CN-224216382-U - Sampling device for pollutants in wafer box

CN224216382UCN 224216382 UCN224216382 UCN 224216382UCN-224216382-U

Abstract

The utility model discloses a sampling device for pollutants in a wafer box, which comprises a fixed seat, wherein a limiting cylinder is fixedly arranged on the surface of the fixed seat, a main driving cylinder is fixedly arranged in the limiting cylinder, a lifting table is fixedly arranged at the end part of an output shaft of the main driving cylinder, a mounting seat is fixedly arranged at the top of the lifting table, a sampling assembly A, a sampling assembly B, a sampling assembly C, a sampling assembly D and a sampling assembly E are respectively and fixedly arranged on the side wall of the mounting seat, a secondary driving cylinder is arranged on the sampling assembly E, a sampling nozzle is fixedly connected at the end part of the output shaft of the secondary driving cylinder, and a stress seat is arranged on the circumferential outer wall of the sampling nozzle. The sampling device for the pollutants in the wafer box improves the universality of samples taken by the sampling nozzle, avoids limitation to a certain fixed point or area, can collect impurity samples at different positions on the surface of the wafer more comprehensively, reflects the distribution condition and the average content of the impurities on the surface of the whole wafer more accurately, and can evaluate the quality of the wafer more accurately.

Inventors

CHEN JUAN
Wu Muyan
XIA YUTING
ZHANG NA
ZHANG JIAHUI
Guan Ranran

Assignees

欣福半导体科技(合肥)有限公司

Dates

Publication Date: 20260508
Application Date: 20250506

Claims (6)

1. The utility model provides a sampling device for pollutants in wafer box, includes fixing base (1), its characterized in that, the fixed surface of fixing base (1) installs spacing section of thick bamboo (2), the inside fixed mounting of spacing section of thick bamboo (2) has main drive jar (21), the output shaft tip fixed mounting of main drive jar (21) has elevating platform (3), the top fixed mounting of elevating platform (3) has mount pad (4), sample subassembly A (5) have been set firmly respectively on the lateral wall of mount pad (4), sample subassembly B (51), sample subassembly C (52), sample subassembly D (53) and sample subassembly E (54), be provided with on sample subassembly E (54) inferior driving jar (541), output shaft tip fixedly connected with sampling mouth (543) of inferior driving jar (541), the circumference outer wall of sampling mouth (543) is provided with atress seat (542).
2. The device for sampling the pollutants in the wafer box according to claim 1, wherein the size of the limiting cylinder (2) is matched with that of the lifting table (3), the bottom of the lifting table (3) is inserted into the limiting cylinder (2), and the cross sections of the limiting cylinder (2) and the lifting table (3) are rectangular.
3. The device for sampling the pollutants in the wafer box according to claim 1, wherein the fixed seat (1) at the bottom of the limiting cylinder (2) is circular, a plurality of groups of through holes are uniformly formed in the fixed seat (1), and the lifting table (3) in the limiting cylinder (2) is vertically lifted through the main driving cylinder (21).
4. The device for sampling the pollutants in the wafer box according to any one of claims 1 or 3, wherein the mounting base (4) at the top of the lifting table (3) is cylindrical, five groups of connecting bases (540) are uniformly and fixedly arranged on the circumferential outer wall of the mounting base (4), and secondary driving cylinders (541) are respectively arranged on the five groups of connecting bases (540).
5. The device for sampling contaminants inside a wafer cassette according to claim 1, wherein the sampling assembly A (5), the sampling assembly B (51), the sampling assembly C (52), the sampling assembly D (53) and the sampling assembly E (54) are symmetrical with respect to the central axis of the mounting base (4), and the sampling assembly A (5), the sampling assembly B (51), the sampling assembly C (52), the sampling assembly D (53) and the sampling assembly E (54) are lifted and lowered synchronously.
6. The device for sampling contaminants inside a wafer cassette according to claim 5, wherein the sampling assembly E (54) comprises a connecting seat (540), a secondary driving cylinder (541), a stress seat (542), a sampling nozzle (543) and a negative pressure pipe (544), wherein the negative pressure pipe (544) is installed at the end of the sampling nozzle (543), and the sampling nozzle (543) is in a horizontal transverse movement structure.

