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CN-224215711-U - Drying equipment

CN224215711UCN 224215711 UCN224215711 UCN 224215711UCN-224215711-U

Abstract

The application relates to drying equipment which comprises a drying groove, a first gas transmission assembly, a filtering assembly and a gas outlet assembly. The drying groove is provided with an air inlet and an air outlet. The first gas transmission assembly comprises a gas transmission main path and a gas transmission branch path, the first end of the gas transmission branch path is communicated with the first end of the gas transmission main path, the second end of the gas transmission branch path is communicated with the drying groove through a gas inlet, and the second end of the gas transmission main path is communicated with the external environment. The filter assembly comprises a first filter and a second filter, and the first filter and the second filter are both arranged on the gas transmission main path. The air outlet assembly comprises an air outlet main path and an air outlet branch path, the first end of the air outlet main path is communicated with the air transmission main path, the communication position is positioned at the downstream of the first filter and the second filter, the second end of the air outlet main path is communicated with the first end of the air outlet branch path, and the second end of the air outlet branch path is communicated with the drying groove through the air outlet. The technical scheme of the application effectively solves the problem of low drying efficiency caused by low clean fresh air conveying rate in the prior art.

Inventors

  • ZHU JIPENG
  • XIA YAN
  • ZHU XU
  • YU YI

Assignees

  • 安徽华晟新能源科技股份有限公司
  • 合肥华晟光伏科技有限公司
  • 宣城华晟光伏科技有限公司

Dates

Publication Date
20260508
Application Date
20250606

Claims (10)

  1. 1. A drying apparatus, characterized by comprising: A drying tank (10), the drying tank (10) having an air inlet and an air outlet; The first air conveying assembly (20), the first air conveying assembly (20) comprises an air conveying main path (21) and an air conveying branch path (22), a first end of the air conveying branch path (22) is communicated with a first end of the air conveying main path (21), a second end of the air conveying branch path (22) is communicated with the drying groove (10) through the air inlet, and a second end of the air conveying main path (21) is communicated with the external environment; the filter assembly (30), the filter assembly (30) comprises a first filter (31) and a second filter (32), and the first filter (31) and the second filter (32) are arranged on the gas transmission main path (21); the air outlet assembly (40), the air outlet assembly (40) comprises an air outlet main path (41) and an air outlet branch path (42), wherein a first end of the air outlet main path (41) is communicated with the air transmission main path (21), the communication position is located at the downstream of the first filter (31) and the second filter (32), a second end of the air outlet main path (41) is communicated with a first end of the air outlet branch path (42), and a second end of the air outlet branch path (42) is communicated with the drying groove (10) through the air outlet.
  2. 2. The drying apparatus according to claim 1, wherein the filter assembly (30) further comprises a third filter (33), the third filter (33) being arranged on the gas transmission main (21), the first filter (31) and the second filter (32) being arranged close to the second end of the gas transmission main (21), the third filter (33) being arranged close to the first end of the gas transmission main (21).
  3. 3. Drying apparatus according to claim 2, wherein the communication position of the air outlet main path (41) and the air delivery main path (21) is located between the second filter (32) and the third filter (33).
  4. 4. A drying apparatus according to claim 3, wherein the first air delivery assembly (20) further comprises a circulation fan (23) and a heater (24), both the circulation fan (23) and the heater (24) being disposed on the air delivery main path (21), both the circulation fan (23) and the heater (24) being located between the communication position of the air delivery main path (41) and the air delivery main path (21) and the third filter (33).
  5. 5. The drying apparatus according to claim 4, wherein the first gas delivery assembly (20) further comprises a first valve (25), the first valve (25) being arranged on the gas delivery main (21), and the first valve (25) being located between the second filter (32) and the communication locations of the gas delivery main (41) and the gas delivery main (21).
  6. 6. The drying apparatus according to claim 5, further comprising a second air delivery assembly (50), wherein the second air delivery assembly (50) comprises a first air delivery pipeline (51) and a second air delivery pipeline (52), two ends of the first air delivery pipeline (51) are respectively communicated with a nitrogen source and the air delivery main pipeline (21), a communication position of the first air delivery pipeline (51) and the air delivery main pipeline (21) is located between the first valve (25) and the circulating fan (23), two ends of the second air delivery pipeline (52) are respectively communicated with the nitrogen source and the air delivery main pipeline (21), and a communication position of the second air delivery pipeline (52) and the air delivery main pipeline (21) is located between the heater (24) and the third filter (33).
  7. 7. The drying apparatus according to claim 6, wherein the second gas delivery assembly (50) further comprises a second valve (53) and a third valve (54), the second valve (53) being arranged on the first gas delivery line (51) and the third valve (54) being arranged on the second gas delivery line (52).
  8. 8. Drying apparatus according to claim 1, wherein the air outlet assembly (40) further comprises a fourth valve (43), the fourth valve (43) being arranged on the air outlet main (41).
  9. 9. The drying apparatus according to any one of claims 1 to 8, further comprising an exhaust assembly (60), the exhaust assembly (60) comprising an exhaust duct (61), the drying tub (10) further having an exhaust port, a first end of the exhaust duct (61) being in communication with the exhaust port, a second end of the exhaust duct (61) being in communication with the external environment.
  10. 10. The drying apparatus according to claim 9, wherein the exhaust assembly (60) further comprises a fifth valve (62), the fifth valve (62) being provided on the exhaust line (61).

