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CN-224218788-U - Magnetic attraction positioning crystal carrying plate

CN224218788UCN 224218788 UCN224218788 UCN 224218788UCN-224218788-U

Abstract

The utility model relates to the technical field of wafer production equipment, in particular to a magnetic attraction positioning wafer carrying plate. According to the utility model, the permanent magnets are arranged in the mounting holes in the circumferential direction of the crystal carrying plate, and the side surfaces of the permanent magnets are lower than the surface of the crystal carrying plate, so that the magnet alignment adsorption principle is effectively utilized. In the transportation process, the crystal carrying plates which are sequentially stacked can be firmly fixed through mutual adsorption of the permanent magnets. Compared with the dislocation problem which easily occurs when the traditional crystal carrying plates are transported, the dislocation friction between the crystal carrying plates is greatly avoided by the mode, the stability in the transportation process is obviously improved, the damage risk of the crystal carrying plates and wafers caused by the dislocation friction is effectively reduced, and the product quality and the transportation efficiency are ensured.

Inventors

  • XUAN ZHICHAO
  • WU BING
  • CAI CHEN

Assignees

  • 安徽晶赛科技股份有限公司

Dates

Publication Date
20260508
Application Date
20250430

Claims (10)

  1. 1. The utility model provides a crystal-carrying plate of location is inhaled to magnetism, its characterized in that, has seted up a plurality of mounting holes (11) on crystal-carrying plate (10) in proper order along its circumference, all installs permanent magnet (20) in each mounting hole (11), and the both sides face of each permanent magnet (20) all is less than crystal-carrying plate (10) face of this both sides face place side.
  2. 2. The magnetically positioned carrier plate according to claim 1, wherein each mounting hole (11) arranged circumferentially in sequence is located at the edge of the carrier plate (10), and two circles of mounting holes (11) are arranged at the edge of the carrier plate (10).
  3. 3. A magnetically positioned carrier according to claim 2, wherein each mounting hole (11) is a rectangular hole, and the edges of each mounting hole (11) and the carrier (10) where it is located are parallel to each other.
  4. 4. A magnetically positioned carrier according to any one of claims 1-3, characterized in that a plurality of rows and columns of mounting holes (11) are arranged in the carrier (10), the rows and columns of mounting holes (11) cooperating to divide the carrier (10) into a plurality of die mounting areas.
  5. 5. A magnetically positioned carrier plate according to claim 4, wherein the columns of mounting holes (11) are equally spaced.
  6. 6. The magnetically positioned carrier plate according to claim 5, wherein the permanent magnets (20) are fixedly mounted in the mounting holes (11) by means of gluing.
  7. 7. The magnetic positioning crystal-bearing plate according to claim 6, wherein the permanent magnet (20) and the mounting hole (11) are provided with sand grinding holes (21) in a concave manner on the surface where they are attached to each other.
  8. 8. The magnetically positioned carrier plate of claim 7, wherein the edges of the carrier plate (10) are rounded.
  9. 9. The magnetically positioned carrier of claim 8, wherein the carrier (10) is provided with an information code (30) for recording wafer processing information on the carrier (10).
  10. 10. The magnetically positioned carrier plate of claim 9, wherein the information code (30) is provided on the upper surface of the carrier plate (10) by spraying or imprinting.

Description

Magnetic attraction positioning crystal carrying plate Technical Field The utility model relates to the technical field of wafer production equipment, in particular to a magnetic attraction positioning wafer carrying plate. Background In the production process of the resonator, a plurality of wafers are generally installed in each space of the wafer carrying plate at one time, so that the wafers are processed in one operation, such as film plating, photoetching, etching and other processes, and the auxiliary time for clamping, positioning and the like during single wafer processing is reduced, thereby greatly improving the production efficiency and reducing the production cost. Currently, the wafer carrier used in the resonator production process is designed as a rectangular sheet structure. The design form greatly meets the transportation requirement, and can realize efficient and convenient circulation no matter in stacking, carrying or storage under different transportation environments. In order to avoid shaking and misplacement between the crystal-bearing plates during the transportation of the crystal-bearing plates, the crystal-bearing plates are placed in the plate grooves of the transportation box independently. However, after the crystal-bearing plate is transported to the corresponding station, the crystal-bearing plate needs to be sequentially taken out one by one, and then subsequent processing is carried out, so that the operation is complicated, and the processing efficiency is reduced. In order to solve the problem, a technician opens a mounting hole and a corresponding positioning protrusion on the surface of the crystal-carrying plate, and mutually positions the crystal-carrying plates which are stacked up and down in sequence through the plug-in fit between the mounting hole and the corresponding positioning protrusion. After the mounting holes and the positioning protrusions are adopted, the crystal-carrying plates can be taken out of the transport case in a stacked mode. However, some accidents may occur in some cases, that is, jolt occurs during transportation, so that some mounting holes and positioning protrusions are separated from each other, and further dislocation occurs, and even stacked carrier plates collapse. Therefore, the positioning structure between the current crystal-bearing plates needs to be further improved to reduce the occurrence of accidents. Disclosure of utility model In order to avoid and overcome the technical problems in the prior art, the utility model provides a magnetic positioning crystal carrying plate. According to the utility model, through the way that magnets are aligned and adsorbed, the sequentially stacked crystal carrying plates are fixed together, so that the situation of dislocation friction is effectively avoided, and the transportation stability is improved. In order to achieve the above purpose, the present utility model provides the following technical solutions: a plurality of mounting holes are sequentially formed in the crystal carrying plate along the circumferential direction of the crystal carrying plate in a magnetic attraction positioning mode, permanent magnets are arranged in all the mounting holes, and two side faces of each permanent magnet are lower than the crystal carrying plate face of the side where the two side faces are located. As a further scheme of the utility model, each mounting hole which is arranged in sequence in the circumferential direction is positioned at the edge of the crystal carrying plate, and two circles of mounting holes are arranged at the edge of the crystal carrying plate. As a still further proposal of the utility model, each mounting hole is a rectangular hole, and the edges of each mounting hole and the crystal carrying plate where the mounting hole is positioned are parallel to each other. As a still further aspect of the utility model, a plurality of rows and columns of mounting holes are disposed on the carrier plate, the rows and columns of mounting holes cooperating to divide the carrier plate into a plurality of die mounting areas. As a still further aspect of the utility model, the columns of mounting holes are equally spaced. As a still further proposal of the utility model, the permanent magnet is fixedly arranged in the mounting hole by means of gluing. As a still further proposal of the utility model, the permanent magnet and the mounting hole are provided with sand grinding holes in a concave way on the surface which is mutually attached. As a still further proposal of the utility model, the edges of the crystal carrying plate are rounded. As a still further proposal of the utility model, the wafer carrying plate is provided with an information code for recording the wafer processing information on the wafer carrying plate. As a still further proposal of the utility model, the information code is arranged on the upper surface of the crystal-carrying plate by spraying or imprinting. Com