CN-224218537-U - Heating device suitable for large temperature range

Abstract

The utility model provides a heating device suitable for a large temperature range, which comprises an upper disc surface, a heat conducting disc, a transition heat conducting disc and an insulating layer which are sequentially arranged from top to bottom, wherein an annular groove is formed in the bottom of the upper disc surface, the heat conducting disc is embedded into the annular groove formed in the upper disc surface, a first cooling pipe and a heating wire sleeve are embedded into the heat conducting disc, the transition heat conducting disc and the insulating layer are of annular structures and form a channel at the center, a protective pipe is inserted into the channel, a corrugated pipe is arranged at the bottom of the insulating layer, the corrugated pipe is sleeved outside the protective pipe, a back pressure pipe is arranged in the protective pipe, the top end of the back pressure pipe is connected with the upper disc surface, a bias voltage is applied to the upper disc surface through the back pressure pipe, the insulating layer comprises an insulating inner ring and an insulating outer ring, a first sealing groove is formed in a contact surface of the transition heat conducting disc with the insulating inner ring, and a second cooling pipe is embedded into the transition heat conducting disc corresponding to the first sealing groove.

Inventors

• WANG KAIBING
• XIONG LEI

Assignees

• 上海悦匠实业有限公司

Dates

Publication Date

20260508

Application Date

20250710

Claims (10)

1. 1. The heating device suitable for the large temperature range is characterized by comprising an upper disc surface, a heat conducting disc, a transition heat conducting disc and an insulating layer which are sequentially arranged from top to bottom, wherein an annular groove is formed in the bottom of the upper disc surface, the heat conducting disc is embedded into the annular groove of the upper disc surface, a first cooling pipe and a heating wire sleeve are embedded into the heat conducting disc, the transition heat conducting disc and the insulating layer are of annular structures and form a channel at the center, a protecting pipe is inserted into the channel, a corrugated pipe is arranged at the bottom of the insulating layer, the corrugated pipe is sleeved outside the protecting pipe, a back pressure pipe is arranged in the protecting pipe, the top end of the back pressure pipe is connected with the upper disc surface, bias voltage is applied to the upper disc surface through the back pressure pipe, the insulating layer comprises an insulating inner ring and an insulating outer ring, a first sealing ring is arranged on a contact surface of the transition heat conducting disc with the insulating inner ring, and a second cooling pipe is embedded into the first sealing groove corresponding to the top surface of the first sealing ring.
2. 2. The heating device for large temperature range according to claim 1, wherein a heat insulation pad is arranged between the heat conducting disc and the transition heat conducting disc, and the heat insulation pad is made of glass fiber.
3. 3. The heating device for large temperature range according to claim 1, wherein the protection tube comprises an inner ceramic protection tube and an outer straight tube, the top end of the ceramic protection tube is attached to the inner wall of the insulating inner ring, the top end of the straight tube is connected with the inner wall of the top end of the corrugated tube, the bottom end of the ceramic protection tube is provided with a ceramic protection tube fixing ring, and the bottom end of the straight tube is provided with a tail ring which is connected with the ceramic protection tube fixing ring.
4. 4. The heating apparatus of claim 1, wherein the first cooling tube and the second cooling tube are each connected to a cooling manifold, the cooling manifold passing out through a protective tube.
5. 5. The heating device for a large temperature range according to claim 1, wherein an arc-shaped inner shield is arranged between the outer wall of the transition heat conducting disc and the outer wall of the upper disc surface, and an arc-shaped outer shield is arranged at the top edge of the corrugated tube and is arranged at the bottom of the upper disc surface extending from the outer part of the inner shield.
6. 6. The heating device for a large temperature range according to claim 1, wherein the heating wire sleeve comprises an inner heating wire and an outer sleeve, and the heating wire is inserted into the protective tube and then sleeved with an insulating sheath, and then is inserted out through the protective tube.
7. 7. The heating device for a large temperature range according to claim 1, further comprising a temperature sensor, wherein a probe of the temperature sensor is provided with a probe sheath, a cable of the temperature sensor is provided with a cable sheath, the cable of the temperature sensor is connected with a plug, and a mounting plate for fixing the probe of the temperature sensor is arranged at the center of the lower part of the upper plate surface.
8. 8. The heating device for a large temperature range according to claim 1, wherein a second seal groove is provided on a contact surface of a top end of the bellows and the insulating inner ring, and a second seal ring is provided in the second seal groove.
9. 9. The heating device of claim 1, wherein the inner and outer insulating rings are ceramic.
10. 10. A heating apparatus for a large temperature range according to claim 3, wherein the straight tube and the tail ring are both made of stainless steel.

