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CN-224215061-U - Differential flexible deflection pitching adjusting mechanism

CN224215061UCN 224215061 UCN224215061 UCN 224215061UCN-224215061-U

Abstract

The utility model relates to the technical field of adjusting mechanisms, in particular to a differential flexible deflection pitching adjusting mechanism. The device mainly aims at the problems that the existing deflection pitching adjusting mechanism adopting screw and spring reset cannot meet the development requirements of the modern precision measurement and micro-operation field in terms of precision and bearing capacity, and adopts the following technical scheme that the device comprises a fixed plate fixedly arranged, a movable plate arranged above the fixed plate, a connecting component connected between the fixed plate and the movable plate, a deflection adjusting mechanism arranged at the top of the fixed plate and used for adjusting transverse gestures, and a pitching adjusting mechanism arranged between the fixed plate and the movable plate and used for adjusting longitudinal gestures. The utility model can remarkably improve the accuracy and stability of the gesture adjustment of the measuring head and the operating head, and meet the severe requirements of the fields of semiconductor manufacture, biomedical research and the like on high-precision measurement and operation.

Inventors

  • YANG ZHIJUN
  • WANG CHENGLONG

Assignees

  • 佛山市华道超精科技有限公司

Dates

Publication Date
20260508
Application Date
20250123

Claims (9)

  1. 1. The utility model provides a differential flexible deflection every single move adjustment mechanism, includes fixed plate (1) and set up in fly leaf (2) of fixed plate (1) top, its characterized in that still includes: a connecting component (3) connected between the fixed plate (1) and the movable plate (2); The deflection adjusting mechanism (4) is arranged at the top of the fixed plate (1), and the deflection adjusting mechanism (4) is used for adjusting the transverse posture; the pitching adjusting mechanism is arranged between the fixed plate (1) and the movable plate (2) and is used for adjusting the longitudinal posture; a first adjusting rod (7) connected to the pitching adjusting mechanism.
  2. 2. A differential flexible yaw pitch adjustment mechanism according to claim 1, wherein the connection assembly (3) comprises a positioning column (31) fixedly connected to the top of the fixed plate (1), a rotating plate (32) is rotatably connected to the positioning column (31), an elastic sheet (33) is arranged on one side of the rotating plate (32), a plurality of groups of fixing bolts (34) are arranged on the elastic sheet (33), and the plurality of groups of fixing bolts (34) penetrate through the elastic sheet (33) and are respectively connected with the rotating plate (32) and the movable plate (2).
  3. 3. A differential flexible yaw pitch adjustment mechanism according to claim 2, wherein the side of the elastic sheet (33) away from the rotating plate (32) is further provided with two groups of reinforcing plates (35), and the two groups of reinforcing plates (35) correspond to the rotating plate (32) and the movable plate (2) respectively.
  4. 4. A differential flexible yaw pitch adjustment mechanism according to claim 2, characterized in that a yielding groove (36) is formed in the side, away from the elastic sheet (33), of the rotating plate (32), the pitch adjustment mechanism is mounted at the position of the yielding groove (36), and the pitch adjustment mechanism is a first adjustment assembly (5) or a second adjustment assembly (6).
  5. 5. The differential type flexible deflection pitching adjusting mechanism according to claim 4, wherein the deflection adjusting mechanism (4) comprises a first fixing block (41) fixedly connected to one end of the rotating plate (32) far away from the elastic sheet (33), a first adjusting block (42) is arranged on one side of the first fixing block (41) far away from the rotating plate (32), a second adjusting rod (43) is connected to the first adjusting block (42) in a threaded manner, a second adjusting button (47) is arranged on one end of the second adjusting rod (43) far away from the first adjusting block (42), a second adjusting block (44) is connected to the second adjusting rod (43) in a rotating manner, a second fixing block (45) is arranged on one side of the second adjusting block (44) close to the rotating plate (32), and the second fixing block (45) is fixedly connected to the top of the fixing plate (1).
  6. 6. A differential compliant yaw pitch adjustment mechanism as claimed in claim 5, wherein the yaw adjustment mechanism (4) further comprises a compliant hinge (46) for maintaining the first adjustment block (42) and the second adjustment block (44) in a parallel state, the compliant hinge (46) being connected between the first fixed block (41) and the first adjustment block (42) or between the second adjustment block (44) and the second fixed block (45).
  7. 7. The differential type flexible deflection pitching adjusting mechanism according to claim 4, wherein the first adjusting component (5) is in an octagonal arrangement, fixing bolts (51) are fixedly connected to the bottom and the top of the first adjusting component (5), two groups of fixing bolts (51) are fixedly connected with the fixing plate (1) and the movable plate (2) respectively, deformation holes (52) are formed in the bent positions of the inner sides of the first adjusting component (5), and the first adjusting rod (7) penetrates through one side of the first adjusting component (5) and is in threaded connection with the other side of the first adjusting component (5).
  8. 8. The differential type flexible deflection pitching adjusting mechanism according to claim 4, wherein the second adjusting component (6) comprises an installing plate (61) fixedly connected to the top of the fixed plate (1), two groups of moving blocks (62) are arranged on the installing plate (61), a first connecting rod (63) is rotatably connected between the installing plate (61) and the moving blocks (62), a synchronizing block (64) fixedly connected with the movable plate (2) is arranged above the two groups of moving blocks (62), a second connecting rod (65) is rotatably connected between the moving blocks (62) and the synchronizing block (64), and the first adjusting rod (7) penetrates through one group of moving blocks (62) and is in threaded connection with the other group of moving blocks (62).
  9. 9. A differential compliant yaw pitch adjustment mechanism according to claim 1, wherein the end of the first adjustment lever (7) remote from the pitch adjustment mechanism is provided with a first adjustment knob (71).

