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CN-224218780-U - Self-limiting type coating carrier, coating device and film production system

CN224218780UCN 224218780 UCN224218780 UCN 224218780UCN-224218780-U

Abstract

The utility model relates to the field of film coating equipment, in particular to a self-limiting coating carrier, a coating device and a film production system, which comprise a substrate bearing platform; the upper surface of the substrate bearing platform is provided with a self-limiting groove, a waste liquid diversion groove is arranged in the self-limiting groove, a waste liquid diversion hole communicated with the waste liquid diversion groove is arranged in the substrate bearing platform, a vacuum adsorption cavity is formed in the substrate bearing platform and located below the self-limiting groove, a plurality of vacuum adsorption holes are arranged in the self-limiting groove and are respectively communicated with the vacuum adsorption cavity, and a vacuum suction hole communicated with the vacuum adsorption cavity is formed in the substrate bearing platform. The utility model can realize automatic positioning and quick placement of the substrate, improves the operation efficiency, avoids the influence on the coating quality caused by the retention of waste liquid on the surface of the substrate, ensures the substrate to be in a stable state in the coating process, improves the coating uniformity and consistency, and is suitable for large-area continuous preparation production.

Inventors

  • GUO YONGSHENG

Assignees

  • 索罗曼(常州)合金新材料有限公司
  • 广州众山新材料股份有限公司

Dates

Publication Date
20260508
Application Date
20250528

Claims (10)

  1. 1. A self-limiting coating carrier comprises a substrate carrying platform and is characterized in that, The upper surface of the substrate bearing platform is provided with a self-limiting groove, the length and the width of the self-limiting groove are larger than the corresponding size of the substrate to be coated, and the depth of the self-limiting groove is smaller than or equal to the thickness of the substrate to be coated; a waste liquid diversion trench is arranged in the self-limiting groove, and a waste liquid diversion hole communicated with the waste liquid diversion trench is arranged in the substrate bearing platform; The substrate bearing platform is internally provided with a vacuum adsorption cavity positioned below the self-limiting groove, a plurality of vacuum adsorption holes are formed in the self-limiting groove and are respectively communicated with the vacuum adsorption cavity, and the substrate bearing platform is provided with a vacuum pumping hole communicated with the vacuum adsorption cavity.
  2. 2. The self-limiting coating carrier of claim 1, wherein the number of the waste liquid diversion grooves is two, the waste liquid diversion grooves are symmetrically distributed on two opposite sides of the self-limiting groove along the long axis direction of the substrate, and the number of the waste liquid diversion holes is two and is respectively communicated with the two waste liquid diversion grooves in a one-to-one correspondence manner.
  3. 3. The self-limiting coating carrier of claim 1, wherein the width of the waste liquid diversion trench is 1-3mm, the depth is 0.5-1.5mm, the bottom of the trench is inclined downwards at 2-6 degrees, and the waste liquid diversion hole is inclined downwards at 10-20 degrees.
  4. 4. The self-limiting coating stage according to claim 1, wherein the self-limiting groove has an edge chamfer design with a chamfer radius of 0.2-0.5mm, the difference between the self-limiting groove and the length of the substrate to be coated is 0.5-1mm, and the difference between the self-limiting groove and the width of the substrate to be coated is 0.5-1mm.
  5. 5. The self-limiting coating station of claim 1, further comprising four electromagnetic posts disposed on the substrate support platform at four corners of the self-limiting recess, respectively, the four electromagnetic posts configured to be controlled by an electromagnetic system to switch between an elevated state or a lowered state, wherein when the four electromagnetic posts are in the lowered state, top surfaces of the four electromagnetic posts are flush with a bottom surface of the self-limiting recess, and wherein when the four electromagnetic posts are in the elevated state, the four electromagnetic posts eject a substrate to be coated from the self-limiting recess.
  6. 6. The self-limiting coating stage of claim 1, further comprising a heating module disposed below the vacuum adsorption chamber or at the bottom of the coating stage, wherein the heating module is configured to heat by thermal conduction, thermal radiation, or microwave heating.
  7. 7. The coating device comprises a counterweight base and is characterized by further comprising: The self-limiting coating station of any one of claims 1-6 mounted on the counterweight base; and the coating mechanism is arranged on the counterweight base and is positioned above the substrate bearing platform.
  8. 8. The coating device according to claim 7, wherein the coating mechanism comprises a three-axis displacement device and a coating head, and the three-axis displacement device is used for realizing the movement of the coating head in the up-down direction, the front-back direction or the left-right direction by a manual or digital control mode.
  9. 9. The coating apparatus of claim 8, wherein the coating mechanism further comprises: the micro digital display meter head is arranged on the triaxial displacement device and is used for monitoring the distance between the coating head and the substrate in real time; the foreign matter detection protection system is arranged on the triaxial displacement device and is configured to be automatically stopped and locked when foreign matters are detected.
  10. 10. Film production system, characterized by comprising a coating device according to any of claims 7-9.

