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CN-224216728-U - Test equipment of chip

CN224216728UCN 224216728 UCN224216728 UCN 224216728UCN-224216728-U

Abstract

The utility model provides test equipment of a chip, and relates to the technical field of chip test. Each conveying mechanism comprises an annular linear motor and a plurality of testing jigs arranged on the annular linear motor, and each testing jig moves among a feeding station, a testing station and a discharging station in a controlled manner. The functional mechanism comprises a testing device which is arranged corresponding to the testing station and is used for carrying out functional testing on the tested chip when the testing jig moves to the testing station. According to the technical scheme, the annular linear motor is adopted to drive the plurality of test jigs to move, each test jig is independent, not only can synchronously move, but also can independently move, and compared with the mode that all the test jigs of the turntable can only synchronously move, the annular linear motor is more flexible. In addition, the annular linear motor is provided with a linear section, the linear section is more beneficial to arranging the test stations, and the annular linear motor can be better expanded and has better expansibility.

Inventors

  • Ren Zhun

Assignees

  • 苏州联讯仪器股份有限公司

Dates

Publication Date
20260508
Application Date
20250331

Claims (10)

  1. 1. A test apparatus for a chip, comprising: the feeding mechanism is used for feeding the chip to be tested; The device comprises at least one conveying mechanism, wherein each conveying mechanism comprises an annular linear motor and a plurality of testing jigs mounted on the annular linear motor, the annular linear motor is provided with a feeding station, at least one discharging station and at least one testing station, each testing jig is independently controlled to move among the feeding station, the testing station and the discharging station, and the testing jigs are arranged to receive the tested chips at the feeding station; At least one functional mechanism, each functional mechanism corresponds to one conveying mechanism, each functional mechanism comprises a testing device which is arranged corresponding to the testing station and is used for carrying out functional testing on the tested chip when the testing jig moves to the testing station; And the blanking mechanism is arranged on one side of the blanking station and is used for blanking the tested chip subjected to the functional test when the test fixture moves to the blanking station.
  2. 2. The test apparatus of claim 1, wherein the loading mechanism comprises: A first rotary table comprising a first rotary table and a plurality of first adsorbing members arranged at intervals along the peripheral side of the first rotary table, And the first rotating disc is controlled to rotate so as to drive target first adsorption elements in the plurality of first adsorption elements to move to target feeding components in the at least one group of feeding components, so that the target first adsorption elements absorb the tested chips on the target feeding components and carry the tested chips.
  3. 3. The test device of claim 2, wherein the number of the feeding assemblies is three, and each feeding assembly is used for feeding the tested chips in different packaging modes; the feeding assembly is used for feeding the tray carrying the tested chip; The group of feeding components are used for conveying the wafer with the tested chips for feeding; And the rest group of feeding assemblies are used for conveying a braid of the coiled chip feeder for feeding, and the braid is provided with a chip to be tested.
  4. 4. A test apparatus according to any one of claims 1-3, wherein the blanking mechanism comprises: a second turret including a second turntable and a plurality of second suction members arranged at intervals along a circumferential side of the second turntable; And the second turntable is controlled to rotate so as to drive target second adsorption elements in the second adsorption elements to move to the blanking station, so that the target second adsorption elements adsorb the tested chips in the test fixture, which are tested, and carry the tested chips to the target blanking elements in the at least one group of blanking elements.
  5. 5. The test apparatus of claim 4, wherein each of the transport mechanisms further comprises a cleaning station disposed between the test station and the blanking station, each of the functional mechanisms further comprising: And the cleaning device is arranged at the cleaning station and is used for cleaning the test jig.
  6. 6. A test apparatus according to any one of claims 1 to 3, wherein each of the transport mechanisms further comprises a deviation rectifying station downstream of the loading station, each of the functional mechanisms further comprising: and the deviation correcting device is arranged at the deviation correcting station and is used for adjusting the position of the tested chip in the test fixture.
  7. 7. A test apparatus according to any one of claims 1-3, wherein each of the conveyor mechanisms further comprises a clamp station disposed downstream of the loading station, the test fixture comprising a test seat comprising an upper cover plate and a lower cover plate, each of the functional mechanisms further comprising: And the mold clamping device is arranged at the mold clamping station and is used for clamping the upper cover plate and the lower cover plate of the test seat.
  8. 8. The test apparatus of claim 7, wherein each of the transport mechanisms further comprises a replacement station, each of the functional mechanisms further comprising: and the replacing device is arranged at the replacing station and is used for replacing the test seat.
  9. 9. The test device according to any one of claims 1-3, wherein at least one of the conveying mechanisms comprises a first conveying mechanism and a second conveying mechanism, and at least one of the functional mechanisms comprises a first functional mechanism and a second functional mechanism, wherein the first functional mechanism is arranged corresponding to the first conveying mechanism, and a test device of the first functional mechanism is used for performing high-temperature test on the chip to be tested; the test apparatus further includes: And the transferring mechanism is arranged between the first conveying mechanism and the second conveying mechanism and is used for controllably conveying the tested chips at the blanking station of the first conveying mechanism to the feeding station of the second conveying mechanism.
  10. 10. The test apparatus of claim 9, wherein the test apparatus comprises a plurality of test cells, The first conveying mechanism and the second conveying mechanism are arranged along a first direction, the feeding mechanism and the testing device of the first functional mechanism are respectively arranged on two sides of the first conveying mechanism along a second direction, the discharging mechanism and the testing device of the second functional mechanism are respectively arranged on two sides of the second conveying mechanism along the second direction, and the first direction is perpendicular to the second direction.

