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CN-224216719-U - Acceleration sensor

CN224216719UCN 224216719 UCN224216719 UCN 224216719UCN-224216719-U

Abstract

The utility model provides an acceleration sensor which comprises a shell, a top cover and connecting pieces, wherein the top of the shell is fixedly connected with the top cover, the connecting pieces are inserted into four corners of the top cover and are in threaded connection with four corners of the top surface of the shell, the inner side of the shell is fixedly connected with a plate body, a capacitor is mounted on the top surface of the plate body, and a mass block is elastically connected inside the capacitor. The utility model has the advantages that the gasket is filled at the contact part of the top cover and the shell, the gasket is extruded by the top cover and the shell together to realize primary sealing, meanwhile, a plurality of sealing sheets are etched on the bottom surface of the top cover, the top surface of the gasket is pressed by a plurality of sealing sheets to realize multiple sealing, and even if external dust enters a gap, the dust can only enter the V groove, so that the influence of pollutants on an internal plate body and a capacitor area is avoided, and the device is suitable for industrial vibration scenes with high dust.

Inventors

  • Ran Xumao

Assignees

  • 无锡芸莅半导体科技有限公司

Dates

Publication Date
20260508
Application Date
20250627

Claims (7)

  1. 1. The acceleration sensor is characterized by comprising a shell (1), a top cover (3) and connecting pieces (4), wherein the top of the shell (1) is fixedly connected with the top cover (3), the four corners of the top cover (3) are inserted with the connecting pieces (4), and the connecting pieces (4) are in threaded connection with the four corners of the top surface of the shell (1); The inner side of the shell (1) is fixedly connected with a plate body (5), a capacitor (6) is arranged on the top surface of the plate body (5), a mass block (7) is elastically connected inside the capacitor (6), and a polar plate part (8) is fixedly connected inside the capacitor (6); the two sides of the mass block (7) are provided with extension parts, and the distance between the polar plate part (8) and the extension parts can be changed; The output end of the capacitor (6) is connected with the MEMS chip (9), and the output end of the MEMS chip (9) is connected with an output line (10); a cushion layer (11) is filled between the contact surfaces of the top cover (3) and the shell (1), a plurality of circles of V grooves (12) are formed in the bottom surface of the top cover (3), sealing sheets (13) are fixedly connected to the bottom openings of the V grooves (12), and the sealing sheets (13) are pressed on the cushion layer (11).
  2. 2. The acceleration sensor of claim 1, wherein the housing (1) and the top cover (3) are made of aluminum, and the connecting piece (4) is specifically an inner hexagon screw.
  3. 3. An acceleration sensor according to claim 2, characterized in, that the mass (7) is comb-shaped as a whole, both ends of the mass (7) being elastic.
  4. 4. An acceleration sensor according to claim 3, characterized in, that the mass (7) is movable left and right on a predetermined axis of the top surface of the capacitor (6).
  5. 5. An acceleration sensor according to claim 4, characterized in, that the output line (10) passes through the housing (1), and that the housing (1) is filled with rubber sealing rings at the output line (10).
  6. 6. The acceleration sensor of claim 5, wherein the cushion layer (11) is made of silica gel, the notch of the V-shaped groove (12) faces outwards, and the inclination angle of the V-shaped groove (12) is 45-55 degrees.
  7. 7. An acceleration sensor according to claim 6, characterized in, that the sealing plate (13) is made of rubber.

Description

Acceleration sensor Technical Field The utility model relates to the technical field of sensors, in particular to an acceleration sensor. Background Acceleration sensors are widely applied in the fields of industrial vibration monitoring, automobile safety systems and the like, and the current MEMS (micro electro mechanical system) accelerometer is mainstream due to small volume and low cost. However, in the high dust and high humidity industrial scenario, the prior art has significant drawbacks: The sealing reliability is insufficient, a traditional sealing structure is easy to generate a micro gap under long-term vibration, metal dust with the particle size of more than 5 mu m is allowed to invade, the sealing mode of the pouring sealant can prevent dust, but the curing stress influences the displacement precision (the error reaches +/-0.5 g) of a mass block, the sealing structure cannot be maintained after failure, and the dust is accumulated in a gap (usually 3-5 mu m) of a capacitor electrode to cause short circuit or signal drift. An acceleration sensor is therefore proposed to solve the above-mentioned problems. Disclosure of utility model The object of the present utility model is to solve at least one of the technical drawbacks. Therefore, an object of the present utility model is to provide an acceleration sensor, which solves the problems mentioned in the background art, and overcomes the shortcomings in the prior art. In order to achieve the above purpose, an embodiment of an aspect of the present utility model provides an acceleration sensor, including a housing, a top cover, and a connecting piece, where an indication arrow is carved on a side surface of the housing, the top of the housing is fixedly connected with the top cover, four corners of the top cover are inserted with the connecting piece, and the connecting piece is in threaded connection with four corners of a top surface of the housing; The inner side of the shell is fixedly connected with a plate body, a capacitor is mounted on the top surface of the plate body, a mass block is elastically connected in the capacitor, and a polar plate part is fixedly connected in the capacitor; the two sides of the mass block are provided with extension parts, and the distance between the polar plate part and the extension parts can be changed; The output end of the capacitor is connected with the MEMS chip, and the output end of the MEMS chip is fixedly connected with an output line; A cushion layer is filled between the contact surfaces of the top cover and the shell, a plurality of circles of V grooves are formed in the bottom surface of the top cover, sealing sheets are fixedly connected to the bottom openings of the V grooves, and the sealing sheets are pressed on the cushion layer. By any of the above schemes, preferably, the material of the housing and the top cover is aluminum, and the connecting piece is specifically an inner hexagon screw. By adopting the technical scheme, the acceleration sensor is divided into two parts, namely a machine body part, and the machine body part consists of a shell, a top cover, a connecting piece, a cushion layer and a sealing piece. The working part consists of a plate body, a capacitor, a mass block, a polar plate part, an MEMS chip and an output line structure. The working principle is that the mass is usually made of silicon material, and is used as an inertia sensing element to generate displacement under the action of acceleration. Elastic beams are arranged at two ends of the mass block and are used for supporting the mass block and providing restoring force to limit the displacement range. The mass block is provided with a plurality of extending parts which are movable electrodes, the polar plate parts are stationary electrodes connected with the substrate, when the sensor is subjected to acceleration, the mass block is displaced due to inertia, so that the distance between the movable electrodes and the polar plate parts is changed, the displacement changes the electrode distance d, the capacitance C-1/d converts the capacitance change into a voltage signal, and then the signal is output through an output line, thereby realizing the induction of the acceleration. In any of the above embodiments, it is preferable that the mass block is comb-shaped as a whole, and both ends of the mass block are elastic. It is preferred from any of the above aspects that the mass is movable left and right on a predetermined axis of the top surface of the capacitor. The top cover structure is improved, a gasket is filled at the contact position of the top cover and the shell, the gasket is extruded together with the shell to realize preliminary sealing, meanwhile, a plurality of sealing sheets are pressed on the top surface of the gasket to realize multiple sealing at the bottom of the V groove, even if external dust enters a gap, the external dust can only enter the V groove, the internal plate body and the capacito