Description

Differential flexible deflection pitching adjusting mechanism Technical Field The utility model relates to the technical field of adjusting mechanisms, in particular to a differential flexible deflection pitching adjusting mechanism. Background In the field of modern precision measurement and micromanipulation, precise attitude adjustment of measuring heads such as microscopes, confocal microscopes, white light interferometers, and operating heads such as probes, dispensing heads, bonding heads is of paramount importance. In the industries of semiconductor manufacturing, biomedical research, micro-nano processing and the like, the devices need to ensure that the devices keep accurate perpendicularity with an operation object so as to realize high-precision measurement and operation. At present, a widely-used deflection pitching adjusting mechanism mostly adopts a combination mode of screw and spring reset. This conventional scheme can realize the posture adjustment function to a certain extent. However, as the demands of various industries for precision and bearing capacity continue to increase, limitations are increasingly evident. From the aspect of precision, screw adjustment relies on manual operation, and accurate fine adjustment at submicron or even nanometer level is difficult to realize. The clearances between threads, uncertainty of manual operation and wear caused by long-term use all make it difficult to meet the requirements for nanoscale measurement and machining in chip manufacturing, for example. Although the spring reset can provide certain reset force, the spring coefficient deviation, fatigue characteristic and performance change under complex environment of the spring can lead to instability of reset precision, and further influence the precision of the whole adjusting mechanism. The structural design of screws and springs determines their limited load carrying capacity. When a heavy measuring head or an operating head needs to be carried, and under the working condition of bearing large external force, the adjusting mechanism is easy to deform, loosen and even fail. For example, in the posture adjustment of an objective lens of a large optical microscope, due to the large weight of the objective lens and extremely high stability requirements, the conventional screw and spring return adjustment mechanism is difficult to provide reliable support and stable adjustment, and cannot meet the requirements of long-time and high-precision measurement. In view of this, the present utility model proposes a differential compliant yaw pitch adjustment mechanism. Disclosure of utility model The utility model aims to solve the problem that the existing deflection pitching adjusting mechanism adopting screws and springs for resetting cannot adapt to the development requirements of the modern precision measurement and micro-operation fields in terms of precision and bearing capacity in the background technology, and provides a differential flexible deflection pitching adjusting mechanism. The differential flexible deflection pitching adjusting mechanism comprises a fixed plate, a movable plate, a connecting assembly, a deflection adjusting mechanism, a pitching adjusting mechanism and a first adjusting rod, wherein the fixed plate is fixedly arranged, the movable plate is arranged above the fixed plate, the connecting assembly is connected between the fixed plate and the movable plate, the deflection adjusting mechanism is arranged at the top of the fixed plate and is used for adjusting transverse gestures, the pitching adjusting mechanism is arranged between the fixed plate and the movable plate and is used for adjusting longitudinal gestures, and the first adjusting rod is connected in the pitching adjusting mechanism. Optionally, the coupling assembling includes fixed connection in the reference column at fixed plate top, rotate on the reference column and be connected with the rotor plate, one side of rotor plate is provided with the elastic sheet, install the multiunit dead bolt on the elastic sheet, multiunit the dead bolt all runs through the elastic sheet and is connected with rotor plate and fly leaf respectively. Optionally, two groups of reinforcing plates can be further arranged on one side, away from the rotating plate, of the elastic sheet, and the two groups of reinforcing plates correspond to the rotating plate and the movable plate respectively. Optionally, the groove of stepping down has been seted up to the rotor plate one side of keeping away from the elastic sheet, pitch adjustment mechanism installs in the groove of stepping down position, pitch adjustment mechanism is first adjusting part or second adjusting part. Optionally, beat adjustment mechanism includes fixed connection in the first fixed block that the elastic sheet one end was kept away from to the rotor plate, first fixed block is provided with first regulating block in keeping away from rotor plate one side, threaded con