Description

Self-limiting type coating carrier, coating device and film production system Technical Field The utility model relates to the field of film coating equipment, in particular to a self-limiting coating carrier, a coating device and a film production system. Background The authentication efficiency of a single perovskite solar cell laboratory is up to 26%, the large-area efficiency of the industrial rice grade is over 16%, and the method has the characteristics of rapid development, low cost and high efficiency, so that the method has a wide commercial prospect. The perovskite solar cell mainly comprises a transparent conductive substrate, an electron transmission layer, a perovskite light absorption layer, a charge transmission layer, a back electrode and various functional modification layers. The perovskite light absorption layer is used as a key of photoelectric conversion, and the preparation method and the process are particularly important. At present, a large-area perovskite film is prepared by a plurality of devices, including a slit coating device, a blade coating device, an ink-jet printing device, a spraying device and the like, wherein the slit coating and the blade coating are the current mainstream preparation devices. However, in the existing equipment, the vertical alignment between the substrate and the coating head is generally performed manually, the whole process is more time-consuming, the length and width strokes of the large-area substrate are longer, once the front end alignment deviation is generated, the rear end deviation is larger after the subsequent coating is finished, and the coating yield is reduced. In the related art, the utility model patent with publication number CN221753710U discloses a battery pole piece liquid coating device, which belongs to the technical field of battery processing, and comprises a coating table, wherein a bracket is fixedly connected to the coating table, a spraying head is arranged in the bracket, a storage box for providing spraying liquid for the spraying head is fixedly arranged on the bracket, a groove is arranged in the coating table, a negative pressure machine is arranged on one side of the coating table, the working end of the negative pressure machine is connected with a negative pressure pipe, the negative pressure pipe is communicated with the groove, a positioning groove is arranged on the coating table, a negative pressure hole communicated with the groove is formed in the bottom of the positioning groove, a lifting plate is arranged in the groove in a vertical sliding manner, and a pushing rod corresponding to the negative pressure hole is fixedly connected to the lifting plate. According to the utility model, the negative pressure machine is arranged to fix the pole piece under the condition of not contacting the pole piece, and the locating groove is arranged to facilitate the taking and placing of the pole piece, so that the problems that the conventional battery pole piece liquid coating device is inconvenient for the fixing operation of the pole piece and the pole piece is easy to damage or pollute can be solved. However, the device has the following problems that 1, waste liquid generated in the coating process is easy to deposit in the groove and easily pollute the lower surfaces of the coating carrier and the coating substrate, and 2, the lifting plate drives the pushing rod to lift through the motor until the pushing rod is inserted into the negative pressure hole, and the pole piece is ejected out of the positioning groove, so that the device has the defects of complex structure and large occupied space. 3. The wet film cannot be annealed in situ without having a heating function. Disclosure of utility model The utility model aims to overcome the defects of the prior art, and provides a self-limiting coating carrying table, a coating device and a film production system, which realize automatic positioning and quick placement of a substrate and improve the operation efficiency through the design of a self-limiting groove, ensure that waste liquid can be rapidly discharged through the design of a waste liquid guide groove and a waste liquid guide hole, avoid the phenomenon that the waste liquid stays on the surface of the substrate to influence the coating quality, and ensure that the substrate is kept in a stable state in the coating process through a vacuum adsorption system, thereby improving the coating uniformity and consistency and being suitable for large-area continuous preparation production. The first aspect of the present utility model is to provide a self-limiting coating stage, comprising a substrate carrying stage; The upper surface of the substrate bearing platform is provided with a self-limiting groove, the length and the width of the self-limiting groove are larger than the corresponding size of the substrate to be coated, and the depth of the self-limiting groove is smaller than or equal to the thickness of