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CN-224214325-U - Low-temperature pump rapid cooling integrated device

CN224214325UCN 224214325 UCN224214325 UCN 224214325UCN-224214325-U

Abstract

The utility model relates to the technical field of low-temperature pumps, in particular to a rapid cooling integrated device for a low-temperature pump, which comprises a pump shell, wherein a compressor is arranged at the bottom of the pump shell, a first expansion cavity and a second expansion cavity are further arranged in the pump shell, an air outlet end of the compressor is connected with the second expansion cavity through a pipeline, a first cold plate and a second cold plate are coaxially arranged in the pump shell, the second cold plate is sleeved outside the first cold plate, a first refrigerant channel is formed in the similar surfaces of the first cold plate and the second cold plate, and one end of the first refrigerant channel is connected with the second expansion cavity through a pipeline. According to the utility model, the primarily expanded and cooled refrigerant can be conveyed through the first refrigerant channel, the second refrigerant channel and the annular refrigerant channel, meanwhile, the refrigerant can cool the first cold plate and the second cold plate, and then the secondarily expanded refrigerant can be conveyed into the cold column through the return pipe and the air duct to rapidly cool the cold column, so that the cooling speed is high, and the use effect is improved.

Inventors

  • XU MEIJUAN
  • ZHAO KAI
  • LI HU
  • CUI YING

Assignees

  • 上海利方达真空技术有限公司

Dates

Publication Date
20260508
Application Date
20250616

Claims (8)

  1. 1. The rapid cooling integrated device of the cryopump is characterized by comprising a pump shell (1), wherein a compressor (8) is arranged at the bottom of the pump shell (1), a first expansion cavity (19) and a second expansion cavity (20) are further arranged in the pump shell (1), and an air outlet end of the compressor (8) is connected with the second expansion cavity (20) through a pipeline; the pump comprises a pump shell (1), a first cooling plate (14) and a second cooling plate (15) are coaxially arranged in the pump shell (1), the second cooling plate (15) is sleeved outside the first cooling plate (14), a first refrigerant channel (11) is formed in the similar surfaces of the first cooling plate (14) and the second cooling plate (15), and one end of the first refrigerant channel (11) is connected with a second expansion cavity (20) through a pipeline; An annular refrigerant channel (24) is further formed between the tops of the first cold plate (14) and the second cold plate (15), the annular refrigerant channel (24) is connected with one end of the first refrigerant channel (11), a second refrigerant channel (13) is further arranged between the first cold plate (14) and the second cold plate (15), and the other end of the second refrigerant channel (13) is connected with the first expansion cavity (19) through a return pipe (12); The top edge of first cold plate (14) and second cold plate (15) all extends and is equipped with second surrounding edge (22), every the edge of second surrounding edge (22) all extends and is equipped with first surrounding edge (21) the top edge extension of pump case (1) is equipped with first flange (2), first flange (2) top still is equipped with second flange (5), first surrounding edge (21) edge stretches to between first flange (2) and second flange (5), and links to each other through fixed establishment between the three.
  2. 2. The cryopump rapid cooling integration apparatus according to claim 1, wherein a cold column (17) is coaxially installed at an inner bottom end of the first cold plate (14), one side of a bottom of the cold column (17) is connected to the first expansion chamber (19) through an air duct (23), and the other side of the bottom of the cold column (17) is connected to an air inlet end of the compressor (8) through an exhaust pipe (6).
  3. 3. The cryopump rapid cooling integration apparatus of claim 2, wherein a partition plate (18) is vertically installed at an inner bottom end of the cold beam (17), and a space exists between a top of the partition plate (18) and an inner top end of the cold beam (17).
  4. 4. A cryopump rapid cooling integration apparatus according to claim 3, wherein the outer surface of the cold beam (17) is fitted with a cold umbrella (16).
  5. 5. The rapid cooling integrated device for the cryopump of claim 1, wherein the fixing mechanism comprises mounting holes (3) formed in the tops of the first flange (2), the second flange (5) and the first surrounding edge (21), mounting bolts (4) are arranged in the mounting holes (3), and one ends of the mounting bolts (4) penetrate through the corresponding mounting holes (3) and are connected with external equipment.
  6. 6. The rapid cooling integrated device for the cryopump of claim 1, wherein the top of the pump housing (1) is provided with a deflector (7), and the bottom of the deflector (7) is connected with the inner surface of the second peripheral edge (22) through a bracket.
  7. 7. The cryopump rapid cooling integration apparatus according to claim 1, wherein the inner surface of the pump housing (1) is provided with a radiation coating.
  8. 8. The cryopump rapid cooling integration apparatus according to claim 1, wherein a communication pipe (10) is installed at a bottom side of the pump housing (1), a top of the communication pipe (10) penetrates through the first cold plate (14) and the second cold plate (15), and a valve (9) is installed at a bottom of the communication pipe (10).

