15), the left and right sides of the upper surface of the transverse plate (4) are respectively and fixedly connected with the output ends of the two electric push rods (15), and the left and right ends of the transverse plate (4) are respectively and fixedly connected with baffle plates (16).

Description

Silicon carbide crystal safety separation device Technical Field The utility model relates to the technical field of silicon carbide crystal processing, in particular to a silicon carbide crystal safe separation device. Background The silicon carbide crystal is a compound semiconductor crystal formed by combining silicon and carbon elements through covalent bonds, and belongs to a third-generation wide-bandgap semiconductor material. After the silicon carbide crystal is grown, the crystal is usually bonded with a graphite shoe, and the silicon carbide crystal needs to be separated for weighing, measuring and subsequent processing. The silicon carbide crystal separating device is a special device for completely and efficiently separating silicon carbide crystals from a graphite bottom support, and plays a key role in silicon carbide single crystal preparation and semiconductor device manufacturing. The currently used separation method is rough, and after an operator manually grabs the crystal, an iron hammer is used for knocking the graphite bottom support, and the crystal is separated from the bottom support by inertia. The mode lacks necessary protection measures, and the hammer is easy to smash on the crystal in operation engineering, so that the crystal is damaged, operators are possibly injured, and great potential safety hazards exist. Disclosure of utility model The utility model provides a silicon carbide crystal safe separation device which is used for solving the problems in the background technology. In order to solve the technical problems, the utility model adopts the following technical scheme: the utility model provides a silicon carbide crystal safety separation device, includes the rubber pad, the left and right sides of rubber pad is all fixedly connected with supporting seat, the upper surface fixedly connected with backup pad of supporting seat, two the upper portion of backup pad opposite side is the sliding connection has the diaphragm jointly, the middle part of diaphragm rotates and is connected with the spherical connecting rod, the periphery threaded connection of spherical connecting rod lower part has the connecting rod, the middle part sliding connection of connecting rod has the stop plate, the middle part swing joint of stop plate has four installation mechanism that are annular distribution; The mounting mechanism comprises a first clamping block, the first clamping block is slidably connected to the middle of the cutting-off plate, the four opposite sides of the first clamping block are fixedly connected with a first limiting plate, the upper surfaces of the first limiting plate and the first clamping block are fixedly connected with a shifting block together, the upper portion of the shifting block is provided with a groove, and the middle of one side, away from the first clamping block, of the first limiting plate is fixedly connected with two first compression springs. Preferably, four clamping grooves which are distributed in an annular mode are formed in the periphery of the middle of the connecting rod, the periphery of one opposite side of each clamping block is connected inside the four clamping grooves in a sliding mode, two limiting rods are connected in a sliding mode in the middle of each limiting plate in a sliding mode, and the limiting rods are fixedly connected in the limiting plates. Preferably, the upper portion fixedly connected with runner of spherical connecting rod, the lower part sliding connection of connecting rod periphery has the ring cover, the lower surface fixedly connected with sucking disc of ring cover, the lower part swing joint of connecting rod has detaching mechanism. Preferably, the dismounting mechanism comprises two clamping blocks II, wherein the two clamping blocks II are respectively connected with the front side and the rear side of the lower part of the connecting rod in a sliding mode, two limiting plates II are fixedly connected with the opposite sides of the clamping blocks II, limiting rods II are respectively connected with the left side and the right side of the limiting plates II in a sliding mode, and two compression springs II which are distributed left and right are respectively and fixedly connected with the opposite sides of the limiting plates II. Preferably, the left and right sides of the inner cavity of the ring sleeve are fixedly connected with positioning blocks, the left and right sides of the lower part of the connecting rod are provided with positioning grooves, and the positioning blocks are in sliding connection with the inside of the positioning grooves. Preferably, the middle part of rubber pad upper surface butt has the collet, the upper surface bonding of collet has the crystal, the lower surface of sucking disc adsorbs the upper surface at the crystal, the upper surface butt of collet has the sleeve. Preferably, the upper portion fixedly connected with electric putter of backup pad, the left and right si