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CN-224216044-U - Integrated nanometer displacement platform linearity calibrating device of laser interferometer

CN224216044UCN 224216044 UCN224216044 UCN 224216044UCN-224216044-U

Abstract

The utility model discloses an integrated nano displacement platform linearity calibration device of a laser interferometer, which comprises a base platform and a laser instrument arranged on one side of the top of the base platform, wherein a spectroscope is arranged at the top of the base platform and corresponds to the position of the laser instrument, a nano displacement platform to be detected is arranged on the other side of the top of the base platform, and a nano displacement platform fixing component for fixing the nano displacement platform to be detected is arranged on the base platform and corresponds to the position of the nano displacement platform to be detected. The utility model drives the clamping seat to realize convenient and stable fixation of the nano displacement platform to be detected by rotating the bidirectional screw, effectively prevents tiny displacement or vibration of the displacement platform in the calibration process, improves the calibration accuracy, and simultaneously realizes convenient and accurate installation of the reflecting mirror body on the nano displacement platform to be detected by utilizing the clamping connection of the fixing frame and the matching of the fixing bolt and the threaded seat, and ensures the accuracy of the laser interferometer calibration system.

Inventors

  • FU XIAO
  • ZHANG YUANCHUN
  • YU JINCHENG

Assignees

  • 迅衡(天津)光电科技有限公司

Dates

Publication Date
20260508
Application Date
20250516

Claims (6)

  1. 1. The utility model provides a laser interferometer integrated form nanometer displacement platform linearity calibrating device, includes base station (1) and install in laser instrument (2) of base station (1) top one side, its characterized in that, spectroscope (3) are installed at the top of base station (1) and correspond the position of laser instrument (2), wait to detect nanometer displacement platform (4) are installed to the opposite side at base station (1) top, just correspond on base station (1) wait to detect nanometer displacement platform (4) the position is installed and is used for fixing wait to detect nanometer displacement platform (4) nanometer displacement platform fixed subassembly (5), wait to detect still install reflector fixed subassembly (6) on nanometer displacement platform (4).
  2. 2. The integrated nanometer displacement platform linearity calibration device of a laser interferometer according to claim 1, wherein the nanometer displacement platform fixing component (5) comprises a bidirectional screw rod (501) rotatably installed on the base platform (1), reverse threads are formed on the bidirectional screw rod (501), two symmetrically arranged thread sleeves (502) are connected to the bidirectional screw rod (501) in a threaded mode, L-shaped clamping rods (503) are fixedly connected to the two thread sleeves (502), and clamping bases (504) used for clamping and fixing the nanometer displacement platform (4) to be detected are fixedly connected to one sides, close to each other, of the two L-shaped clamping rods (503).
  3. 3. The integrated nano-displacement table linearity calibration device of a laser interferometer according to claim 2, wherein a clamping pad (5041) is fixedly connected to one side of the clamping seat (504) close to the nano-displacement table (4) to be detected.
  4. 4. The integrated nano-displacement stage linearity calibration device of a laser interferometer according to claim 3, wherein the reflector fixing assembly (6) comprises a fixing frame (601) matched with the nano-displacement stage (4) to be detected, and a reflector body (6011) matched with the spectroscope (3) is mounted on the side surface of the fixing frame (601).
  5. 5. The integrated nano displacement table linearity calibration device of a laser interferometer according to claim 4, wherein a thread seat (602) is fixedly connected to the fixed frame (601), and a fixing bolt (6021) for fixing the fixed frame (601) is connected to the thread seat (602) in a threaded manner.
  6. 6. The integrated nano-displacement table linearity calibration device of a laser interferometer according to claim 5, wherein an anti-slip pad (603) is fixedly connected to the inner wall of the fixed frame (601).

Description

Integrated nanometer displacement platform linearity calibrating device of laser interferometer Technical Field The utility model relates to the technical field of nano displacement table calibration devices, in particular to an integrated nano displacement table linearity calibration device of a laser interferometer. Background In the field of precision measurement and manufacture, the nano displacement platform is used as a core component for realizing micro-scale or even nano-scale accurate positioning, and the linearity precision of the nano displacement platform is directly related to the performance and reliability of the whole system. The laser interferometer is widely applied to the linearity calibration process of the nanometer displacement platform as a high-precision non-contact displacement measuring tool. The device comprises a collimation light source, a photoelectric detection module arranged on the light path of the collimation light source, a nano displacement table to be calibrated corresponding to the position of the photoelectric detection module, a grating arranged on the nano displacement table to be calibrated, a signal processing system connected with the photoelectric detection module circuit and a displacement table driving system connected with the nano displacement table to be calibrated circuit, wherein the displacement table driving system drives the nano displacement table to be calibrated to drive the grating to synchronously move, the photoelectric detection module is provided with a photoelectric detector for collecting interference signals, and the interference signals collected by the photoelectric detector are converted into current signals and transmitted to the signal processing system. However, in the prior art, there are some problems to be solved in the linearity calibration device for the nano displacement stage: On the one hand, many calibration devices cannot fully consider the fixing requirement of the nano displacement platform to be detected in design, so that the nano displacement platform is easy to generate tiny displacement or vibration in the calibration process, the accuracy of a calibration result is affected, and the fixing mode with poor stability not only increases the calibration difficulty, but also can cause potential damage to the nano displacement platform. On the other hand, the accuracy of the mounting position and angle of the mirror as a critical optical element in a laser interferometer calibration system has a decisive influence on the calibration result. However, the calibration device in the prior art often has the problems of complex operation, inaccurate positioning and the like in the installation of the reflecting mirror. Especially when needs are installed the speculum on waiting to detect nanometer displacement platform, because nanometer displacement platform compact structure, space are limited, traditional mounting means often are difficult to satisfy quick, convenient and accurate installation demand. Disclosure of utility model The utility model aims to provide an integrated nano displacement platform linearity calibration device of a laser interferometer, which is characterized in that a clamping seat is driven by a bidirectional screw rod to realize convenient and stable fixation of a nano displacement platform to be detected, so that tiny displacement or vibration of the displacement platform in a calibration process is effectively prevented, the calibration accuracy is improved, and meanwhile, a fixing frame is used for clamping and matching a fixing bolt and a threaded seat to realize convenient and accurate installation of a reflector body on the nano displacement platform to be detected, and the accuracy of a laser interferometer calibration system is ensured. In order to achieve the above purpose, the main technical scheme adopted by the utility model comprises the following steps: An integrated nanometer displacement platform linearity calibration device of a laser interferometer, comprising: The device comprises a base station and a laser instrument arranged on one side of the top of the base station, wherein a spectroscope is arranged at the top of the base station and corresponds to the position of the laser instrument, a nano displacement table to be detected is arranged on the other side of the top of the base station, a nano displacement table fixing component for fixing the nano displacement table to be detected is arranged on the base station and corresponds to the position of the nano displacement table to be detected, and a reflecting mirror fixing component is also arranged on the nano displacement table to be detected. Above-mentioned integrated nanometer displacement platform linearity calibrating device of laser interferometer, wherein, nanometer displacement platform fixed subassembly including rotate install in bi-directional screw on the base station, back screw thread has been seted up on the bi-dire