Description

Low-temperature pump rapid cooling integrated device Technical Field The utility model relates to the technical field of cryopumps, in particular to a rapid cooling integrated device of a cryopump. Background The low-temperature pump cooling integration is a technical system which deeply fuses a refrigerating unit and a vacuum air extraction structure, and the rapid establishment and stable maintenance of ultrahigh vacuum are realized by controlling an energy transmission path at a molecular scale. When the existing low-temperature pump cools the inner first-stage cold head and the inner second-stage cold head, the low-temperature refrigerant generated by refrigerant expansion is generally transmitted to the first-stage cold head and the second-stage cold head through the heat conduction mechanism, the first-stage cold head and the second-stage cold head are cooled, the cooling speed is low, the using effect is poor, the first-stage cold head and the second-stage cold head inside the existing low-temperature pump are generally fixed inside the pump shell through fixing parts, and when the low-temperature pump is detached from equipment for maintenance, the first-stage cold head and the second-stage cold head are required to be independently disassembled and assembled, and the using effect is poor. A cryopump rapid cooling integrated device is proposed to solve the above-mentioned problems. Disclosure of utility model Aiming at the defects of the prior art, the utility model provides a rapid cooling integrated device of a cryopump, which can solve the problem of low cooling speed of a primary cold head and a secondary cold head. The utility model provides a technical scheme that the low-temperature pump rapid cooling integrated device comprises a pump shell, wherein a compressor is arranged at the bottom of the pump shell, a first expansion cavity and a second expansion cavity are further arranged in the pump shell, and an air outlet end of the compressor is connected with the second expansion cavity through a pipeline; The inner part of the pump shell is coaxially provided with a first cold plate and a second cold plate, the second cold plate is sleeved outside the first cold plate, the similar surfaces of the first cold plate and the second cold plate are provided with a first refrigerant channel, and one end of the first refrigerant channel is connected with a second expansion cavity through a pipeline; an annular refrigerant channel is further formed between the tops of the first cold plate and the second cold plate, the annular refrigerant channel is connected with one end of the first refrigerant channel, a second refrigerant channel is further arranged between the first cold plate and the second cold plate, and the other end of the second refrigerant channel is connected with the first expansion cavity through a return pipe; The top edge of first cold plate and second cold plate all extends and is equipped with the second surrounding edge, every the edge of second surrounding edge all extends and is equipped with first surrounding edge the top edge extension of pump case is equipped with first flange, first flange top still is equipped with the second flange, first surrounding edge extends to between first flange and the second flange, and links to each other through fixed establishment between the three. Preferably, a cold column is coaxially installed at the bottom end of the first cold plate, one side of the bottom of the cold column is connected with the first expansion cavity through an air duct, and the other side of the bottom of the cold column is connected with the air inlet end of the compressor through an exhaust pipe. Preferably, a partition plate is vertically installed at the inner bottom end of the cold column, and a space exists between the top of the partition plate and the inner top end of the cold column. Preferably, a cold umbrella is arranged on the outer surface of the cold column. Preferably, the fixing mechanism comprises mounting holes formed in the tops of the first flange, the second flange and the first surrounding edge, mounting bolts are arranged in the mounting holes, and one ends of the mounting bolts penetrate through the corresponding mounting holes and are connected with external equipment. Preferably, a guide plate is arranged at the top of the pump shell, and the bottom of the guide plate is connected with the inner surface of the second surrounding edge through a bracket. Preferably, the inner surface of the pump housing is provided with a radiation coating. Preferably, a communicating pipe is installed at one side of the bottom of the pump case, the top of the communicating pipe penetrates through the first cold plate and the second cold plate, and a valve is installed at the bottom of the communicating pipe. Compared with the prior art, the utility model provides a rapid cooling integrated device of a cryopump, which has the following beneficial effects: 1. thro