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CN-224220801-U - Device for removing trichlorosilane light boron light phosphorus

CN224220801UCN 224220801 UCN224220801 UCN 224220801UCN-224220801-U

Abstract

The utility model belongs to the technical field of light boron and light phosphorus removal, and particularly relates to a device for removing trichlorosilane light boron and light phosphorus, which comprises a treatment tank, wherein a tank cover is arranged at the top of the treatment tank through bolts, a cooling pipe is arranged in the treatment tank, an inlet and an outlet of the cooling pipe are arranged penetrating the treatment tank, a circulating pipe is arranged at the bottom of the treatment tank in a communicating manner, the tail end of the circulating pipe is abutted against the tank cover, a return port is arranged at the top of the tank cover and penetrates the tank cover, and the return port corresponds to the tail end of the circulating pipe. Through setting up a treatment tank, trichlorosilane can pass in the treatment tank, then cooled off by the cooling tube in the treatment tank, is carried the top of treatment tank through the circulating pipe by the immersible pump in the treatment tank again to in passing the adsorption column completely, thereby get rid of trichlorosilane light boron light phosphorus impurity with pertinence, not only get rid of efficiently, and reduced exhaust treatment capacity, practice thrift the cost, safety ring protects.

Inventors

  • ZHOU WENWU
  • LIU JINPENG
  • MA ZHENGLONG
  • LIANG GAN
  • YANG PENG
  • XU SIXIA

Assignees

  • 新疆晶诺新能源产业发展有限公司

Dates

Publication Date
20260512
Application Date
20250603

Claims (7)

  1. 1. The device for removing the trichlorosilane light boron light phosphorus comprises a treatment tank and is characterized in that a tank cover is mounted on the top of the treatment tank through bolts, a cooling pipe is arranged in the treatment tank, an inlet and an outlet of the cooling pipe are formed in the treatment tank in a penetrating mode, a circulating pipe is arranged at the bottom of the treatment tank in a communicating mode, the tail end of the circulating pipe is abutted against the tank cover, a return opening is formed in the top of the tank cover, the return opening is formed in the penetrating mode, the position of the return opening corresponds to the tail end of the circulating pipe, two fixing rods are fixedly connected to the inner wall of the treatment tank, a mounting seat is fixedly connected between the two fixing rods, an adsorption column is connected to the inner ring wall of the mounting seat in a sliding mode, and a baffle ring is fixedly connected to the outer side of the adsorption column and is in contact with the upper end of the mounting seat.
  2. 2. The apparatus for removing light boron and light phosphorus from trichlorosilane according to claim 1, wherein a drain pipe is communicated with the bottom of the treatment tank, and a liquid inlet pipe is communicated with the tank cover.
  3. 3. The device for removing light boron and light phosphorus of trichlorosilane according to claim 1, wherein a rubber ring is fixedly connected to the top of the tank cover, the position of the rubber ring corresponds to the position of the reflux port, and the rubber ring is clamped with the circulating pipe.
  4. 4. The apparatus for removing light boron and light phosphorus of trichlorosilane of claim 1, wherein a guide cover is fixedly connected to the top of the adsorption column, and the guide cover is funnel-shaped.
  5. 5. The device for removing light boron and light phosphorus of trichlorosilane of claim 1, wherein the bottom of the baffle ring is fixedly connected with a positioning block, the positioning block penetrates through the mounting seat and is in sliding connection with the mounting seat, the inner wall of the mounting seat is fixedly connected with a guide rod, the outer side of a rod body of the guide rod is sleeved with a bolt, the bolt is spliced with the positioning block, a spring is arranged in the bolt, one end of the spring is fixedly connected with the guide rod, and the other end of the spring is fixedly connected with the inner surface of the bolt.
  6. 6. The device for removing light boron and light phosphorus of trichlorosilane of claim 5, wherein the pin body of the bolt is fixedly connected with a deflector rod, and the deflector rod penetrates through the mounting seat and is in sliding connection with the mounting seat.
  7. 7. The apparatus for removing light boron and light phosphorus of claim 5, wherein a protective cover is fixedly connected to the upper edge of the mounting seat, and is made of rubber.

