CN-224221068-U - Boron and phosphorus removal adsorption column for silane preparation

CN224221068UCN 224221068 UCN224221068 UCN 224221068UCN-224221068-U

Abstract

A boron and phosphorus removal adsorption column for silane preparation comprises a column body, wherein a central grid cylinder is arranged in the middle of the column body, a plurality of grid partition plates are arranged on the inner wall of the column body from bottom to top, the column body is divided into three filler layers by the grid partition plates, and a cleaning assembly is arranged in the central grid cylinder and used for cleaning the three filler layers. The utility model designs three layers of fillers, namely boron adsorption fillers, phosphorus adsorption fillers and chelating resin fillers, which are sequentially arranged, can pointedly and step by step remove boron and phosphorus impurities in silane gas and residual trace boron and phosphorus impurities, and the cleaning component is provided with a plurality of cleaning spray heads, soft partition plates and switching valves, so that the three filler layers can be accurately cleaned respectively.

Inventors

WAN JUNHUA
MEI QIAN
KE SHULONG
JIAO XUDONG
WU TAOTAO
Tang Lincong

Assignees

宜昌南玻硅材料有限公司
中国南玻集团股份有限公司

Dates

Publication Date: 20260512
Application Date: 20250516

Claims (8)

1. A boron and phosphorus removal adsorption column for silane preparation is characterized by comprising a column body, wherein a central grid cylinder is arranged in the middle of the column body, a plurality of grid partition plates are arranged on the inner wall of the column body from bottom to top, the column body is divided into three filler layers by the grid partition plates, and a cleaning assembly is arranged in the central grid cylinder and used for cleaning the three filler layers.
2. The boron and phosphorus removal adsorption column for silane preparation according to claim 1, wherein the three filler layers are respectively boron adsorption filler, phosphorus adsorption filler and chelating resin filler from bottom to top.
3. The boron-phosphorus removal adsorption column for silane production of claim 1, wherein the cleaning assembly comprises a main cleaning pipe provided with a plurality of cleaning nozzles.
4. The boron-phosphorus removal adsorption column for silane production according to claim 1, wherein the main cleaning pipe is provided with at least two soft separation plates, and the soft separation plates are positioned at the junction of the two packing layers.
5. The boron-phosphorus removal adsorption column for silane production according to claim 1, wherein the main cleaning pipe is provided with a plurality of on-off valves, and the on-off valves are positioned at the junction of the two packing layers.
6. The boron and phosphorus removal adsorption column for silane preparation according to claim 1, wherein a concave positioning groove is formed in the bottom of the main cleaning pipeline and is matched with a positioning cone, the positioning cone is provided with a through hole and is used for forming a passage with the concave positioning groove, and the positioning cone is communicated with the cleaning liquid inlet pipeline.
7. The boron-phosphorus removal adsorption column for silane production according to claim 1, wherein the cleaning liquid inlet pipeline is provided with a cleaning liquid branch pipe and a purging branch pipe.
8. A boron-phosphorus removal adsorption column for silane manufacture as defined in claim 1, wherein the top of the main purge pipe is provided with a flange for removable connection with the top of the column.

Description

Boron and phosphorus removal adsorption column for silane preparation Technical Field The utility model belongs to the technical field of silane production, and particularly relates to a boron and phosphorus removal adsorption column for silane preparation. Background In the preparation process of silane gas, the effective removal of impurities such as boron, phosphorus and the like is a key link for ensuring the purity of the product. The presence of boron and phosphorus impurities can seriously affect the quality of silane gas, thereby reducing the performance and quality of downstream products. For example, in semiconductor manufacturing, even trace amounts of boron and phosphorus impurities may cause unstable electrical properties of the chip, affecting the integration level and reliability of the chip, and in photovoltaic industry, boron and phosphorus impurities may reduce the photoelectric conversion efficiency of the solar cell and increase the production cost. Therefore, developing efficient boron and phosphorus removal technology is important for silane gas preparation. At present, the traditional silane gas preparation process has a plurality of limitations in boron and phosphorus removal. The existing adsorption technology, such as some simple physical adsorption methods, has poor adsorption selectivity on boron and phosphorus impurities, is difficult to deeply remove the impurities, and cannot meet the high purity requirement of electronic grade silane gas. While the partial chemical adsorption method has relatively good adsorption effect, the problems of difficult regeneration of the adsorbent, short service life and the like exist, so that the production cost is high. The structural design of the existing boron and phosphorus removal adsorption column is also unreasonable. Some adsorption columns lack effective cleaning and regenerating devices, and after the adsorption of the filler is saturated, the adsorption performance of the adsorption columns cannot be recovered in time, and the filler needs to be replaced frequently, so that the operation cost is increased, and the resource waste and the environmental pollution are caused. In view of the foregoing, there is a need to develop a boron and phosphorus removal adsorption column for silane production, which has an optimized structure, high adsorption efficiency, convenient cleaning and regeneration, and good cooperation with the whole production system. Disclosure of Invention The utility model aims to solve the technical problem of providing a boron and phosphorus removal adsorption column for silane preparation, and designs a three-layer filler, namely a boron adsorption filler, a phosphorus adsorption filler and a chelating resin filler which are sequentially arranged, so that boron and phosphorus impurities and residual trace boron and phosphorus impurities in silane gas can be removed in a targeted and step-by-step manner, and a cleaning assembly is provided with a plurality of cleaning spray heads, a soft partition plate and a switching valve, so that the three filler layers can be accurately cleaned respectively. In order to solve the technical problems, the utility model adopts the following technical scheme: A boron and phosphorus removal adsorption column for silane preparation comprises a column body, wherein a central grid cylinder is arranged in the middle of the column body, a plurality of grid partition plates are arranged on the inner wall of the column body from bottom to top, the column body is divided into three filler layers by the grid partition plates, and a cleaning assembly is arranged in the central grid cylinder and used for cleaning the three filler layers. Preferably, the three filler layers are respectively boron adsorption filler, phosphorus adsorption filler and chelating resin filler from bottom to top. Preferably, the cleaning component comprises a main cleaning pipe, and a plurality of cleaning spray heads are arranged on the main cleaning pipe. Preferably, the cleaning main pipeline is provided with at least two soft separation plates, and the soft separation plates are positioned at the junction of the two packing layers. Preferably, the cleaning main pipeline is provided with a plurality of switch valves, and the switch valves are positioned at the junction of the two packing layers. Preferably, the bottom of the main cleaning pipe is provided with a concave positioning groove which is matched with the positioning cone, the positioning cone is provided with a through hole and is used for forming a passage with the concave positioning groove, and the positioning cone is communicated with the cleaning liquid inlet pipe. Preferably, a cleaning liquid branch pipe and a purging branch pipe are arranged on the cleaning liquid inlet pipeline. Preferably, the top of the main wash pipe is provided with a flange for removable connection with the top of the column. The utility model has the following beneficial eff