Search

CN-224216557-U - Wave number correction device of confocal microscopic Raman spectrometer

CN224216557UCN 224216557 UCN224216557 UCN 224216557UCN-224216557-U

Abstract

The disclosure provides a confocal microscopic Raman spectrometer wave number correction device, and belongs to the technical field of Raman spectrum detection. The correction device comprises a laser, a lens assembly, a reflector assembly, an attenuation sheet, a slit and a slit, wherein the laser is used for emitting laser, the lens assembly comprises a plurality of lenses and is used for collimating and focusing the laser, the reflector assembly comprises a plurality of reflectors, the lenses and the reflectors are alternately arranged, the reflector assembly is used for adjusting the light path direction of the laser, the attenuation sheet is arranged on a reflection light path in the reflector assembly and is used for attenuating energy of the laser, the slit is arranged at a confocal position in the lens assembly and is used for screening Rayleigh scattered light in the attenuated laser, and the reflector assembly reflects the Rayleigh scattered light to a rotary grating assembly in a spectrometer. The correction device realizes the convenient and quick calibration process and improves the calibration precision.

Inventors

  • LIU HONGFEI
  • HE WENFENG
  • Cai Mengfu

Assignees

  • 奥谱天成(厦门)光电股份有限公司

Dates

Publication Date
20260508
Application Date
20250403

Claims (10)

  1. 1. A confocal microscopic raman spectrometer wavenumber correction device, the correction device comprising: A laser (1) for emitting laser light; a lens assembly comprising a plurality of lenses for collimating and focusing the laser light; A mirror assembly including a plurality of mirrors, a plurality of the lenses being alternately arranged with the plurality of mirrors, the mirror assembly being for adjusting an optical path direction of the laser light; An attenuation sheet (2) arranged on a reflection light path in the reflector assembly, wherein the attenuation sheet (2) is used for attenuating the energy of the laser; A slit (3) arranged at a confocal position in the lens assembly, wherein the slit (3) is used for screening Rayleigh scattered light in the attenuated laser; Wherein the mirror assembly reflects the Rayleigh scattered light onto a rotating grating assembly within a spectrometer.
  2. 2. Confocal microscopic raman spectrometer wavenumber correction device according to claim 1, characterized in that said mirror assembly comprises at least a first mirror (4), a second mirror (5), a third mirror (6); The first reflecting mirror (4) is arranged in the emitting direction of the laser (1) in a non-perpendicular mode, the second reflecting mirror (5) is arranged in the reflecting light path of the first reflecting mirror (4) in a non-perpendicular mode, and the third reflecting mirror (6) is arranged in the reflecting light path of the second reflecting mirror (5) in a non-perpendicular mode.
  3. 3. The confocal microscopic raman spectrometer wave number correction device according to claim 2, wherein the first reflecting mirror (4) is disposed at an angle of 45 degrees to the emission direction of the laser (1), and the second reflecting mirror (5) is disposed at an angle of 45 degrees to the reflection light path of the first reflecting mirror (4).
  4. 4. The confocal microscopic raman spectrometer wave number correction device according to claim 2, wherein the surfaces of the first reflecting mirror (4), the second reflecting mirror (5) and the third reflecting mirror (6) are plated with high-reflection films.
  5. 5. Confocal microscopic raman spectrometer wavenumber correction device according to claim 2, characterized in that said attenuation sheet (2) is arranged on the optical path between said first mirror (4) and said second mirror (5), said attenuation sheet (2) being perpendicular to said optical path.
  6. 6. The confocal microscopic raman spectrometer wavenumber correction device according to claim 1, wherein the attenuation sheet (2) is a 99.9% attenuation sheet.
  7. 7. Confocal micro-raman spectrometer wavenumber correction device according to claim 2, characterized in that said lens assembly comprises at least a first lens (7), a second lens (8), a third lens (9); The first lens (7) is vertically arranged on a light path between the laser (1) and the first reflecting mirror (4), and the second lens (8) and the third lens (9) are sequentially and vertically arranged on a light path between the second reflecting mirror (5) and the third reflecting mirror (6); The first lens (7), the second lens (8) and the third lens (9) are all aspheric lenses.
  8. 8. Confocal micro-raman spectrometer wave number correction device according to claim 7, characterized in that the first lens (7) and the third lens (9) are both collimating lenses, the second lens (8) being a focusing lens; Wherein the second lens (8) is confocal with the third lens (9).
  9. 9. Confocal micro-raman spectrometer wavenumber correction device according to claim 8, characterized in that said slit (3) is arranged at the confocal of said second lens (8) and said third lens (9); the slit (3) is a circular slit.
  10. 10. Confocal microscopic raman spectrometer wavenumber correction device according to claim 1, characterized in that it further comprises a housing (10); the laser (1), the lens component, the reflecting mirror component, the attenuation sheet (2) and the slit (3) are all arranged in the shell (10).

