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CN-224220934-U - Automatic pressure drop preventing and cleaning device for automatic filter switching

CN224220934UCN 224220934 UCN224220934 UCN 224220934UCN-224220934-U

Abstract

The utility model discloses an automatic filter switching pressure drop preventing automatic cleaning device which comprises a first conveying pipeline and a second conveying pipeline, wherein one ends of the first conveying pipeline and the second conveying pipeline are communicated with a supply source, the other ends of the first conveying pipeline and the second conveying pipeline are communicated with a supply pipeline, a first filter is arranged on the first conveying pipeline, and a second filter is arranged on the second conveying pipeline. The filter has the beneficial effects that after the filter element of the filter is replaced, the filter element is convenient to replace manually, and the filter element is tidier when being replaced.

Inventors

  • TAN LINGHUA

Assignees

  • 浙江东开半导体科技有限公司

Dates

Publication Date
20260512
Application Date
20250520

Claims (10)

  1. 1. An automatic filter switching and pressure drop preventing automatic cleaning device is characterized in that, Comprises a first conveying pipeline (1) and a second conveying pipeline (2); One end of the first conveying pipeline (1) and one end of the second conveying pipeline (2) are communicated with a supply source (11), and the other end of the first conveying pipeline (1) and the other end of the second conveying pipeline (2) are communicated with a supply pipeline (3); A first filter (4) is arranged on the first conveying pipeline (1), and a second filter (20) is arranged on the second conveying pipeline (2); The input ends of the first conveying pipeline (1) and the second conveying pipeline (2) are respectively communicated with a nitrogen pipeline (5) and a pure water pipeline (6), and the output ends of the first conveying pipeline (1) and the second conveying pipeline (2) are respectively communicated with a waste liquid pipeline (7); One end of the first conveying pipeline (1) and one end of the second conveying pipeline (2) are communicated with each other and are provided with a first pressure sensor (37), and the other ends of the first conveying pipeline (1) and the second conveying pipeline (2) are communicated with each other and are provided with a second pressure sensor (10).
  2. 2. The automatic filter switching pressure drop preventing automatic cleaning device according to claim 1, wherein a first pneumatic valve (8) and a second pneumatic valve (9) are sequentially arranged on the first conveying pipeline (1) from the direction of the supply source (11) to the direction of the supply pipeline (3).
  3. 3. The automatic filter switching pressure drop preventing automatic cleaning device according to claim 2, wherein a third pneumatic valve (12) and a fourth pneumatic valve (13) are sequentially arranged on the second conveying pipeline (2) from the direction of the supply source (11) to the direction of the supply pipeline (3).
  4. 4. A filter automatic switching pressure drop preventing automatic cleaning device according to claim 3, characterized in that a fifth pneumatic valve (14) arranged in parallel with the first pneumatic valve (8) is arranged on the first conveying pipeline (1); The second conveying pipeline (2) is provided with a sixth pneumatic valve (15) which is connected with the third pneumatic valve (12) in parallel.
  5. 5. The automatic filter switching pressure drop preventing automatic cleaning device according to claim 1, wherein the nitrogen gas pipeline (5) comprises a first nitrogen gas input pipe (16) and a second nitrogen gas input pipe (17) which are communicated with external nitrogen gas; the first nitrogen input pipe (16) is communicated with the input end of the first filter (4) through a first multipurpose pipeline (18); the second nitrogen input pipe (17) is communicated with the input end of the second filter (20) through a second multipurpose pipeline (19).
  6. 6. The automatic filter switching pressure drop preventing automatic cleaning device according to claim 5, wherein a seventh pneumatic valve (21) is provided on the first nitrogen gas input pipe (16), and an eighth pneumatic valve (22) is provided on the second nitrogen gas input pipe (17).
  7. 7. The automatic filter switching pressure drop preventing automatic cleaning device according to claim 1, wherein the pure water pipe (6) includes a first pure water input pipe (23) and a second pure water input pipe (24) communicating with the outside pure water; the first pure water input pipe (23) is communicated with the input end of the first filter (4) through a first multipurpose pipeline (18); The second pure water input pipe (24) is communicated with the input end of the second filter (20) through a second multipurpose pipeline (19).
  8. 8. The automatic filter switching pressure drop preventing automatic cleaning device according to claim 7, wherein a ninth pneumatic valve (25) is provided on the first pure water input pipe (23), and a tenth pneumatic valve (26) is provided on the second pure water input pipe (24).
  9. 9. The automatic filter switching pressure drop preventing automatic cleaning device according to claim 5 or 7, wherein an eleventh pneumatic valve (27) is provided on the first multipurpose pipe (18), and a twelfth pneumatic valve (28) is provided on the second multipurpose pipe (19).
  10. 10. The automatic filter switching pressure drop preventing automatic cleaning device according to claim 1, wherein the liquid output end of the first filter (4) is communicated with the waste liquid pipeline (7) through a first liquid discharge pipe (29); The sewage discharge output end of the first filter (4) is communicated with the waste liquid pipeline (7) through a second liquid discharge pipe (31); A thirteenth pneumatic valve (30) is arranged on the first liquid discharge pipe (29), and a fourteenth pneumatic valve (32) is arranged on the second liquid discharge pipe (31); The liquid output end of the second filter (20) is communicated with the waste liquid pipeline (7) through a third liquid discharge pipe (33); the sewage discharge output end of the second filter (20) is communicated with the waste liquid pipeline (7) through a fourth liquid discharge pipe (34); the fifteenth pneumatic valve (35) is arranged on the third liquid discharge pipe (33), and the sixteen pneumatic valves (36) are arranged on the fourth liquid discharge pipe (34).

