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CN-224218797-U - Semiconductor track type rotary automatic cleaning carrier

CN224218797UCN 224218797 UCN224218797 UCN 224218797UCN-224218797-U

Abstract

The utility model discloses a semiconductor track type rotary automatic cleaning carrier which comprises a horizontal guide rail and a walking frame connected to the top of the horizontal guide rail in a sliding manner, wherein a walking motor is fixedly arranged on the front surface of the walking frame, an output shaft of the walking motor penetrates through and extends to the inside of the walking frame, a walking gear is fixedly connected to the output shaft of the walking motor, the walking gear is meshed with the top of the horizontal guide rail, a bearing frame is rotatably connected to the top of the walking frame, and a rotating motor is arranged in the walking frame. According to the utility model, through integrating components such as the travelling motor, the rotating motor, the miniature air pump and the electromagnet, automatic and efficient cleaning and material taking of the wafer are realized, the cooperative work of the miniature air pump and the electromagnet ensures the stable absorption and easy removal of the wafer, the risk of wafer damage is reduced, and the travelling motor and the rotating motor are matched for use, so that the wafer can rotate in all directions in the cleaning process, and the cleaning uniformity and the drying efficiency are improved.

Inventors

  • FAN QINGSONG
  • SUN ZHENG

Assignees

  • 玛塔化研科技(苏州)有限公司

Dates

Publication Date
20260508
Application Date
20250606

Claims (5)

  1. 1. The semiconductor track type rotary automatic cleaning carrier comprises a horizontal guide rail (1) and a traveling frame (2) which is slidably connected to the top of the horizontal guide rail, and is characterized in that a traveling motor (3) is fixedly arranged on the front surface of the traveling frame (2), an output shaft of the traveling motor (3) penetrates through and extends to the inside of the traveling frame (2), a traveling gear (4) is fixedly connected to the output shaft of the traveling motor (3), the traveling gear (4) is meshed with the top of the horizontal guide rail (1), a bearing frame (5) is rotatably connected to the top of the traveling frame (2), a rotating motor (6) is arranged in the traveling frame (2), a limiting seat (7) which is uniformly distributed is fixedly arranged in the bearing frame (5), the top of the limiting seat (7) penetrates through and extends to the top of the bearing frame (5), an adsorption hole (8) which is uniformly distributed is formed in the top of the limiting seat (7), a miniature air pump (9) which is fixedly arranged on the limiting seat (7), and an auxiliary assembly (10) which is internally communicated with the miniature air pump (7) is arranged; The auxiliary assembly (10) comprises a mounting groove (1001), the mounting groove (1001) is formed in the inner wall of the limiting seat (7), an electromagnet (1002) is fixedly mounted on the inner wall of the mounting groove (1001), a synchronizing ring (1003) is connected to the inner wall of the mounting groove (1001) in a sliding mode, a top of the synchronizing ring (1003) is fixedly connected with a push rod (1004), the push rod (1004) is located at the bottom of the adsorption hole (8), a magnetic block (1005) is fixedly mounted at the bottom of the synchronizing ring (1003), and the magnetic block (1005) is magnetically connected with the electromagnet (1002).
  2. 2. The semiconductor orbital type automatic cleaning carrier according to claim 1, wherein a limiting block (11) is fixedly connected to the side of the synchronizing ring (1003), and the limiting block (11) is slidably connected with the inner wall of the mounting groove (1001).
  3. 3. The semiconductor orbital type automatic cleaning carrier according to claim 1, wherein a soft pad (12) is fixedly connected to the top of the ejector rod (1004).
  4. 4. The semiconductor track type automatic rotary cleaning carrier according to claim 1, wherein the output shaft of the rotating motor (6) and the bearing frame (5) are fixedly provided with synchronous wheels (13), and the two synchronous wheels (13) are in transmission connection through a synchronous belt.
  5. 5. The semiconductor orbital type automatic cleaning carrier according to claim 1, wherein a limiting ring (14) is fixedly connected to the inner wall of the mounting groove (1001), and the limiting ring (14) is in contact with the bottom of the synchronizing ring (1003).

