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CN-224216588-U - High-precision PCB detection device

CN224216588UCN 224216588 UCN224216588 UCN 224216588UCN-224216588-U

Abstract

The utility model relates to the technical field of PCB detection, in particular to a high-precision PCB detection device, which comprises a sample table, wherein the upper end of one side of the sample table is fixedly connected with an electronic lens adjusting mechanism, one side of the electronic lens adjusting mechanism is fixedly connected with an electronic gun, the outer side of the lower end of the electronic gun is fixedly connected with an electromagnetic lens, one side of the upper end of the sample table is fixedly connected with a wiping cleaning device, the wiping cleaning device comprises supporting plates, vertical grooves are formed in one sides of the two supporting plates, the bottoms of the inner sides of the vertical grooves are rotatably connected with threaded rods, the outer sides of the threaded rods are in threaded connection with an adjusting plate, the middle of the upper end of the adjusting plate is provided with a sliding groove, one side of the supporting plate, which is far away from the electromagnetic lens, is fixedly connected with a wiping plate, and in the utility model, lens pollutants can be effectively removed by the aid of the arranged wiping cleaning device, the imaging quality of the electromagnetic lens is ensured, and the accuracy and the stability of the high-precision PCB detection are improved.

Inventors

  • HUANG TAO
  • Shen Ludi

Assignees

  • 南京泊纳莱电子科技有限公司

Dates

Publication Date
20260508
Application Date
20250509

Claims (7)

  1. 1. The high-precision PCB detection device comprises a sample stage (5) and is characterized in that an electronic lens adjusting mechanism (1) is fixedly connected to the upper end of one side of the sample stage (5), an electronic gun (2) is fixedly connected to one side of the electronic lens adjusting mechanism (1), an electromagnetic lens (3) is fixedly connected to the outer side of the lower end of the electronic gun (2), and a wiping and cleaning device (4) is fixedly connected to one side of the upper end of the sample stage (5); The cleaning device comprises a supporting plate (41), two vertical grooves (42) are formed in one side of the supporting plate (41), threaded rods (43) are connected to the inner bottoms of the vertical grooves (42) in a rotating mode, adjusting plates (44) are connected to the outer sides of the threaded rods (43) in a threaded mode, sliding grooves (45) are formed in the middle of the upper ends of the adjusting plates (44), electric telescopic rods (46) are fixedly connected to one sides of the supporting plate (41) away from electromagnetic lenses (3), one ends of the telescopic rods of the electric telescopic rods (46) are fixedly connected with wiping plates (47), the wiping plates (47) comprise moving plates (471), guide rods (472) are connected to the inner sides of one ends of the moving plates (471) in a sliding mode, compression springs (473) are fixedly connected to the outer sides of the other ends of the guide rods (472), and rubber plates (474) are fixedly connected to one ends of the compression springs (473), and the upper ends of the rubber plates (474) are fixedly connected with wiping cloth (475) in a sticky mode.
  2. 2. The high-precision PCB detection device according to claim 1, wherein the electronic lens adjusting mechanism (1) is vertically and fixedly connected to the upper end of one side of the sample table (5), the electronic gun (2) is horizontally and fixedly connected to one side of the electronic lens adjusting mechanism (1), the electromagnetic lens (3) is arranged right above the center of the sample table (5), and the wiping and cleaning device (4) is positioned on one side, far away from the electronic gun (2), of the upper end of the sample table (5).
  3. 3. The high-precision PCB detection device according to claim 1, wherein the two support plates (41) are symmetrically distributed along the center line of the sample table (5), the vertical grooves (42) are long-strip-shaped, the vertical grooves (42) are longitudinally formed along one side of the support plates (41), the threaded rods (43) are vertically arranged at the bottom of the inner sides of the vertical grooves (42), and two ends of the adjusting plates (44) are in threaded connection with the outer sides of the threaded rods (43).
  4. 4. The high-precision PCB detection device according to claim 1, wherein the sliding groove (45) is a rectangular groove, two electric telescopic rods (46) are arranged, one ends of the telescopic rods of the electric telescopic rods (46) are U-shaped, the wiping plate (47) is horizontally fixed at one end of the U-shaped telescopic rods of the electric telescopic rods (46), and the wiping plate (47) is connected to the inner side of the sliding groove (45) in a sliding mode.
  5. 5. The device for inspecting a PCB with high precision of claim 1, wherein the movable plate (471) has a rectangular plate-like structure, the guide rod (472) is horizontally slid inside one end of the movable plate (471), the compression spring (473) is circumferentially disposed outside the other end of the guide rod (472), and the inside of one end of the movable plate (471) has a hollow structure.
  6. 6. The high precision PCB inspection device as set forth in claim 1 wherein the wiper cloth (475) is entirely covered on the upper end surface of the rubber plate (474), the guide rod (472) and the compression spring (473) are perpendicular to the rubber plate (474) and one end of the wiper cloth (475), and the outer side of the rubber plate (474) is slidably connected to the inner side of the hollow structure at one end of the movable plate (471).
  7. 7. The high-precision PCB detection device of claim 1, wherein the upper end surface of the wiping cloth (475) and the surface of the lens of the electromagnetic lens (3) are positioned on the same horizontal plane, the area of the wiping cloth (475) is 1.5 times that of the surface of the lens of the electromagnetic lens (3), and the periphery of the wiping cloth (475) is provided with a round corner structure.

