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CN-224218530-U - Silicon nitride ceramic heater

CN224218530UCN 224218530 UCN224218530 UCN 224218530UCN-224218530-U

Abstract

The utility model discloses a silicon nitride ceramic heater, which relates to the technical field of ceramic heating and comprises a ceramic laminated plate formed by laminating a plurality of ceramic layers, a heating circuit, a connecting circuit and a plurality of through holes, wherein the heating circuit is arranged between two adjacent ceramic layers and is in a folded shape, the connecting circuit is arranged between the adjacent heating circuit and the ceramic laminated plate, the through holes are uniformly distributed and penetrate through the heating circuit and the connecting circuit, the width of the connecting circuit is larger than that of the heating circuit, two ends of the connecting circuit extend to two sides of the ceramic laminated plate, and two ends of the heating circuit extend to two sides of the ceramic laminated plate. The heating circuit is arranged between the upper ceramic laminated plate and the lower ceramic laminated plate, and generates flowing current by applying voltage to the heating circuit to convert electric energy into heat energy, so that the heating circuit generates heat, and the heat is transmitted outwards through the upper ceramic laminated plate and the lower ceramic laminated plate, so that the surface of the ceramic laminated plate reaches a preset temperature.

Inventors

  • Tan Yaokai
  • SHANG YUNBO
  • ZHENG ZHIYANG

Assignees

  • 湖州瓷芯电子科技有限公司

Dates

Publication Date
20260508
Application Date
20250509

Claims (9)

  1. 1. The silicon nitride ceramic heater is characterized by comprising a ceramic laminated plate (1) formed by laminating a plurality of ceramic layers, heating circuits (2) arranged between two adjacent ceramic layers and provided with folding shapes, connecting circuits (3) arranged between the heating circuits (2) and the ceramic laminated plate, and a plurality of through holes (4) uniformly distributed and penetrating through the heating circuits (2) and the connecting circuits (3), wherein the width of the connecting circuits (3) is larger than that of the heating circuits (2), two ends of the connecting circuits (3) extend to two sides of the ceramic laminated plate (1), and two ends of the heating circuits (2) extend to two sides of the ceramic laminated plate (1).
  2. 2. A silicon nitride ceramic heater according to claim 1, wherein the ceramic layer has a rod-like or plate-like shape, and when the ceramic layer is rod-like, the ceramic layer is set to 50mm to 120mm in length, 3mm to 10mm in width and 2mm to 5mm in thickness.
  3. 3. A silicon nitride ceramic heater according to claim 1, wherein the ceramic laminate (1) comprises an upper ceramic laminate (11) and a lower ceramic laminate (12), the heat generating circuit (2) being arranged between the upper ceramic laminate (11) and the lower ceramic laminate (12).
  4. 4. A silicon nitride ceramic heater according to claim 3, wherein said heat generating circuit (2) comprises a heat generating portion (21) and a lead portion (22) as main heat generating regions, the circuit width of said lead portion (22) is larger than the circuit width of said heat generating portion (21), and further comprises a plurality of first through holes uniformly distributed on said lead portion (22), and the rear ends of said lead portion (22) extend to both sides of said ceramic laminated board (1).
  5. 5. A silicon nitride ceramic heater according to claim 4, wherein said heat generating portion (21) is in the shape of one of a folded structure, a ribbon structure or a spiral structure, a line width of said heat generating portion (21) is set to 100 μm to 300 μm, a line thickness of said heat generating portion (21) is set to 5 μm to 25 μm, a chamfer is required to be provided at a corner portion of a circuit, and said heat generating portion (21) is provided with a chamfer at a corner, and a chamfer radius is set to 100 μm to 200 μm.
  6. 6. A silicon nitride ceramic heater according to claim 4, wherein the line width of the lead portion (22) is 300 μm to 600 μm, the line thickness of the lead portion (22) is 5 μm to 25 μm, and the heat generating portion (21) is provided with a chamfer at a corner, and the chamfer radius is set to 100 μm to 200 μm.
  7. 7. The silicon nitride ceramic heater according to claim 4, wherein the connection circuit (3) is disposed between the heat generating circuit (2) and the upper ceramic laminated board (11), and further comprises a plurality of second through holes, the second through holes are all distributed on the connection circuit (3), and the positions and the sizes of the second through holes are in one-to-one correspondence with those of the first through holes.
  8. 8. A silicon nitride ceramic heater according to claim 7, wherein the connection circuit (3) comprises a lead circuit (31) and an electrode circuit (32), the lead circuit (31) is arranged between the heat generating circuit (2) and the electrode circuit (32), the lead circuit (31) overlaps with the lead portion (22) of the heat generating circuit (2) and has the same length, the rear end of the lead circuit (31) extends to both sides of the heater, and the lead circuit (31) serves as a lead portion responsible for delivering the current transmitted from the electrode circuit (32) to the heat generating portion (21) of the heat generating circuit (2).
  9. 9. A silicon nitride ceramic heater according to claim 8, wherein said lead circuit (31) has the same structure as said lead portion (22), said lead circuit (31) is covered on said lead portion (22), a line width of said lead circuit (31) is wider than said lead portion (22), and a chamfer is required to be provided at a corner portion of said lead circuit (31).

