CN-224216243-U - Helium inspection tool and helium inspection system

CN224216243UCN 224216243 UCN224216243 UCN 224216243UCN-224216243-U

Abstract

The utility model discloses a helium detection tool and a helium detection system, wherein the helium detection tool comprises a sealing cover, a first connecting base and a second connecting base, the sealing cover is positioned on one side of the first connecting base and is in sealing connection with the first connecting base, the second connecting base is positioned on the other side of the first connecting base, a pressing end is arranged on one side, close to the second connecting base, of the first connecting base, a sealing accommodating position is arranged on one side, close to the first connecting base, of the second connecting base, a second sealing piece is arranged in the sealing accommodating position, and the pressing end is connected with the sealing accommodating position in a matched mode and can press the second sealing piece, so that the second sealing piece can move towards the direction, close to the radial center of the second connecting base. In this scheme the installation connection process convenient and fast of frock, labour saving and time saving. And the use of shielding adhesive tapes is eliminated, so that the cost is saved.

Inventors

Quan Taizhi
ZHANG LONGHAO
ZHANG KE
ZHU XINGSHENG
MENG DEDONG

Assignees

合肥微睿科技股份有限公司

Dates

Publication Date: 20260508
Application Date: 20250519

Claims (10)

1. The helium detection tool is characterized by comprising a sealing cover (1), a first connecting base (2) and a second connecting base (3); The sealing cover (1) is positioned on one side of the first connecting base (2) and is in sealing connection with the first connecting base (2), and the second connecting base (3) is positioned on the other side of the first connecting base (2); The sealing device comprises a first connecting base (2), a second connecting base (3) and a sealing accommodating position (31), wherein a pressing end (21) is arranged on one side, close to the second connecting base (3), of the first connecting base (2), a second sealing element (6) is arranged in the sealing accommodating position (31), and the pressing end (21) is matched with the sealing accommodating position (31) and can press the second sealing element (6) so that the second sealing element (6) can move towards the direction, close to the radial center of the second connecting base (3).
2. A helium test fixture according to claim 1, wherein the seal receiving place (31) is concavely arranged, and the seal receiving place (31) is located on the inner side surface of the second connection base (3).
3. Helium detection kit according to claim 1 or 2, characterized in that the side of the seal receiving place (31) remote from the compacting side (21) is inclined to form an inclined side, while the opposite inclined sides form an angle α.
4. The helium detection fixture of claim 3, wherein the included angle alpha is 100 degrees less than or equal to alpha less than or equal to 120 degrees.
5. The helium detection tool according to claim 1, wherein a first connection position (23) is arranged on the first connection base (2), a second connection position (32) corresponding to the first connection position (23) is arranged on the second connection base (3), and connecting pieces are arranged in the first connection position (23) and the second connection position (32).
6. A helium test fixture according to claim 5, wherein the first connection site (23) and the second connection site (32) are arranged in an axially central array around the first connection base (2).
7. A helium test fixture according to claim 5, wherein said first connection location (23) is located outside said compacting side (21).
8. The helium detection fixture as set forth in claim 1, wherein a sealing surface is arranged at the joint of the first connecting base (2) and the sealing cover (1), a first groove (22) is formed in the sealing surface, and a first sealing piece (5) is arranged in the first groove (22).
9. The helium detection fixture as set forth in claim 8, wherein one end of the sealing cover (1) is provided with an inlet (11), the other end is provided with a sealing opening (12), and the sealing opening (12) is connected with the sealing surface in a matching way.
10. A helium detection system, comprising a helium mass spectrometer leak detector and a helium detection tool according to any one of claims 1-9, wherein the helium mass spectrometer leak detector is provided with an interface pipe column (4), the helium detection tool is connected with the pipe column (4), the first connecting base (2) and the second connecting base (3) are sleeved on the pipe column (4), and the second sealing piece (6) presses the outer side wall of the pipe column (4) when moving towards the direction close to the radial center of the second connecting base (3).

Description

Helium inspection tool and helium inspection system Technical Field The utility model relates to the technical field of helium leakage detection, in particular to a helium detection tool and a helium detection system. Background In the field of semiconductor manufacturing, susceptor (susceptor) is used as a core carrier for processes such as Chemical Vapor Deposition (CVD), metal Organic Chemical Vapor Deposition (MOCVD), epitaxial growth, etc., and its performance directly determines the accuracy and yield of wafer processing. Particularly in terms of air tightness, any minor leakage may lead to reduced vacuum in the reaction chamber and uneven distribution of process gases, ultimately affecting device reliability. Therefore, performing high-precision air tightness detection on Susceptor becomes an indispensable link in quality control of semiconductor devices. The helium that current used examines frock and is the special fluorine dragon material, when being connected with Susceptor, in order to reach the gas tightness requirement, in order to ensure with tubular column leakproofness, adopts the masking tape to carry out cladding seal on the one hand, uses the chain to revolve to twist the locking on the other hand, reaches sealed effect. However, the shielding adhesive tape is high in price, for example, the consumption of the shielding adhesive tape is about 10 rolls and about 6000 yuan in one year, the helium detection tool is made of Teflon, repeated screwing threads for detecting leakage are easy to damage, the whole set of shielding adhesive tape cannot be used after damage, the shielding adhesive tape is screwed and locked by a chain, the shielding adhesive tape is difficult to detach after the leakage detection is finished, the sealing effect is poor, the numerical value is reduced slowly during the leakage detection, and the use time is long. Disclosure of utility model The utility model provides a helium detection tool and a helium detection system, wherein the helium detection tool can be quickly connected with Susceptor and achieve a sealing effect. In order to achieve the above purpose, the technical scheme provided by the utility model is as follows: A helium detection tool comprises a sealing cover, a first connecting base and a second connecting base; The sealing cover is positioned on one side of the first connecting base and is in sealing connection with the first connecting base; The first connecting base is provided with a pressing end at one side close to the second connecting base, the second connecting base is provided with a sealing containing position at one side close to the first connecting base, a second sealing piece is arranged in the sealing containing position, and the pressing end is matched with the sealing containing position and can press the second sealing piece, so that the second sealing piece can move towards a direction close to the radial center of the second connecting base. As a further improvement, the seal accommodating position is concavely arranged, and the seal accommodating position is positioned on the inner side surface of the second connecting base. As a further improvement, the sides of the seal receiving locations remote from the compression ends are arranged obliquely to form oblique sides, while the oblique sides in opposite directions form an angle α. As a further improvement, the included angle alpha is 100 degrees or more and 120 degrees or less. As a further improvement, a first connecting position is arranged on the first connecting base, a second connecting position corresponding to the first connecting position is arranged on the second connecting base, and connecting pieces are arranged in the first connecting position and the second connecting position. As a further refinement, the first connection locations and the second connection locations are disposed about the first connection base axial center array. As a further development, the first connection is located outside the pinched end. As a further improvement, a sealing surface is arranged at the joint of the first connecting base and the sealing cover, a first groove is formed in the sealing surface, and a first sealing element is arranged in the first groove. As a further improvement, one end of the sealing cover is provided with an inlet, and the other end of the sealing cover is provided with a sealing opening which is connected with the sealing surface in a matching way. The utility model also provides a helium detection system, which comprises a helium mass spectrometer leak detector and the helium detection tool, wherein the helium mass spectrometer leak detector is provided with an interface tubular column, the helium detection tool is connected with the tubular column, the first connecting base and the second connecting base are sleeved on the tubular column, and the second sealing piece presses the outer side wall of the tubular column when moving towards the direction close t