Description

Device for removing trichlorosilane light boron light phosphorus Technical Field The scheme belongs to the field of light boron and light phosphorus removal equipment, and particularly relates to a device for removing light boron and light phosphorus of trichlorosilane. Background In the production of polysilicon, trichlorosilane purification is of paramount importance, with light boron and light phosphorus impurities being particularly difficult to remove from trichlorosilane. Through retrieval, in the patent of the utility model with the publication number of CN210084964U, a device for rectifying and purifying trichlorosilane is disclosed, which comprises a boron removal absorber, a primary rectifying tower, a secondary rectifying tower, a phosphorus removal absorber and a tertiary rectifying tower which are sequentially connected in series, wherein the boron removal absorber is mainly used for removing boron impurities in raw material chlorosilane and removing part of phosphorus impurities and metal impurities, the primary rectifying tower is a partition tower, and dichlorosilane can be simultaneously cut off from the top of the tower. In the prior art, trichlorosilane light boron light phosphorus is discharged through the top of a rectifying tower and is discharged to an exhaust gas treatment device for hydrolysis treatment, so that chlorine consumption is increased, a large amount of water and lime milk are required to be consumed in the hydrolysis process, a large amount of exhaust gas, waste water and waste residues are generated, and environmental protection pressure is high. Disclosure of utility model The purpose of this scheme is to provide a device for getting rid of light boron light phosphorus of trichlorosilane to solve current light boron light phosphorus of trichlorosilane and get rid of the problem that inefficiency, environmental protection pressure are big. In order to achieve the above-mentioned purpose, this scheme provides a device for getting rid of light boron of trichlorosilane light phosphorus, including handling jar, the cover is installed through the bolt in the top of handling jar, the inside of handling jar is provided with the cooling tube, and the exit of cooling tube is for running through the setting of handling jar, the bottom intercommunication of handling jar is provided with the circulating pipe, the end of circulating pipe is contradicted with the cover, the reflow mouth has been seted up at the top of cover, and the reflow mouth is for running through the cover setting, the reflow mouth corresponds with the end position of circulating pipe, the inner wall fixedly connected with two dead levers of handling jar, two common fixedly connected with mount pad between the dead lever, the inner ring wall sliding connection of mount pad has the adsorption column, the outside fixedly connected with baffle ring of adsorption column, baffle ring and the upper end contact of mount pad. The principle of the scheme is that when the device is used, low-temperature medium flows through the cooling pipe, trichlorosilane can enter the treatment tank through the liquid inlet pipe, then the trichlorosilane is cooled at low temperature through the cooling pipe, the cooled trichlorosilane is conveyed to the upper part of the treatment tank through the circulating pipe and completely passes through the adsorption column, so that light boron and light phosphorus impurities of the trichlorosilane are removed in a targeted manner, in addition, after the tank cover is removed, the bolt is transversely pulled through the deflector rod, the bolt is separated from the positioning block, the limitation on the positioning block and the baffle ring can be removed, and then the adsorption column can be removed for replacement. The technical effect of the scheme is that the trichlorosilane can pass through the treatment tank, is cooled by the cooling pipe in the treatment tank, is conveyed to the upper part of the treatment tank again by the submersible pump in the treatment tank through the circulating pipe and completely passes through the adsorption column, so that the light boron and light phosphorus impurities of the trichlorosilane are removed in a targeted manner, the removal efficiency is high, the waste gas treatment capacity is reduced, the cost is saved, and the method is safe and environment-friendly. Through setting up dead lever, mount pad at the inner wall of handling jar, then set up the fender ring that has the locating piece in the outside of adsorption column, the adsorption column erects in mount pad department through the fender ring to install the location through the locating piece, simultaneously, utilize in the mount pad to carry out the locking by the bolt that the spring stretches out and draws back and fix, not only install and dismantle conveniently, stability after the installation is also comparatively stable simultaneously. Further, the bottom of the treatment tank is co