Description

Silicon nitride ceramic heater Technical Field The utility model relates to the technical field of ceramic heating, in particular to the technical field of silicon nitride ceramic heaters. Background The high temperature resistance and cold and heat resistance circulation characteristics of the silicon nitride heater make the silicon nitride heater become ideal choices of extreme environments and precise temperature control scenes, and particularly replace traditional heating elements in the fields of semiconductors, new energy sources, aerospace and the like, so that the reliability, energy efficiency and process precision of equipment are remarkably improved. In the future, as the preparation cost is reduced (such as optimization of the air pressure sintering process), the application range of the air pressure sintering process is further expanded to civil high-temperature equipment. The performance defect of the traditional electric heater in the multi-scene application is increasingly remarkable. The core problems of the prior art in different fields are as follows: 1. technical bottlenecks of industrial grade heaters, namely the problems of high-temperature oxidation failure, poor corrosion resistance and electromagnetic interference (EMI) of metal heating bodies (stainless steel and nichrome) are as follows: The high-temperature oxidation failure is that the surface oxide layer thickens under the working condition of 800 ℃ (annual loss rate is more than 30%), the thermal efficiency is attenuated by 20% -40%, the corrosion resistance is poor, the grain boundary corrosion cracking is caused by the acid/molten metal environment (service life is less than 2000 hours), and the electromagnetic interference (EMI) is that the high-frequency operation of a metal wire generates strong electromagnetic radiation (30 MHz frequency band noise is more than 60 dB) and a precise instrument (such as a semiconductor wafer temperature measurement system) is interfered. 2. The heating technology pain point of the consumer-grade electronic product mainly uses a metal/PTC ceramic wafer heater and a flexible film heater, and takes instant heating water fountain, intelligent heating seat and portable hand warmer as examples, the existing heater has the following defects: (1) The following problems exist for metal/PTC ceramic tile heaters: 1) The metal heating wire is in direct contact with liquid (water dispenser) and easy to leak electricity (insulation resistance is less than 10 8 omega) and does not meet IEC 60335-2-15 standard, and the PTC ceramic is delayed in overheat protection (5 seconds), so that the risk of scalding is caused by local overheat (surface temperature is more than 120 ℃). 2) The energy efficiency is low, the traditional heating wire has slow thermal response (the water dispenser takes more than 10 seconds to discharge hot water), the power consumption is high (the energy efficiency ratio is less than 85 percent), the PTC ceramic has low power density (less than 5W/cm 2), the heating seat needs to be stacked in multiple layers, and the thickness is more than 15mm (the comfort is affected). 3) The design limitation is that the metal heater cannot be bent and is difficult to be attached to the curved surface of the automobile seat (the heat loss is 30% due to the fact that the attaching gap is more than 2 mm), and the surface temperature is uneven (the temperature difference is +/-8 ℃), so that the discomfort of the user body feeling is caused. (2) The following problems exist for flexible thin film heaters (carbon fiber/conductive polymer): 1) Poor temperature resistance, long-term working temperature <150 ℃, polymer matrix decomposition (release of VOCs) at high temperature; 2) The service life is short, namely the change rate of the resistance after being bent 1000 times is more than 20 percent (failure is caused by repeated adjustment of the vehicle seat); 3) The electromagnetic radiation exceeds standard, and the electric field intensity is more than 30V/m (exceeding the standard limit value of GB/T17626.3) during high-frequency driving. It is a direction of effort for those skilled in the art to design ceramic heaters suitable for both industrial equipment and consumer electronics. Disclosure of utility model The utility model aims to solve the technical problems and provides a silicon nitride ceramic heater. The utility model adopts the following technical scheme for realizing the purposes: The utility model provides a silicon nitride ceramic heater which comprises a ceramic laminated plate formed by laminating a plurality of ceramic layers, a heating circuit which is arranged between two adjacent ceramic laminated plates and has a folded shape or other shapes, a connecting circuit which is arranged between the heating circuit and the ceramic laminated plate, and a plurality of through holes which are uniformly distributed and penetrate through the heating circuit and the connecting circuit. The wid