Description

Test equipment of chip Technical Field The utility model relates to the technical field of chip testing, in particular to testing equipment of a chip. Background The KGD (Known Good Die, known qualified chip) testing system is mainly applied to dynamic and static parameter testing of the power bare chip, and can screen the Die after the splitting, thereby improving the cumulative yield of Die packaging. The device mainly comprises a chip carrying device and a testing machine. At present, a turntable type KGD test system is adopted in the market, and a plurality of test jigs are driven to rotate through a turntable to test a tested chip. The main disadvantage of the turntable type KGD test system at present is that the expansibility of the test station is poor, and the test station cannot be increased according to the test requirement. Therefore, there is a need to design a KGD test system with better expansibility. Disclosure of utility model The utility model aims to provide a chip testing device, which solves the technical problem of poor expansibility of the chip testing device in the prior art. A further object of the utility model is to increase the feeding speed. In particular, the present utility model provides a test apparatus for a chip, comprising: the feeding mechanism is used for feeding the chip to be tested; The device comprises at least one conveying mechanism, wherein each conveying mechanism comprises an annular linear motor and a plurality of testing jigs mounted on the annular linear motor, the annular linear motor is provided with a feeding station, at least one discharging station and at least one testing station, each testing jig is independently controlled to move among the feeding station, the testing station and the discharging station, and the testing jigs are arranged to receive the tested chips at the feeding station; At least one functional mechanism, each functional mechanism corresponds to one conveying mechanism, each functional mechanism comprises a testing device which is arranged corresponding to the testing station and is used for carrying out functional testing on the tested chip when the testing jig moves to the testing station; And the blanking mechanism is arranged on one side of the blanking station and is used for blanking the tested chip subjected to the functional test when the test fixture moves to the blanking station. Optionally, the feeding mechanism includes: A first rotary table comprising a first rotary table and a plurality of first adsorbing members arranged at intervals along the peripheral side of the first rotary table, And the first rotating disc is controlled to rotate so as to drive target first adsorption elements in the plurality of first adsorption elements to move to target feeding components in the at least one group of feeding components, so that the target first adsorption elements absorb the tested chips on the target feeding components and carry the tested chips. Optionally, the number of the feeding components is three, and each group of the feeding components is used for feeding the tested chips in different packaging modes respectively; the feeding assembly is used for feeding the tray carrying the tested chip; The group of feeding components are used for conveying the wafer with the tested chips for feeding; And the rest group of feeding assemblies are used for conveying a braid of the coiled chip feeder for feeding, and the braid is provided with a chip to be tested. Optionally, the blanking mechanism includes: a second turret including a second turntable and a plurality of second suction members arranged at intervals along a circumferential side of the second turntable; And the second turntable is controlled to rotate so as to drive target second adsorption elements in the second adsorption elements to move to the blanking station, so that the target second adsorption elements adsorb the tested chips in the test fixture, which are tested, and carry the tested chips to the target blanking elements in the at least one group of blanking elements. Optionally, each conveying mechanism further includes a cleaning station, the cleaning station is disposed between the testing station and the blanking station, and each functional mechanism further includes: And the cleaning device is arranged at the cleaning station and is used for cleaning the test jig. Optionally, each conveying mechanism further includes a deviation rectifying station, the deviation rectifying station is located at a downstream of the feeding station, and each functional mechanism further includes: and the deviation correcting device is arranged at the deviation correcting station and is used for adjusting the position of the tested chip in the test fixture. Optionally, each conveying mechanism further includes a mold closing station, the mold closing station is disposed at a downstream of the feeding station, the test fixture includes a test seat, the test seat includes an