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CN-224216827-U - Pressure-adjustable test module

CN224216827UCN 224216827 UCN224216827 UCN 224216827UCN-224216827-U

Abstract

The application relates to the field of chip testing, in particular to a pressure-adjustable testing module, which comprises a testing seat, a plurality of placing tables, a testing component, a driving device, a controller, a pressure proportional valve and a pressure adjusting cylinder, wherein the placing tables are arranged on the testing seat and used for loading chips, the testing component is arranged on the testing seat and used for detecting the chips, the driving device is used for driving the testing component to move up and down, the pressure proportional valve is electrically connected with the controller, the pressure adjusting cylinder is electrically connected with the pressure proportional valve, and the piston end of the pressure adjusting cylinder is connected with the testing component. The application has the effects of adjusting the test pressure according to the pressure required by chip detection and improving the practicability and adaptability of the test module.

Inventors

  • LIU WEI
  • ZHU HAOFEI
  • DENG JIN

Assignees

  • 苏州乾鸣半导体设备有限公司

Dates

Publication Date
20260508
Application Date
20250516

Claims (8)

  1. 1. The pressure-adjustable test module comprises a test seat (1), a plurality of placing tables (2) which are arranged on the test seat (1) and used for loading chips, a test assembly (3) which is arranged on the test seat (1) and used for detecting the chips, and a driving device (4) which is used for driving the test assembly (3) to move up and down, and is characterized by further comprising a controller, a pressure proportional valve which is electrically connected with the controller, and a pressure adjusting cylinder (5) which is electrically connected with the pressure proportional valve, wherein the piston end of the pressure adjusting cylinder (5) is connected with the test assembly (3).
  2. 2. The pressure-adjustable test module according to claim 1, wherein the test assembly (3) comprises a heating block (31) arranged at the piston end of the pressure-adjustable cylinder (5) and a plurality of test pressure heads (32) arranged at the bottom of the heating block (31), and a positioning table (6) for positioning the pressure-adjustable cylinder (5) is arranged on the test seat (1).
  3. 3. The pressure-adjustable test module as set forth in claim 2, wherein the pressure-adjusting cylinders (5) are provided in a plurality of groups, and the plurality of pressure-adjusting cylinders (5) are in one-to-one correspondence with the plurality of test pressure heads (32).
  4. 4. The pressure-adjustable test module as set forth in claim 1, wherein the driving device (4) comprises a moving component (41) disposed on the test seat (1) and used for driving the test component (3) to move horizontally and a pressing component (42) disposed on the moving component (41) and used for driving the test component (3) to move up and down.
  5. 5. A pressure adjustable test module according to claim 4, wherein the moving assembly (41) comprises a moving cylinder (411) provided on the test seat (1), a control rod (412) provided at a piston end of the moving cylinder (411), and a moving seat (413) provided on the test seat (1) above the placing table (2).
  6. 6. The pressure-adjustable test module as set forth in claim 5, wherein the test seat (1) is provided with support blocks (7) at two ends of the movable seat (413), the support blocks (7) are provided with first slide rails (8) extending along the driving direction of the piston end of the movable cylinder (411), and the movable seat (413) is provided with first slide blocks (9) located on the first slide rails (8).
  7. 7. The pressure-adjustable testing module as set forth in claim 5, wherein the pressing component (42) comprises a pushing cylinder (421) arranged on the moving seat (413), a control seat (422) arranged at a piston end of the pushing cylinder (421), connecting rods (423) arranged at two ends of the control seat (422) and used for positioning the testing component (3), and a control block (424) arranged on the testing component (3), the moving seat (413) is provided with a positioning seat (10) used for positioning the connecting rods (423), the connecting rods (423) are provided with sliding rails II (11) along a driving direction of the pushing cylinder (421), and the positioning seat (10) is provided with sliding blocks II (12) positioned on the sliding rails II (11).
  8. 8. The pressure-adjustable test module as set forth in claim 7, wherein the movable seat (413) is provided with a fixed block (13), the fixed block (13) is provided with a sliding rail III (14) along the height direction, the test assembly (3) is provided with a sliding block III (15) positioned on the sliding rail III (14), and the side wall of the connecting rod (423) facing the test assembly (3) is provided with a control groove (16) for guiding the control block (424) to move downwards.

