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CN-224216595-U - Mounting bracket for ‌ X-ray semiconductor detection instrument

CN224216595UCN 224216595 UCN224216595 UCN 224216595UCN-224216595-U

Abstract

The application discloses a mounting bracket for ‌ X-ray semiconductor detection instrument, which comprises a mounting cross rod, an image collector, a lifting component and a rotating component, wherein the rotating component is arranged on the mounting cross rod, the rotating component comprises a rotating arc plate and a rotating sliding rail, the rotating arc plate is vertically connected to the mounting cross rod, the rotating sliding rail is connected to one side of the rotating arc plate far away from the mounting cross rod, the lifting component is arranged on the rotating component, the lifting component comprises a lifting frame and a lifting sliding rail, the lifting sliding rail is arranged on the lifting frame along the length direction of the lifting frame, a first sliding block is arranged on the lifting sliding rail in a sliding manner, the first sliding block is connected with the image collector, a second sliding block is arranged on the lifting frame, and the second sliding block is arranged on the rotating sliding rail in a sliding manner. The application has the effect of improving the shooting accuracy of the detector.

Inventors

  • QIAN XIAOWEI
  • LIU JIANJUN

Assignees

  • 苏州朗光精密科技有限公司

Dates

Publication Date
20260508
Application Date
20250408

Claims (8)

  1. 1. The mounting bracket for the ‌ X-ray semiconductor detection instrument is characterized by comprising a mounting cross rod (2), an image collector (1), a lifting assembly (3) and a rotating assembly (4), wherein the rotating assembly (4) is arranged on the mounting cross rod (2), the rotating assembly (4) comprises a rotating arc plate (41) and a rotating slide rail (44), the rotating arc plate (41) is vertically connected to the mounting cross rod (2), the rotating slide rail (44) is connected to one side, far away from the mounting cross rod (2), of the rotating arc plate (41), the lifting assembly (3) is arranged on the rotating assembly (4), the lifting assembly (3) comprises a lifting frame (31) and a lifting slide rail (35), the lifting slide rail (35) is arranged on the lifting frame (31) along the length direction of the lifting frame (31), a first sliding block (32) is arranged on the lifting slide rail (35) in a sliding manner, the first sliding block (32) is connected with the image collector (2), the lifting frame (31) is arranged on one side, the lifting frame (31) is driven by the first sliding block (45) along the length direction of the lifting slide rail (45), the lifting frame (31) is provided with a second driving piece for driving the second sliding block (45) to move along the rotating sliding rail (44).
  2. 2. The mounting bracket for ‌ X-ray semiconductor inspection equipment according to claim 1, wherein the second driving member comprises a driven gear (48) and a driven rack (49), the driven rack (49) is connected to the outer arc wall of the rotating arc plate (41), the driven gear (48) is rotatably arranged on the lifting frame (31), a driving source for driving the driven gear (48) to rotate is arranged on the lifting frame (31), and the driven gear (48) is in meshed connection with the driven rack (49).
  3. 3. The mounting bracket for ‌ X-ray semiconductor inspection equipment according to claim 2, wherein the outer arc walls at both ends of the rotating arc plate (41) in the length direction are provided with a limiting end block (42), and one end of the limiting end block (42) extends out of the edge of the rotating arc plate (41).
  4. 4. A mounting bracket for ‌ X-ray semiconductor inspection equipment according to claim 3, wherein the end of the limit end block (42) remote from the rotating arc plate (41) is provided with an abutment rubber block (43).
  5. 5. The mounting bracket for ‌ X-ray semiconductor detection instrument according to claim 4, wherein the mounting cross bar (2) is provided with a mounting frame (8), one side of the mounting frame (8) close to the lifting frame (31) is provided with a return induction switch (9), one side of the lifting frame (31) close to the mounting cross bar (2) is provided with an induction plate (11), the return induction switch (9) is provided with a first communication groove (91) for the induction plate (11) to pass through, when the lifting frame (31) rotates to a vertical state, the induction plate (11) is positioned in the first communication groove (91), and the return induction switch (9) is electrically connected with the second driving piece.
  6. 6. The mounting bracket for ‌ X-ray semiconductor detection equipment, as set forth in claim 5, characterized in that two limit inductive switches (10) are disposed on the mounting cross bar (2), the return inductive switch (9) is disposed between the two limit inductive switches (10), the limit inductive switches (10) are electrically connected with the second driving member, a second communication groove (101) is formed on one side of the limit inductive switch (10) close to the lifting frame (31), and when the inductive plate (11) moves into the second communication groove (101), the driven gear (48) is in contact with the abutting rubber block (43).
  7. 7. The mounting bracket for ‌ X-ray semiconductor inspection equipment according to claim 1, wherein the rotary arc plate (41) is provided with angle graduation marks (5) along the length direction of the rotary slide rail (44).
  8. 8. A mounting bracket for ‌ X-ray semiconductor inspection equipment according to claim 1, wherein the mounting rail (2) is provided with a mounting groove (21) along the length direction, a plurality of mounting sliders (7) are slidably arranged in the mounting groove (21), and the rotating arc plate (41) is provided with connecting pieces for connecting with the plurality of mounting sliders (7).

