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CN-224216358-U - Online airtight sampling device of High-K precursor material

CN224216358UCN 224216358 UCN224216358 UCN 224216358UCN-224216358-U

Abstract

The utility model discloses an online airtight sampling device for a High-K precursor material, which relates to the technical field of semiconductor materials and comprises a main sampling pipeline, wherein one end of the main sampling pipeline is connected with material extraction equipment, the other end of the main sampling pipeline is connected with a sampling bottle, a nitrogen pipeline is connected with the main sampling pipeline through a nitrogen branch pipe, a vacuum pipeline is connected with the main sampling pipeline through a vacuum branch pipe, a plurality of valves are sequentially arranged according to numbers and are configured to realize vacuumizing, nitrogen replacement, material filling and sampling operations through switch combination.

Inventors

  • NIE SHENGLIANG
  • WANG HAIYAN
  • ZHOU JUN
  • ZHANG QI

Assignees

  • 铜陵安德科铭电子材料科技有限公司

Dates

Publication Date
20260508
Application Date
20250416

Claims (8)

  1. 1. The High-K precursor material online airtight sampling device comprises a main sampling pipeline (10), and is characterized by further comprising: A main sampling pipeline (10), one end of which is connected with the material extraction equipment, and the other end of which is connected with a sampling bottle; A nitrogen pipeline (11) connected with the main sampling pipeline (10) through a nitrogen branch pipe; a vacuum pipeline (12) connected with the main sampling pipeline (10) through a vacuum branch pipe; the valve I (1), the valve II (2), the valve III (3), the valve IV (4), the valve V (5), the valve VI (6), the valve seven (7), the valve eight (8) and the valve nine (9) are distributed on a main sampling pipeline (10), a nitrogen pipeline (11) and a vacuum pipeline (12); The valves are sequentially arranged according to numbers and are configured to realize vacuumizing, nitrogen replacement, material filling and sampling operations through switch combination.
  2. 2. The High-K precursor material online airtight sampling device according to claim 1, wherein the valve I (1) is arranged on the side of a main sampling pipeline (10) close to a material extraction device; the second valve (2) is arranged at the inlet end of the nitrogen pipeline (11); The subsequent seven valves are sequentially arranged at the junction of the main sampling pipeline (10) and the vacuum pipeline (12), and the valve seven (7) and the valve eight (8) are positioned on the vacuum pipeline (12); And the valve nine (9) is arranged at one side of the tail end of the main sampling pipeline (10) close to the sampling bottle.
  3. 3. The apparatus of claim 2, further comprising a control module electrically coupled to the nine valves and configured to automatically perform the following operations: Sequentially opening the valve III (3) to the valve eight (8) for vacuumizing, closing the valve seven (7), and then opening the valve II (2) for filling nitrogen.
  4. 4. The High-K precursor material online airtight sampling device as claimed in claim 3, wherein the sampling bottle is connected with a valve IV (4) and a valve V (5) through a detachable interface, the valve IV (4) is directly communicated with the main sampling pipeline (10), the valve V (5) is communicated with the vacuum pipeline (12), and the sampling bottle can be integrally detached together with the valve IV (4) and the valve V (5) after the sampling is completed.
  5. 5. The High-K precursor material online airtight sampling device according to claim 4, wherein the vacuum pipeline (12) is communicated with the main sampling pipeline (10) through a valve seven (7) and a valve eight (8), the valve eight (8) is a main control valve of the vacuum pipeline (12), and the valve seven (7) is a branch regulating valve of the vacuum pipeline (12).
  6. 6. The High-K precursor material online airtight sampling device according to claim 5, wherein the nitrogen pipeline (11) is connected with the main sampling pipeline (10) through a valve II (2), and a one-way valve is arranged between the valve II (2) and the main sampling pipeline (10) to prevent materials from flowing back to the nitrogen pipeline (11).
  7. 7. The on-line airtight sampling device for High-K precursor materials according to claim 6, wherein a rapid sealing pipe cap is arranged at the tail end of the main sampling pipe (10), an opening of the pipe can be sealed after the sampling bottle is disassembled, and an elastic sealing ring and a locking mechanism are arranged in the pipe cap.
  8. 8. The on-line closed sampling device for High-K precursor material of claim 7, wherein: the control module is further configured to: in the negative pressure sampling stage, controlling the valve five (5), the valve six (6) and the valve seven (7) to be opened for vacuumizing for 15 seconds, and then closing and opening the valve one (1), the valve two (2) and the valve four (4) to keep sucking samples for 5 seconds; after the sampling is completed, the valve nine (9) and the valve two (2) are controlled to be opened to back the residual material pressure to the extraction equipment, and 3 times of vacuumizing and nitrogen filling cycles are executed to clean the pipeline.