Description

Drying equipment Technical Field The application relates to the technical field of photovoltaic equipment, in particular to drying equipment. Background Silicon materials are a key material for manufacturing solar cells and semiconductor devices in the semiconductor and photovoltaic industries due to their excellent electronic properties and abundant resources. The drying groove is a common device for drying the silicon wafer, and when the drying groove is used for drying the silicon wafer, the air quality in the drying groove is critical to the drying effect of the silicon wafer. However, due to insufficient cleanliness of the factory building and restrictions of wet chemical cleaning processes, fine solid particulates and harmful chemical gases such as HCl, KOH, etc. may exist in the interior or near the equipment. If the particles and the harmful gases diffuse into the drying groove, the particles and the harmful gases can adhere to the surface of the silicon wafer, so that the surface of the silicon wafer is polluted, and the conversion efficiency of the solar cell is reduced. In addition, the harmful chemical gas may also react with the silicon wafer to reduce the service life of the carrier of the battery piece, or oxidize the surface of the silicon wafer to generate an oxide layer, which also seriously affects the conversion efficiency of the battery piece. Some existing devices (for example, the authorized bulletin number is CN 222418440U, the name is a drying device) comprise a drying groove, an air supply mechanism and an air outlet mechanism, wherein the drying groove comprises a groove body, a working cavity is formed in the groove body, the groove body comprises a bottom groove plate positioned at the bottom of the working cavity, an air inlet through hole and an air outlet through hole are formed in the bottom groove plate, the air supply mechanism comprises an air supply pipeline, a filtering component and a fan, the air supply pipeline is communicated with the working cavity through the air inlet through hole, the air outlet mechanism comprises an air outlet pipeline, and the air outlet pipeline is communicated with the working cavity through the air outlet through hole. After the equipment filters external air, clean fresh air is conveyed to the working chamber, the air cleanliness in the drying groove is effectively improved, a test piece to be dried is prevented from being polluted in the drying groove, however, in order to improve the drying effect, the fluidity of gas in the working chamber needs to be ensured, so that the gas in the working chamber needs to be continuously discharged through the air outlet pipe along with continuous conveying of the clean fresh air, and the flow rate of the gas is influenced due to the fact that the external air needs to be filtered before being input, so that the drying efficiency is still to be improved. Disclosure of utility model The application provides drying equipment for solving the problem of low drying efficiency caused by low clean fresh air conveying rate in the prior art. The drying equipment comprises a drying groove, a first gas transmission assembly, a filtering assembly and a gas outlet assembly. The drying groove is provided with an air inlet and an air outlet. The first gas transmission assembly comprises a gas transmission main path and a gas transmission branch path, the first end of the gas transmission branch path is communicated with the first end of the gas transmission main path, the second end of the gas transmission branch path is communicated with the drying groove through a gas inlet, and the second end of the gas transmission main path is communicated with the external environment. The filter assembly comprises a first filter and a second filter, and the first filter and the second filter are both arranged on the gas transmission main path. The air outlet assembly comprises an air outlet main path and an air outlet branch path, the first end of the air outlet main path is communicated with the air transmission main path, the communication position is positioned at the downstream of the first filter and the second filter, the second end of the air outlet main path is communicated with the first end of the air outlet branch path, and the second end of the air outlet branch path is communicated with the drying groove through an air outlet. In some embodiments, the filter assembly further comprises a third filter disposed on the gas delivery main circuit, the first filter and the second filter disposed proximate the second end of the gas delivery main circuit, the third filter disposed proximate the first end of the gas delivery main circuit. In some embodiments, the location of communication of the primary gas outlet and primary gas delivery is between the second filter and the third filter. In some embodiments, the first gas delivery assembly further comprises a circulation fan and a heater, both of which are disposed on th