Description

Heating device suitable for large temperature range Technical Field The utility model belongs to the technical field of semiconductor manufacturing equipment, and particularly relates to a heating device suitable for a large temperature range. Background With the diversification of the process requirements of the physical vapor deposition equipment, the temperature requirements of the wafer heating device are also more and more diversified. The prior heating disc can not meet the use requirement of a large temperature range of-15 ℃ to 550 ℃, condensed water phenomenon can occur in a use environment of-15 ℃, the sealing layer of the heating disc can be damaged when the heating temperature exceeds 350 ℃, in addition, the prior heating disc is generally divided into four types of low-temperature non-biased disc, low-temperature biased disc, high-temperature non-biased disc and high-temperature biased disc, the number of the prior heating disc is dozens in combination with the requirements of different disc surfaces and working conditions, the non-biased special heating disc can have abnormal phenomena such as current paths, short circuits or arc discharge when the non-biased disc is in a bias connection state, and the prior heating disc can not be compatible with the requirements of the non-biased disc. Accordingly, there is a need to provide a heating device suitable for a large temperature range to solve or at least partially solve the above-mentioned problems. Disclosure of utility model The utility model provides a heating device suitable for a large temperature range, which meets the use requirement of the large temperature range of-15 ℃ to 550 ℃. In order to achieve the above purpose, the present utility model provides the following technical solutions: The heating device suitable for the large temperature range comprises an upper disc surface, a heat conducting disc, a transition heat conducting disc and an insulating layer which are sequentially arranged from top to bottom, wherein an annular groove is formed in the bottom of the upper disc surface, the heat conducting disc is embedded into the annular groove of the upper disc surface, a first cooling pipe and a heating wire sleeve are embedded into the heat conducting disc, the transition heat conducting disc and the insulating layer are of annular structures and form a channel in the center, a protective tube is inserted into the channel, a corrugated tube is arranged at the bottom of the insulating layer, the corrugated tube is sleeved outside the protective tube, a back pressure tube is arranged in the protective tube, the top end of the back pressure tube is connected with the upper disc surface, bias voltage is applied to the upper disc surface through the back pressure tube, the insulating layer comprises an insulating inner ring and an insulating outer ring, a first sealing groove is formed in the contact surface of the transition heat conducting disc with the insulating inner ring, and a second cooling pipe is arranged on the top surface of the transition heat conducting disc corresponding to the first sealing groove in an embedded mode. Preferably, a heat insulation pad is arranged between the heat conduction plate and the transition heat conduction plate, and the heat insulation pad is made of glass fiber. Preferably, the protection tube comprises an inner ceramic protection tube and an outer straight tube, the top end of the ceramic protection tube is attached to the inner wall of the insulating inner ring, the top end of the straight tube is connected with the inner wall of the top end of the corrugated tube, the bottom end of the ceramic protection tube is provided with a ceramic protection tube fixing ring, and the bottom end of the straight tube is provided with a tail ring which is connected with the ceramic protection tube fixing ring. Preferably, the first cooling pipe and the second cooling pipe are both connected with a cooling main pipe, and the cooling main pipe penetrates out through the protection pipe. The corrugated pipe is characterized in that an arc-shaped inner shield is arranged between the outer wall of the transition heat conducting plate and the outer wall of the upper plate surface, an arc-shaped outer shield is arranged at the top edge of the corrugated pipe, and the outer shield is arranged at the bottom of the upper plate surface extending from the outer portion of the inner shield to the outer portion of the inner shield. Preferably, the heating wire sleeve comprises an internal heating wire and an external sleeve, wherein the heating wire penetrates into the protective tube and then is sleeved with an insulating sheath, and then penetrates out through the protective tube. Preferably, the temperature sensor is further provided with a detection head sheath, a cable of the temperature sensor is provided with a cable sheath, a cable of the temperature sensor is connected with a plug, and the center of the lower part