Description

Online airtight sampling device of High-K precursor material Technical Field The utility model relates to the technical field of semiconductor materials, in particular to an online airtight sampling device for a High-K precursor material. Background With the rapid development of the semiconductor material industry, the requirements on the material sampling technology are increasingly increased, and the High-K precursor material is used as a key component of the emerging semiconductor material, and has more strict requirements on the sampling process due to the unique physicochemical properties, such as High activity, high viscosity, inflammability, explosiveness, high value and the like. The sampler widely used in the market at present adopts a positive pressure sampling mode, and the basic principle of the positive pressure sampling mode is that self gravity flows into a sampling container after the pressure of the sampling container and a pipeline is balanced. For the High-K precursor material, water and oxygen insulation are basic requirements in the sampling process to prevent the material from deteriorating or causing safety accidents due to contact with moisture and oxygen in the air, however, the existing sampler cannot effectively remove the air and moisture in the sampling container due to positive pressure sampling, so that the risk of sample pollution is increased. In view of this, the present application has been made. Disclosure of utility model The utility model aims to provide an online airtight sampling device for a High-K precursor material, which is used for solving the problems in the background technology. In order to solve the technical problems, the utility model provides an online airtight sampling device for a High-K precursor material, which comprises a main sampling pipeline and further comprises: One end of the main sampling pipeline is connected with the material extraction equipment, and the other end of the main sampling pipeline is connected with the sampling bottle; the nitrogen pipeline is connected with the main sampling pipeline through a nitrogen branch pipe; the vacuum pipeline is connected with the main sampling pipeline through a vacuum branch pipe; the valve I, the valve II, the valve III, the valve IV, the valve V, the valve VI, the valve seven, the valve eight and the valve nine are distributed on a main sampling pipeline, a nitrogen pipeline and a vacuum pipeline; The valves are sequentially arranged according to numbers and are configured to realize vacuumizing, nitrogen replacement, material filling and sampling operations through switch combination. Further, the automatic valve further comprises a control module, wherein the control module is electrically connected with the nine valves and is configured to automatically execute the following operations: sequentially opening the valve III to the valve eight for vacuumizing, opening the valve II for filling nitrogen after closing the valve seven, and further configuring the control module into: in the negative pressure sampling stage, controlling the valve five, the valve six and the valve seven to be opened for vacuumizing for 15 seconds, and then closing and opening the valve one, the valve two and the valve four for sucking samples for 5 seconds; After the sampling is completed, the valve nine and the valve two are controlled to be opened to back-drive the residual materials out of the equipment, and 3 times of vacuumizing and nitrogen filling cycles are executed to clean the pipeline. Further, the valve I is arranged on the side, close to the material extraction equipment, of the main sampling pipeline; the valve II is arranged at the inlet end of the nitrogen pipeline; The subsequent seven valves are sequentially arranged at the junction of the main sampling pipeline and the vacuum pipeline, and the seventh valve and the eighth valve are positioned on the vacuum pipeline; The sampling bottle is connected with the valve IV and the valve V through the detachable interface, the valve IV is directly communicated with the main sampling pipeline, the valve V is communicated with the vacuum pipeline, and the sampling bottle can be integrally detached together with the valve IV and the valve V after the sampling is completed. Further, the nitrogen pipeline is connected with the main sampling pipeline through a valve II, a one-way valve is arranged between the valve II and the main sampling pipeline to prevent materials from flowing back to the nitrogen pipeline, the vacuum pipeline is communicated with the main sampling pipeline through a valve seven and a valve eight, the valve eight is a main control valve of the vacuum pipeline, and the valve seven is a branch regulating valve of the vacuum pipeline. Furthermore, the tail end of the main sampling pipeline is provided with a quick sealing pipe cap, the pipeline opening can be closed after the sampling bottle is disassembled, and an elastic sealing ring and a lockin