Description

Mounting bracket for ‌ X-ray semiconductor detection instrument Technical Field The application relates to the technical field of semiconductor detection, in particular to a mounting bracket for ‌ X-ray semiconductor detection instruments. Background An X-ray semiconductor inspection instrument is a high-precision device for inspecting internal defects, structures and components of semiconductor materials and devices. The method utilizes the penetrability and diffraction characteristics of X-rays to perform nondestructive detection on the semiconductor material, and is widely applied to the fields of semiconductor manufacturing, packaging test, material analysis and the like. The X-ray inspection apparatus detects and analyzes minute defects by emitting a high-energy X-ray beam through an object to be inspected (e.g., a semiconductor wafer or element), and then receiving the transmitted X-ray signal and generating an image. At present, in order to carry out more accurate shooting detection to the product, need carry out the multi-angle to the product from each height and angle and shoot, avoid appearing the condition emergence that can not accurate aassessment product in the view that single angle shot. But when the angle and the height of the image collector are adjusted each time, the image collector needs to be positioned and installed again, the process is tedious, and the detection efficiency of products is reduced. Disclosure of utility model In order to improve the shooting accuracy of the detector, the application provides a mounting bracket for ‌ X-ray semiconductor detection instruments. The application provides a mounting bracket for ‌ X-ray semiconductor detection instrument, which adopts the following technical scheme: The utility model provides a installing support for ‌ X-ray semiconductor detecting instrument, includes installation horizontal pole, image acquisition device, lifting unit and rotating assembly, rotating assembly set up in on the installation horizontal pole, rotating assembly includes rotation arc board and rotation slide rail, rotate arc board vertical connect in on the installation horizontal pole, rotate slide rail connect in rotate arc board keep away from one side of installation horizontal pole, lifting unit set up in on the rotating assembly, lifting unit includes crane and lift slide rail, the lift slide rail is followed the length direction of crane sets up on it, it is provided with first slider to slide on the lift slide rail, first slider with image acquisition device is connected, be provided with on the crane and be used for the drive first slider is followed lift slide rail length direction gliding first driving piece, be provided with the second slider on the crane, the second slider slide set up in on the rotation slide rail, be provided with on the crane and be used for the drive the second slider is followed the second driving piece that the rotation slide rail removed. Through adopting above-mentioned technical scheme, when carrying out image acquisition to the product, image acquisition ware removes along vertical direction along with the drive effect of first slider under first driving piece, realizes the regulation to the height. The lifting frame slides along the rotating slide rail along with the second slide block under the driving action of the second driving piece, so that the shooting angle is adjusted. Through the mutual cooperation of installation horizontal pole, image acquisition ware, lifting unit and rotating assembly, realized the quick angle and the altitude mixture control to image acquisition ware, have the effect that improves the detector and shoot the precision. Optionally, the second driving piece includes driven gear and driven rack, driven rack connect in on the outer arc wall of rotating the arc board, driven gear rotate set up in on the crane, be provided with on the crane and be used for the drive driven gear pivoted actuating source, driven gear with driven rack meshing is connected. Through adopting above-mentioned technical scheme, when needing to adjust the angle of image acquisition ware, driven gear begins to rotate under the drive effect of actuating source, and the crane takes place to rotate under driven gear's drive effect, has realized the angle modulation and the drive to crane and image acquisition ware. Optionally, the outer arc wall at both ends of the length direction of the rotating arc plate is provided with a limiting end block, and one end of the limiting end block extends out of the edge of the rotating arc plate. Through adopting above-mentioned technical scheme, two spacing end blocks restrict the rotation angle of crane, have avoided rotating the slider to deviate from rotating the slide rail. Optionally, the spacing end piece is kept away from the one end of rotating the arc board is provided with the butt rubber piece. Through adopting above-mentioned technical scheme, the setting of butt rubber piece ha