CN-224217462-U - Secondary ion mass spectrum sample rack

CN224217462UCN 224217462 UCN224217462 UCN 224217462UCN-224217462-U

Abstract

The utility model discloses a secondary ion mass spectrum sample holder which comprises a base and a back plate, wherein the back plate is positioned in the base, the back plate is detachably connected with the base through bolts on the side face of the base, the upper surface of the base is fixedly connected with a panel, a spring is arranged on the back plate, and the spring is used for jacking up and fixing a sample on the bottom face of the panel. The method is suitable for loading the secondary ion mass spectrum sample with small size, the size of the sample is not required to be enlarged through bonding, the test error caused by the bonding process is reduced, the pretreatment and loading time of the sample are saved, and the equipment pollution caused by organic glue in the bonding process is prevented.

Inventors

CHEN XUE
HOU XIAOGANG
REN JIE
WU JIE
JIA MENGHONG

Assignees

甬江实验室
甬江实验室微谱(浙江)技术服务有限公司
上海微谱检测科技集团股份有限公司

Dates

Publication Date: 20260508
Application Date: 20250604

Claims (8)

1. The secondary ion mass spectrum sample rack is characterized by comprising a base and a back plate, wherein the back plate is positioned in the base, the back plate is detachably connected with the base through bolts on the side face of the base, a panel is fixedly connected to the upper surface of the base, a spring is arranged on the back plate and used for jacking up samples and fixing the samples on the bottom face of the panel, sample windows containing different shapes and sizes are arranged on the panel and used for observing and testing the samples with different sizes, a plurality of fixing positions are arranged on the back plate, and the fixing positions correspond to the sample windows one by one.
2. The secondary ion mass spectrometry sample holder of claim 1, wherein the sample window is one or more of circular, rectangular, triangular, and polygonal in shape.
3. The secondary ion mass spectrometry sample holder of claim 1, wherein the spring is fixedly connected to the stationary site.
4. The secondary ion mass spectrometry sample holder of claim 1, wherein the spring is removably coupled to the stationary position.
5. A secondary ion mass spectrometry sample holder according to any one of claims 1 to 4, wherein the faceplate is provided with electron gun alignment holes for alignment of instrument electron gun components.
6. The secondary ion mass spectrometry sample holder of claim 1, wherein a sample introduction guide rail is provided on a side wall of the base, the guide rail being matched in position with a storage chamber and an analysis chamber of a secondary ion mass spectrometry instrument used.
7. The secondary ion mass spectrometry sample holder according to claim 1, wherein one end of the base is provided with a sample introduction connecting member for connecting with a secondary ion mass spectrometry device used to realize the in-out of the sample holder.
8. The secondary ion mass spectrometry sample holder of claim 7, wherein the sample introduction connection member is detachably connected to the base by bolts.

Description

Secondary ion mass spectrum sample rack Technical Field The utility model belongs to the technical field of secondary ion mass spectrometry, and particularly relates to a secondary ion mass spectrometry sample holder. Background Secondary ion mass spectrometry (SIMS, secondary Ion Mass Spectrometry) is a very sensitive surface analysis technique, mainly used for solid material trace element and component analysis. Under the high vacuum condition, the primary ion beam with certain energy after acceleration, purification and focusing bombards the sample surface, so that atoms or molecules on the sample surface obtain enough energy to be sputtered, and the sputtered particles contain various element and compound information on the sample surface. Wherein, a part of particles are ionized into secondary ions, and the secondary ions are analyzed by a mass analyzer, so that information such as element composition, isotope distribution, molecular structure and the like on the surface of the sample is obtained. The sample size used on a semiconductor chip, a laser or a photovoltaic energy device in the prior art is too small to be directly placed on a conventional secondary ion mass spectrum sample rack, the sample size needs to be enlarged through bonding, but when the bonded sample is loaded on the sample rack, the bonded sample is difficult to keep the same level with the surfaces of a standard sample, a blank sample and other samples tested in the same batch, so that test errors can be increased, in addition, the sample bonding process adds additional pretreatment time and detection period, and the organic glue used in the bonding process can cause equipment pollution. Disclosure of utility model The utility model aims to provide a secondary ion mass spectrum sample holder which solves the problem that a sample is too small in size and is not easy to fix in the prior art. The utility model provides a secondary ion mass spectrum sample holder which comprises a base and a back plate, wherein the back plate is positioned in the base, the back plate is detachably connected with the base through bolts on the side face of the base, the upper surface of the base is fixedly connected with a panel, and a spring is arranged on the back plate and used for jacking up and fixing a sample on the bottom face of the panel. Preferably, the panel includes sample windows of different shapes and sizes for viewing and testing samples of different sizes. Preferably, the shape of the sample window is one or more of a circle, a rectangle, a triangle and a polygon. Preferably, a plurality of fixing positions are arranged on the back plate, the springs are arranged on the fixing positions, and the fixing positions correspond to the sample windows one by one. Preferably, the spring is fixedly connected with the fixing position. Preferably, the spring is detachably connected to the fixed location. Preferably, the panel is provided with an electron gun debugging hole for debugging electron gun components of the instrument. Preferably, a sample introduction guide rail is arranged on the side wall of the base, and the guide rail is matched with the storage chamber and the analysis chamber of the used secondary ion mass spectrometer in position. Preferably, one end of the base is provided with a sample injection connecting part for being connected with the used secondary ion mass spectrum equipment to realize the in-out of the sample frame. Preferably, the sample injection connecting component is detachably connected with the base through bolts. The beneficial effects are that: 1. The utility model provides a secondary ion mass spectrum sample rack which is suitable for loading small-size secondary ion mass spectrum samples, the size of the samples is not required to be enlarged through bonding, the test error caused by the bonding process is reduced, the pretreatment and loading time of the samples are saved, and the equipment pollution caused by organic glue in the bonding process is prevented. 2. Can press the accurate jack-up of sample on the window through fixed position fixed spring, be convenient for fixed sample reduces the sample and gets into behind the instrument, owing to remove the sample slope that the test position leads to, even sample and spring fall into the risk of equipment. 3. Samples of different sizes and shapes can be tested through windows of different sizes and shapes. Drawings In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the utility model, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art. Fig. 1 is a schematic structural diagram of an embodiment 1 of a secondary ion ma