Description

High-precision PCB detection device Technical Field The utility model relates to the technical field of PCB detection, in particular to a high-precision PCB detection device. Background The high-precision PCB detection device is equipment for high-precision detection of a printed circuit board, and is generally composed of a mechanical motion system, an image acquisition system, an illumination system, a control system, image processing and analysis software and the like, wherein the image acquisition system comprises a high-resolution camera and an electromagnetic lens, and the electromagnetic lens acts on an electron beam through a magnetic field to enable the electron beam to form a tiny light spot on the surface of a sample so as to improve the resolution; In devices such as electron microscopes of image acquisition systems, electromagnetic lenses are usually in a vacuum environment, because the vacuum has almost no gas molecules to conduct heat, heat is easily accumulated, the temperature is increased, substances in the sample are easily evaporated at high temperature, and the evaporated substances are easily condensed and adsorbed on the surface of the relatively cold electromagnetic lens when encountering the surface of the electromagnetic lens, and if the surface of the electromagnetic lens adsorbs substances evaporated from the sample or pollutants in the vacuum system, the magnetic field distribution of the lens is changed, so that the focusing and imaging effects of electron beams are affected; accordingly, a high-precision PCB inspection apparatus has been proposed to address the above-described problems. Disclosure of utility model The utility model aims to provide a high-precision PCB detection device, which solves the problems that the evaporated substances are easier to condense and adsorb on the surface of a relatively cold electromagnetic lens when encountering the surface of the electromagnetic lens, and the magnetic field distribution of the lens is changed and the focusing and imaging effects of an electron beam are affected if the surface of the electromagnetic lens adsorbs substances evaporated by a sample or pollutants in a vacuum system. In order to achieve the above purpose, the present utility model provides the following technical solutions: The high-precision PCB detection device comprises a sample table, wherein an electronic lens adjusting mechanism is fixedly connected to the upper end of one side of the sample table, an electronic gun is fixedly connected to one side of the electronic lens adjusting mechanism, an electromagnetic lens is fixedly connected to the outer side of the lower end of the electronic gun, a wiping cleaning device is fixedly connected to one side of the upper end of the sample table, the wiping cleaning device comprises a supporting plate, two vertical grooves are formed in one side of the supporting plate, threaded rods are rotatably connected to the bottoms of the inner sides of the vertical grooves, an adjusting plate is connected to the outer sides of the threaded rods in a threaded manner, a sliding groove is formed in the middle of the upper end of the adjusting plate, an electric telescopic rod is fixedly connected to one side of the supporting plate, away from the electromagnetic lens, of the supporting plate, a telescopic rod one end of the electric telescopic rod is fixedly connected with a wiping plate, the wiping plate comprises a moving plate, a guide rod is fixedly connected to the outer side of one end of the moving plate, a compression spring is fixedly connected to the other end of the guide rod, a rubber plate is fixedly connected to the other end of the compression spring, and the upper end of the rubber plate is fixedly connected with a wiping cloth in a sticky manner. As a further optimized content of the invention, the electronic lens adjusting mechanism is vertically and fixedly connected to the upper end of one side of the sample stage, the electronic gun is horizontally and fixedly connected to one side of the electronic lens adjusting mechanism, the electromagnetic lens is arranged right above the center of the sample stage, and the wiping and cleaning device is positioned on one side, far away from the electronic gun, of the upper end of the sample stage. As the content of further optimization of the invention, the two supporting plates are symmetrically distributed by the central line of the sample table, the vertical grooves are in a strip shape, the vertical grooves are longitudinally formed along one side of the supporting plates, the threaded rods are vertically arranged at the bottom of the inner sides of the vertical grooves, and the two ends of the adjusting plate are in threaded connection with the outer sides of the threaded rods. As the content of further optimization of the utility model, wherein the spout is the rectangle groove, electric telescopic handle is provided with two, electric telescopic handle's telesco