CN-224213989-U - Cavity door hinge structure of hot wire equipment

CN224213989UCN 224213989 UCN224213989 UCN 224213989UCN-224213989-U

Abstract

The utility model discloses a cavity door hinge structure of hot wire equipment, which comprises a hinge support, a hinge stop block, a first hinge mounting seat and a second hinge mounting seat, wherein one side surface of the hinge support is a fixing surface and is used for being fixed on the outer side wall of a cavity, the other side surface of the hinge support is provided with the hinge stop block, the hinge stop block comprises a blocking inclined surface, the blocking inclined surface faces towards the first hinge mounting seat, one end of the first hinge mounting seat is hinged with the hinge support through a first rotating shaft, the other end of the first hinge mounting seat is hinged with the second hinge mounting seat through a second rotating shaft, the second hinge mounting seat is fixed on a cavity door, and a fixing piece is arranged on the first hinge mounting seat and passes through the first hinge mounting seat to be abutted on the cavity door so as to fix the relative position of the cavity door and the first hinge mounting seat. The hinge structure of the cavity door of the hot wire equipment realizes the effective sealing of the cavity door of the hot wire equipment.

Inventors

XU BINCHENG
PANG XIAOWEI
LU WEIWEI

Assignees

先材(深圳)半导体科技有限公司

Dates

Publication Date: 20260508
Application Date: 20250528

Claims (10)

1. A cavity door hinge structure of a hot wire device is characterized in that the hot wire device comprises a cavity body and a cavity door which can be opened and closed, the cavity door hinge structure comprises a hinge support, a hinge stop block, a first hinge mounting seat and a second hinge mounting seat, One side surface of the hinge support is a fixing surface and is used for being fixed on the outer side wall of the cavity, the other side surface of the hinge support is provided with a hinge stop block, the hinge stop block comprises a blocking inclined surface, and the blocking inclined surface is arranged towards the first hinge installation seat; One end of the first hinge mounting seat is hinged with the hinge support through a first rotating shaft, the other end of the first hinge mounting seat is hinged with the second hinge mounting seat through a second rotating shaft, and the second hinge mounting seat is fixed on the cavity door; The first hinge mounting seat is provided with a fixing piece, and the fixing piece passes through the first hinge mounting seat and is abutted to the cavity door so as to fix the relative position of the cavity door and the first hinge mounting seat.
2. The hot wire equipment cavity door hinge structure of claim 1, wherein the hinge support comprises a support main body, one side of the support main body is provided with a group of hinge shaft mounting lugs, the hinge shaft mounting lugs are provided with first rotating shaft mounting holes for mounting the first rotating shaft, the support main body is provided with a group of first mounting hole groups penetrating through one side face to the other side face of the hinge support, and the hinge support is fixed with the outer side wall of the cavity through fasteners penetrating through the first mounting hole groups.
3. The hot wire apparatus cavity door hinge structure of claim 2, wherein the second hinge mount comprises a pair of opposite hinge mount blocks, the hinge mount blocks are provided with second shaft mounting holes for mounting the second shaft, the hinge mount blocks are further provided with third mounting hole groups for passing through fasteners to fix the hinge mount blocks on the cavity door, and edges of the hinge mount blocks do not exceed edges of the cavity door.
4. The hot wire equipment cavity door hinge structure of claim 3, wherein a third shaft mounting hole for mounting a first shaft is formed in one side of the first hinge mounting seat, a fourth shaft mounting hole for mounting a second shaft is formed in the other side of the first hinge mounting seat, one side of the first hinge mounting seat is positioned between a group of hinge shaft mounting lugs of the hinge support, the first shaft mounting hole is aligned with the third shaft mounting hole, the other side of the first hinge mounting seat is positioned between a pair of hinge seat plates of the second hinge mounting seat, and the second shaft mounting hole is aligned with the fourth shaft mounting hole.
5. The hot wire equipment cavity door hinge structure of claim 4, wherein one side end surface of the first hinge mounting seat is a vertical end surface, and when the cavity door is opened to a maximum angle, the vertical end surface of the first hinge mounting seat is abutted against the blocking inclined surface of the hinge stop block.
6. The hot wire equipment cavity door hinge structure according to claim 4, wherein the first rotating shaft comprises a mounting bushing, a central rotating shaft, a bolt and a positioning pin, the mounting bushing is arranged in the third rotating shaft mounting hole, the central rotating shaft penetrates through the first rotating shaft mounting hole and the mounting bushing, the bolts with gaskets are respectively screwed into two ends of the central rotating shaft from the outer side of the hinge shaft mounting lug plate, and the positioning pin is inserted into the corresponding pin hole of the central rotating shaft in the pin hole of the hinge shaft mounting lug plate.
7. The hot wire equipment cavity door hinge structure of claim 1, wherein the hinge stopper comprises a stopper upper surface and a stopper lower surface, a set of second mounting holes penetrating through the stopper upper surface to the stopper lower surface is formed in the hinge stopper, the hinge stopper is fixed on the hinge support by a stopper positioning bolt penetrating through the second mounting holes, the stopper lower surface is in contact with the other side surface of the hinge support, and the width of the stopper lower surface is smaller than the width of the stopper upper surface to form the blocking inclined plane.
8. The hot wire equipment cavity door hinge structure according to claim 7, wherein the hole type of the second mounting hole group is a slotted hole, the hinge support is provided with a bolt hole corresponding to the second mounting hole group, the stop block positioning bolt penetrates through the slotted hole and is screwed into the bolt hole to be fixed, and the relative position of the hinge stop block and the hinge support is adjusted by moving the stop block positioning bolt in the slotted hole.
9. The hot wire equipment cavity door hinge structure of claim 1, wherein the fixing piece comprises a first fixing piece and a second fixing piece, a first fixing through hole and a second fixing through hole are formed in the first hinge mounting seat, the first fixing piece passes through the first fixing through hole and then abuts against the cavity door, and the second fixing piece passes through the second fixing through hole and abuts against the cavity door, so that the first hinge mounting seat is fixed on the cavity door.
10. The hot wire equipment cavity door hinge structure of claim 9, wherein the first fixing through hole is a straight hole, the first fixing piece is a bolt and is matched with a nut, the second fixing through hole is a threaded hole, and the second fixing piece is a screw.

