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CN-224214785-U - Valve body structure of airtight cavity

CN224214785UCN 224214785 UCN224214785 UCN 224214785UCN-224214785-U

Abstract

The application provides a valve body structure of an airtight cavity, wherein an insertion hole is concavely provided with a limit groove inwards from the outside of the valve body around a cavity accommodating part, a sealing ring is sleeved in the cavity accommodating part and is arranged in the limit groove, and a sealing ring is respectively abutted against the side wall in the circumferential direction of the limit groove and the side wall in the circumferential direction of the cavity accommodating part so as to seal the insertion hole of the insertion cavity accommodating part by the sealing ring. According to the application, the limiting groove is arranged, the sealing ring is arranged in the limiting groove and is positioned between the side wall of the limiting groove and the cavity accommodating part so as to seal the inserting hole of the inserting cavity accommodating part, so that the valve body structure forms an airtight cavity, the sealing performance of the cavity is improved, the leakage rate of the cavity is reduced, and when the valve body structure is applied to a vacuum system, the vacuum degree of the cavity can be kept at a higher level.

Inventors

  • Request for anonymity
  • Request for anonymity

Assignees

  • 星奇(上海)半导体有限公司

Dates

Publication Date
20260508
Application Date
20250515

Claims (10)

  1. 1. The valve body structure of the airtight cavity is characterized by comprising a valve body, a cavity accommodating part and a sealing ring; The inside of the valve body is provided with a cavity, the valve body is provided with an insertion hole communicated with the cavity, and the cavity accommodating piece is inserted into the insertion hole to be connected to the inside of the cavity; The insertion hole is concavely provided with a limit groove inwards from the outside of the valve body around the cavity accommodating piece; The sealing ring is sleeved on the cavity containing piece and is arranged in the limiting groove, and the sealing ring is respectively abutted against the side wall on the circumferential direction of the limiting groove and the side wall on the circumferential direction of the cavity containing piece, so that the sealing ring is in sealing connection with the insertion hole of the cavity containing piece.
  2. 2. The valve body structure of the airtight cavity according to claim 1, wherein the sealing rings are arranged in a plurality along the axial direction of the limit groove so as to form a multistage seal to isolate the outside air.
  3. 3. The valve body structure of the airtight chamber according to claim 2, wherein a first decompression chamber is formed between a side wall of the seal ring in the circumferential direction of the limit groove and a side wall of the chamber accommodating member in the circumferential direction; And a second decompression chamber is formed between the sealing ring close to the bottom of the limiting groove and the side wall of the bottom of the limiting groove in the circumferential direction of the limiting groove and the side wall of the cavity accommodating part in the circumferential direction.
  4. 4. The valve body structure of the airtight cavity according to claim 3, wherein the sealing rings are O-shaped rings, and the sections of the sealing rings in the radial direction are circular or elliptic; The plurality of sealing rings comprise a first sealing ring and a second sealing ring, the second sealing ring is respectively abutted against the bottoms of the first sealing ring and the limiting groove, so that the first decompression chamber is a first-stage decompression chamber, and the second decompression chamber is a second-stage decompression chamber.
  5. 5. The valve body structure of an airtight chamber according to claim 1, wherein the seal ring is an elastic seal ring, and the seal ring is made of nitrile rubber or fluororubber.
  6. 6. The valve body structure of the airtight cavity according to claim 1, further comprising a bracket, wherein the bracket is sleeved with the cavity accommodating part and is installed outside the valve body, and at least one position of the inner ring of the bracket is projected to the limit groove, and the size of the limit groove is positioned in the limit groove, so that the sealing ring is limited in the limit groove.
  7. 7. The valve body structure of the airtight chamber according to claim 6, wherein the valve body is provided with a functional hole communicating with the limit groove in a radial direction of the limit groove, and the functional hole is located between the support and a sealing area of the seal ring in an axial direction of the limit groove, so that an open cavity is formed among the limit groove, the chamber accommodating member and the support.
  8. 8. The airtight cavity valve body structure of claim 7, wherein the functional holes are distributed in plurality in the circumferential direction of the limit groove.
  9. 9. The valve body structure of the airtight cavity according to claim 6, wherein the cavity accommodating member comprises a transmission rod, the transmission rod is connected with a part to be rotated in the cavity, the bracket is connected with an external driving device, and the external driving device is used for driving the transmission rod; One end of the transmission rod is inserted into the inner wall of the cavity and is rotationally connected with the inner wall of the cavity, and the other end of the transmission rod is connected with the external driving device.
  10. 10. The hermetically sealed cavity valve body structure of claim 1 wherein the valve body structure is mounted in a vacuum system and the chamber is a vacuum chamber.