Description

Sampling device for pollutants in wafer box Technical Field The utility model relates to the field of semiconductor manufacturing, in particular to a sampling device for pollutants in a wafer box. Background At present, in the production process of semiconductor chips, impurity elements are important factors influencing the qualification rate of the semiconductor chips, even very small amounts of impurity elements can reduce the qualification rate of the semiconductor chips, for example, alkali metal impurities and alkaline earth metal impurities can cause the reduction of the breakdown voltage of the chips, transition metal impurities and heavy metal impurities can shorten the service life of the chips or increase the dark current of the chips during operation, and the content of the impurity elements has great influence on the performance and the service life of the semiconductor chips, so that the extraction and measurement of the impurity elements have very important significance for the production of the semiconductor chips; In the patent on the wafer sampling device, it is disclosed in the patent with CN112304703a that a gas chamber is formed between the outer nozzle frame 211 and the inner scanning nozzle 212 to block the scanning liquid in the sampling nozzle 210, and in particular, the gas chamber; the sampling nozzle is arranged to be long and extends along one direction, so that the scanning range of the sampling nozzle along the first direction is increased, and when the rotating table drives the wafer to rotate for one circle, the sampling nozzle can scan more wafer areas, and therefore the scanning speed and the scanning efficiency of the wafer surface impurity sampling device are increased, and the sampling efficiency of each wafer is greatly improved; Although the device can sample the wafer, in actual use, the sampling nozzle can obtain a limited sample range, the sample is single, the impurity distribution on the surface of the wafer may not be uniform, if the sampling nozzle can only collect the sample in a limited area, the impurity distribution condition and the real content of the whole wafer surface are difficult to accurately grasp, and the impurity information of some key areas may be omitted, so that the evaluation of the wafer quality is deviated. Disclosure of utility model The present utility model is directed to a device for sampling contaminants inside a wafer cassette, which solves the above-mentioned drawbacks of the prior art. In order to achieve the above purpose, the utility model provides an inside pollutant sampling device of wafer box, which comprises a fixed base, the fixed surface of fixing base installs spacing section of thick bamboo, the inside fixed mounting of spacing section of thick bamboo has main drive jar, the output shaft tip fixed mounting of main drive jar has the elevating platform, the top fixed mounting of elevating platform has the mount pad, sample subassembly A has set firmly respectively on the lateral wall of mount pad, sample subassembly B, sample subassembly C, sample subassembly D and sample subassembly E, be provided with the secondary drive jar on the sample subassembly E, the output shaft tip fixedly connected with sampling mouth of secondary drive jar, the circumference outer wall of sampling mouth is provided with the atress seat. Preferably, the size looks adaptation of spacing section of thick bamboo and elevating platform, elevating platform bottom peg graft in the inside of spacing section of thick bamboo, and the section of spacing section of thick bamboo and elevating platform is the rectangle setting. Preferably, the fixing seat at the bottom of the limiting cylinder is circular, a plurality of groups of perforations are uniformly formed in the fixing seat, and the lifting table in the limiting cylinder vertically lifts through the main driving cylinder. Preferably, the mounting seat at the top of the lifting table is cylindrical, five groups of connecting seats are uniformly and fixedly arranged on the outer wall of the circumference of the mounting seat, and secondary driving cylinders are arranged on the five groups of connecting seats. Preferably, the sampling assembly a, the sampling assembly B, the sampling assembly C, the sampling assembly D and the sampling assembly E are symmetrical structures with respect to the central axis of the mounting seat, and the sampling assembly a, the sampling assembly B, the sampling assembly C, the sampling assembly D and the sampling assembly E are lifted synchronously. Preferably, the sampling assembly E comprises a connecting seat, a secondary driving cylinder, a stress seat, a sampling nozzle and a negative pressure pipe, wherein the negative pressure pipe is arranged at the end part of the sampling nozzle, and the sampling nozzle is of a horizontal transverse movement structure. Compared with the prior art, the utility model has the beneficial effects that the main driving cylinder can d