Description

Pressure-adjustable test module Technical Field The application relates to the field of chip testing, in particular to a pressure-adjustable testing module. Background The chip involves a plurality of detection steps in the course of working, and current test module includes test assembly and is used for driving test assembly and reciprocates the cylinder, and the cylinder drives test assembly and detects chip performance. But current test module is in the testing process, can't carry out real-time adjustment according to the test pressure of different chips, needs the staff to place different chips and detects in the different test module, and detection cost is higher, needs the staff to constantly change the detection module simultaneously, and repeated dismantlement operation is more. Disclosure of utility model In order to facilitate the improvement of the practicability of the test module and the test efficiency, and facilitate the test operation of staff, the application provides the pressure-adjustable test module. The application provides a pressure-adjustable test module, which adopts the following technical scheme: The utility model provides a pressure adjustable test module, includes the test seat, sets up on the test seat and be used for loading a plurality of places of chip, sets up on the test seat and be used for detecting the test module of chip and be used for driving the drive arrangement that the test module carried out reciprocating, still includes the controller, the pressure proportional valve of being connected with the controller electricity and the pressure adjustment cylinder of being connected with the pressure proportional valve electricity, the piston end and the test module of pressure adjustment cylinder are connected. Through adopting above-mentioned technical scheme, the test seat is used for installing testboard, test assembly, drive assembly and pressure regulation cylinder, improves the stability of each part, and the staff of being convenient for installs test module on workstation or equipment, and test assembly is used for detecting the chip, and drive arrangement is used for controlling test assembly and tests the chip, and the controller is used for controlling pressure proportional valve, and pressure proportional valve is used for confirming pressure of pressure regulation cylinder, and the staff of being convenient for adjusts pressure proportional valve and applys the pressure on test assembly as required, and then the pressure of control test assembly applys on the chip. Preferably, the test assembly comprises a heating block arranged at the piston end of the pressure regulating cylinder and a plurality of test pressure heads arranged at the bottom of the heating block, and a positioning table for positioning the pressure regulating cylinder is arranged on the test seat. Through adopting above-mentioned technical scheme, the locating bench improves the stability of pressure regulating cylinder on the test seat, and test pressure head tests the chip, and the heating block provides test temperature for the chip. Preferably, the pressure regulating air cylinders are provided with a plurality of groups, and the pressure regulating air cylinders are in one-to-one correspondence with the test pressure heads. Through adopting above-mentioned technical scheme, pressure adjusting cylinder and test pressure head position one-to-one, improve the control effect of pressure adjusting cylinder to the test pressure head, guarantee the test pressure equilibrium between a plurality of test pressure heads simultaneously. Preferably, the driving device comprises a moving component which is arranged on the test seat and used for driving the test component to horizontally move and a pressing component which is arranged on the moving component and used for driving the test component to vertically move. Through adopting above-mentioned technical scheme, remove the subassembly and be used for driving test assembly horizontal migration, make things convenient for test assembly to dodge the platform of placing the chip, push down the subassembly and be used for driving test assembly contact chip, improve test module's practicality. Preferably, the moving assembly comprises a moving cylinder arranged on the test seat, a control rod arranged at the piston end of the moving cylinder and a moving seat arranged on the test seat and positioned above the placing table. Through adopting above-mentioned technical scheme, remove the cylinder and be used for driving the control lever and carry out reciprocating motion, the control lever removes and drives and remove the seat and carry out reciprocating motion, removes the cylinder and drives and remove the seat and remove to place the platform top or keep away from and place the platform. Preferably, the test seat is provided with support blocks positioned at two ends of the movable seat, the support blocks are arranged on the first slide rail alon