Description

Valve body structure of airtight cavity Technical Field The application relates to the technical field of gas flow control component devices for semiconductors, in particular to a valve body structure of an airtight cavity. Background In the field of semiconductor industry, valve body technology is widely used. The design of the valve body parts is indispensable. Various openings with different sizes are arranged on the cavity of the valve body so as to accommodate the electric cables, the transmission parts and other cavity accommodating parts to enter the cavity. The openings can affect the leak rate and tightness of the chamber. Based on this, a new solution is needed. Disclosure of utility model In view of this, the present embodiments provide a valve body structure of an airtight chamber. The embodiment of the specification provides the following technical scheme: The embodiment of the specification provides a valve body structure of an airtight cavity, which comprises a valve body, a cavity accommodating part and a sealing ring; The inside of the valve body is provided with a cavity, the valve body is provided with an insertion hole communicated with the cavity, and the cavity accommodating piece is inserted into the insertion hole to be connected to the inside of the cavity; The insertion hole is concavely provided with a limit groove inwards from the outside of the valve body around the cavity accommodating piece; The sealing ring is sleeved on the cavity containing piece and is arranged in the limiting groove, and the sealing ring is respectively abutted against the side wall on the circumferential direction of the limiting groove and the side wall on the circumferential direction of the cavity containing piece, so that the sealing ring is in sealing connection with the insertion hole of the cavity containing piece. Preferably, the sealing rings are arranged in a plurality along the axial direction of the limiting groove so as to form multistage sealing to isolate the outside air. Preferably, a first decompression chamber is formed between the side wall of the sealing ring in the circumferential direction of the limiting groove and the side wall of the cavity accommodating part in the circumferential direction; And a second decompression chamber is formed between the sealing ring close to the bottom of the limiting groove and the side wall of the bottom of the limiting groove in the circumferential direction of the limiting groove and the side wall of the cavity accommodating part in the circumferential direction. Preferably, the sealing rings are O-shaped rings, and the sections of the sealing rings in the radial direction are circular or elliptic; The plurality of sealing rings comprise a first sealing ring and a second sealing ring, the second sealing ring is respectively abutted against the bottoms of the first sealing ring and the limiting groove, so that the first decompression chamber is a first-stage decompression chamber, and the second decompression chamber is a second-stage decompression chamber. Preferably, the sealing ring is an elastic sealing ring, and the sealing ring is made of nitrile rubber or fluororubber. Preferably, the valve body structure further comprises a support, the support is sleeved with the cavity accommodating part and is arranged outside the valve body, and at least one position of the inner ring of the support is projected into the limit groove, so that the seal ring is limited in the limit groove. Preferably, the valve body is provided with a functional hole communicated with the limit groove along the radial direction of the limit groove, and the functional hole is positioned between the support and the sealing area of the sealing ring in the axial direction of the limit groove, so that an open cavity is formed among the limit groove, the cavity accommodating part and the support. Preferably, the functional holes are distributed in a plurality in the circumferential direction of the limit groove. Preferably, the cavity accommodating part comprises a transmission rod, wherein the transmission rod is connected with a part to be rotated in the cavity, and the bracket is connected with an external driving device which is used for driving the transmission rod; One end of the transmission rod is inserted into the inner wall of the cavity and is rotationally connected with the inner wall of the cavity, and the other end of the transmission rod is connected with the external driving device. Preferably, the valve body structure is mounted in a vacuum system, and the chamber is a vacuum chamber. Compared with the prior art, the beneficial effects that above-mentioned at least one technical scheme that this description embodiment adopted can reach include at least: according to the application, the limiting groove is arranged, the sealing ring is arranged in the limiting groove and is positioned between the side wall of the limiting groove and the cavity accommodating part