Description

Cavity door hinge structure of hot wire equipment Technical Field The utility model relates to the field of industrial equipment, in particular to a cavity door hinge structure of hot wire equipment. Background The Hot Wire chemical vapor deposition (Hot Wire CVD) technology is widely used in many fields such as semiconductors, photovoltaics, functional coatings, etc., by virtue of the remarkable advantages of low temperature deposition, high deposition rate, good film uniformity, etc. The technology can decompose the gas phase precursor through the high Wen Resi so as to deposit the film on the surface of the substrate efficiently. The cavity door structure of the hot wire equipment has strict requirements in practical application, and needs to be compatible with high sealing performance, high temperature resistance and tolerance of frequent opening and closing. However, conventional cavity door hinges mostly take the form of conventional metal hinges or flanged connections. During long-term use, these conventional hinges are susceptible to deformation, wear, etc., and even seal failure, due to thermal stresses generated during operation of the device. Once the seal fails, the vacuum degree of the equipment is reduced, so that the stability of the process is seriously affected, and the requirements of industrial production on the reliability and the long service life of the equipment are difficult to meet. Therefore, there is a need to develop a novel cavity door hinge structure of hot wire equipment. Disclosure of utility model In view of the above, the utility model provides a cavity door hinge structure of a hot wire device, which is used for solving the problem that the cavity door structure of the hot wire device is easy to deform and the cavity door of the hot wire device is invalid in sealing. To achieve one or some or all of the above or other objects, the present utility model provides a cavity door hinge structure of a hot wire apparatus, the hot wire apparatus includes a cavity and a cavity door capable of opening and closing, the cavity door hinge structure includes a hinge support, a hinge stopper, a first hinge mount, a second hinge mount, One side surface of the hinge support is a fixing surface and is used for being fixed on the outer side wall of the cavity, the other side surface of the hinge support is provided with a hinge stop block, the hinge stop block comprises a blocking inclined surface, and the blocking inclined surface is arranged towards the first hinge installation seat; One end of the first hinge mounting seat is hinged with the hinge support through a first rotating shaft, the other end of the first hinge mounting seat is hinged with the second hinge mounting seat through a second rotating shaft, and the second hinge mounting seat is fixed on the cavity door; The first hinge mounting seat is provided with a fixing piece, and the fixing piece passes through the first hinge mounting seat and is abutted to the cavity door so as to fix the relative position of the cavity door and the first hinge mounting seat. Further, the hinge support comprises a support main body, a group of hinge shaft installation lug plates are arranged on one side of the support main body, first rotating shaft installation holes for installing the first rotating shafts are formed in the hinge shaft installation lug plates, a group of first installation hole groups penetrating through one side face to the other side face of the hinge support are formed in the support main body, and the hinge support is fixed with the outer side wall of the cavity through fasteners penetrating through the first installation hole groups. Further, the second hinge mounting seat comprises a pair of hinge seat plates which are oppositely arranged, the hinge seat plates are provided with second rotating shaft mounting holes for mounting the second rotating shafts, the hinge seat plates are further provided with third mounting hole groups for penetrating fasteners to fix the hinge seat plates on the cavity door, and the edges of the hinge seat plates do not exceed the edges of the cavity door. Further, a third rotating shaft mounting hole for mounting a first rotating shaft is formed in one side of the first hinge mounting seat, a fourth rotating shaft mounting hole for mounting a second rotating shaft is formed in the other side of the first hinge mounting seat, one side of the first hinge mounting seat is located between a group of hinge shaft mounting lugs of the hinge support, the first rotating shaft mounting hole is aligned with the third rotating shaft mounting hole, the other side of the first hinge mounting seat is located between a pair of hinge seat plates of the second hinge mounting seat, and the second rotating shaft mounting hole is aligned with the fourth rotating shaft mounting hole. Further, the end face of one side of the first hinge mounting seat is a vertical end face, and when the cavity door is opened to a