Description

Wave number correction device of confocal microscopic Raman spectrometer Technical Field The disclosure relates to the technical field of Raman spectrum detection, in particular to a confocal microscopic Raman spectrometer wave number correction device. Background The confocal micro-Raman spectrometer realizes high-resolution spectrum analysis through grating light splitting. The existing grating spectrometer needs to use a lens with a long focal length to improve resolution, but the band range of the high-resolution spectrometer is narrow, and the testing range of a sample cannot be reached. Therefore, a broadband range is realized by rotating the grating, and a Raman test range is 0-5000cm -1. However, the laser wavelength deviation can cause calibration errors of the characteristic peak wave numbers of the sample, so that the wave number accuracy of the whole machine needs to be corrected through a later stage. In the prior art, the calibration of a raman spectrometer mainly carries out wave number calibration on the instrument through a known standard sample, and the core idea is that wave numbers are adjusted through known characteristic peaks of the standard sample so as to ensure wave number precision of the spectrometer. However, when the standard sample is used for calibration, the surface of the sample needs to be flat and clean, and if scratches, pollution or other defects exist on the surface, the shape of a Raman peak becomes blurred or shifted, and the accuracy of wave number calibration is affected. Meanwhile, the standard sample is adopted for calibration, and the calibration process is time-consuming and labor-consuming. In order to solve the problems, a confocal microscopic Raman spectrometer wave number correction device is designed. Disclosure of utility model The utility model aims at overcoming the defects of the prior art, providing a confocal microscopic Raman spectrometer wave number correction device, realizing the calibration process conveniently and rapidly and improving the calibration precision. In order to achieve the above purpose, the present disclosure adopts the following technical scheme: a confocal microscopy raman spectrometer wavenumber correction device, the correction device comprising: A laser for emitting laser light; a lens assembly comprising a plurality of lenses for collimating and focusing the laser light; A mirror assembly including a plurality of mirrors, a plurality of the lenses being alternately arranged with the plurality of mirrors, the mirror assembly being for adjusting an optical path direction of the laser light; The attenuation sheet is arranged on the reflection light path in the reflector assembly and is used for attenuating the energy of the laser; a slit arranged at a confocal position in the lens assembly, wherein the slit is used for screening Rayleigh scattered light in the attenuated laser; Wherein the mirror assembly reflects the Rayleigh scattered light onto a rotating grating assembly within a spectrometer. In one exemplary embodiment of the present disclosure, the mirror assembly includes at least a first mirror, a second mirror, a third mirror; The first reflecting mirror is arranged in the emitting direction of the laser in a non-perpendicular mode, the second reflecting mirror is arranged in the reflecting light path of the first reflecting mirror in a non-perpendicular mode, and the third reflecting mirror is arranged in the reflecting light path of the second reflecting mirror in a non-perpendicular mode. In an exemplary embodiment of the disclosure, the first mirror is disposed at an angle of 45 degrees to the emission direction of the laser, and the second mirror is disposed at an angle of 45 degrees to the reflected light path of the first mirror. In one exemplary embodiment of the present disclosure, the first, second, and third mirror surfaces are each coated with a highly reflective film. In one exemplary embodiment of the present disclosure, the attenuation sheet is disposed on an optical path between the first mirror and the second mirror, the attenuation sheet being perpendicular to the optical path. In an exemplary embodiment of the present disclosure, the attenuation sheet is a 99.9% attenuation sheet. In one exemplary embodiment of the present disclosure, the lens assembly includes at least a first lens, a second lens, and a third lens; The first lens is vertically arranged on a light path between the laser and the first reflecting mirror, and the second lens and the third lens are sequentially and vertically arranged on the light path between the second reflecting mirror and the third reflecting mirror; The first lens, the second lens and the third lens are all aspheric lenses. In an exemplary embodiment of the present disclosure, the first lens and the third lens are both collimating lenses, and the second lens is a focusing lens; Wherein the second lens is confocal with the third lens. In one exemplary embodiment of