Description

Automatic pressure drop preventing and cleaning device for automatic filter switching Technical Field The utility model relates to the field of filter cleaning, in particular to an automatic filter switching pressure drop prevention automatic cleaning device. Background The semiconductor polishing liquid needs to be filtered with a filter after it is used, but the filter is liable to be clogged when it is used for a long period of time, and therefore, it is necessary to provide two filters to be alternately used in a rotation. However, the conventional filter is not easy to clean after being used, and a lot of grinding fluid and impurities still adhere to the filter, so that the impurities are easy to fall into the pipeline when the filter is replaced without cleaning. Disclosure of utility model The utility model aims to solve the problems in the prior art and provide the automatic filter switching pressure drop prevention cleaning device ‌. The technical proposal is to provide an automatic filter switching pressure drop preventing and automatic cleaning device, Comprises a first conveying pipeline and a second conveying pipeline; One end of the first conveying pipeline and one end of the second conveying pipeline are communicated with a supply source, and the other end of the first conveying pipeline and the other end of the second conveying pipeline are communicated with a supply pipeline; A first filter is arranged on the first conveying pipeline, and a second filter is arranged on the second conveying pipeline; The input ends of the first conveying pipeline and the second conveying pipeline are respectively communicated with a nitrogen pipeline and a pure water pipeline, and the output ends of the first conveying pipeline and the second conveying pipeline are respectively communicated with a waste liquid pipeline; One end of the first conveying pipeline and one end of the second conveying pipeline are communicated with each other, and the other end of the first conveying pipeline and the other end of the second conveying pipeline are communicated with each other and are provided with second pressure sensors. Preferably, the first pneumatic valve and the second pneumatic valve are sequentially arranged on the first conveying pipeline from the direction of the supply source to the direction of the supply pipeline. Preferably, the third pneumatic valve and the fourth pneumatic valve are sequentially arranged on the second conveying pipeline from the direction of the supply source to the direction of the supply pipeline. Preferably, a fifth pneumatic valve which is arranged in parallel with the first pneumatic valve is arranged on the first conveying pipeline; and a sixth pneumatic valve which is arranged in parallel with the third pneumatic valve is arranged on the second conveying pipeline. Preferably, the nitrogen pipeline comprises a first nitrogen input pipe and a second nitrogen input pipe which are communicated with external nitrogen; The first nitrogen input pipe is communicated with the input end of the first filter through a first multipurpose pipeline; the second nitrogen input pipe is communicated with the second filter input end through a second multipurpose pipeline. Preferably, a seventh pneumatic valve is arranged on the first nitrogen input pipe, and an eighth pneumatic valve is arranged on the second nitrogen input pipe. Preferably, the pure water pipeline comprises a first pure water input pipe and a second pure water input pipe which are communicated with external pure water; The first pure water input pipe is communicated with the input end of the first filter through a first multipurpose pipeline; the second pure water input pipe is communicated with the second filter input end through a second multipurpose pipeline. Preferably, a ninth pneumatic valve is arranged on the first pure water input pipe, and a tenth pneumatic valve is arranged on the second pure water input pipe. Preferably, the first multipurpose pipeline is provided with an eleventh pneumatic valve, and the second multipurpose pipeline is provided with a twelfth pneumatic valve. Preferably, the liquid output end of the first filter is communicated with the waste liquid pipeline through a first liquid discharge pipe; The sewage discharge output end of the first filter is communicated with the waste liquid pipeline through a second liquid discharge pipe; a thirteenth pneumatic valve is arranged on the first liquid discharge pipe, and a fourteenth pneumatic valve is arranged on the second liquid discharge pipe; the liquid output end of the second filter is communicated with the waste liquid pipeline through a third liquid discharge pipe; The sewage discharge output end of the second filter is communicated with the waste liquid pipeline through a fourth liquid discharge pipe; The fifteenth pneumatic valve is arranged on the third liquid discharge pipe, and the sixteen pneumatic valves are arranged on the fourth liquid discha