Description

Semiconductor track type rotary automatic cleaning carrier Technical Field The utility model relates to the technical field of semiconductor cleaning, in particular to a semiconductor track type rotary automatic cleaning carrier. Background Wafer cleaning is a critical element in the semiconductor manufacturing process. Conventional wafer cleaning methods have problems in feeding wafers into the cleaning equipment and in the post-cleaning reclaiming process. The past cleaning process often relies on comparatively simple carrier, lacks efficient automated design in the aspect of the fixed and transportation of wafer, to the spacing fixed of wafer, and is not convenient and fast enough, this probably leads to taking place the displacement at the transportation in the wafer, influences the cleaning performance and causes the wafer damage even to cause the wafer damage when the too nearly material of washing back wafer and carrier laminating, consequently this person provides a semiconductor track formula self-cleaning carrier that circles round, in order to solve the above-mentioned problem. Disclosure of utility model Aiming at the problems in the prior art, the utility model aims to provide a semiconductor track type rotary automatic cleaning carrier, so that a wafer can rotate in all directions in the cleaning process, and the uniform cleaning effect and the drying efficiency are improved. In order to achieve the above purpose, the present utility model adopts the following technical scheme; The utility model provides a semiconductor track formula self-cleaning carrier that circles round, includes horizontal guide rail and sliding connection at the walking frame of its top, the front fixed mounting of walking frame has the walking motor, the output shaft of walking motor runs through and extends to the inside of walking frame, fixedly connected with walking gear on the output shaft of walking motor, the walking gear meshes with the top of horizontal guide rail, the top of walking frame rotates and is connected with the carrier, the internally mounted of walking frame has the rotating electrical machines, the rotating electrical machines is connected with the carrier, the inside fixed mounting of carrier has evenly distributed spacing seat, the top of spacing seat runs through and extends to the top of carrier, evenly distributed's adsorption hole has been seted up at the top of spacing seat, fixed mounting has the miniature air pump rather than inside intercommunication on the spacing seat, the inside of spacing seat is provided with auxiliary assembly; The auxiliary assembly comprises a mounting groove, the mounting groove is formed in the inner wall of the limiting seat, an electromagnet is fixedly mounted on the inner wall of the mounting groove, a synchronizing ring is connected to the inner wall of the mounting groove in a sliding mode, a top of the synchronizing ring is fixedly connected with a push rod, the push rod is located the bottom of the adsorption hole, a magnetic block is fixedly mounted at the bottom of the synchronizing ring, and the magnetic block is magnetically connected with the electromagnet. As further description of the technical scheme, limit blocks are fixedly connected to the side of the synchronous ring and are in sliding connection with the inner wall of the mounting groove. As further description of the technical scheme, the top of the ejector rod is fixedly connected with a soft cushion. As a further description of the technical scheme, synchronous wheels are fixedly arranged on the output shaft of the rotating motor and the bearing frame, and the two synchronous wheels are in transmission connection through a synchronous belt. As further description of the technical scheme, a limiting ring is fixedly connected to the inner wall of the mounting groove, and the limiting ring is in contact with the bottom of the synchronizing ring. Compared with the prior art, the utility model has the advantages that: According to the utility model, through integrating components such as the travelling motor, the rotating motor, the miniature air pump and the electromagnet, the automatic and efficient cleaning and material taking of the wafer are realized, the cooperative work of the miniature air pump and the electromagnet ensures the stable absorption and easy removal of the wafer, the risk of wafer damage is reduced, and the travelling motor and the rotating motor are matched for use, so that the wafer can rotate in all directions in the cleaning process, and the cleaning uniformity and the drying efficiency are improved. Drawings FIG. 1 is a schematic perspective view of a carrier according to the present utility model; FIG. 2 is a schematic cross-sectional elevation view of the present utility model; FIG. 3 is a schematic cross-sectional view of a limiting seat according to the present utility model; Fig. 4 is an enlarged schematic view of the structure of fig. 3a according to the present