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CN-224221814-U - Tray for spin coater for micro-nano processing

CN224221814UCN 224221814 UCN224221814 UCN 224221814UCN-224221814-U

Abstract

The utility model relates to the technical field of micro-nano processing, and discloses a tray for a spin coater for the micro-nano processing, which comprises a tray body, wherein a rotating shaft is coaxially arranged at the bottom of a base, a vacuum cavity is arranged in the tray body, an air channel communicated to the vacuum cavity is arranged in the rotating shaft, a plurality of circular grooves are arranged on the surface of the tray body, a cover plate is arranged in each circular groove, a connecting column is coaxially arranged at the bottom of each cover plate, the connecting column is rotationally arranged at the bottom of each circular groove, fixed air holes are arranged at the bottom of each circular groove at the side surface of each connecting column, the fixed air holes are communicated with the vacuum cavity, movable air holes are correspondingly arranged on the cover plate and correspond to the fixed air holes, the fixed air holes on the surface of the tray body can be independently arranged in an open or closed state, so that multi-point adsorption can be realized, the number of the opened fixed air holes can be adjusted according to the shapes and sizes of different workpieces, and the applicability of the device is improved.

Inventors

  • LIU NAN
  • Fu Didi

Assignees

  • 苏州麦田光电技术有限公司

Dates

Publication Date
20260512
Application Date
20250506

Claims (5)

  1. 1. A tray for a micro-nano processing spin coater comprises a tray body (1) and is characterized in that a rotating shaft (2) is coaxially arranged at the bottom of a base (1), a vacuum cavity (3) is arranged in the tray body (1), an air channel (4) communicated to the vacuum cavity (3) is arranged in the rotating shaft (2), a plurality of circular grooves (5) are formed in the surface of the tray body (1), a cover plate (6) is arranged in each circular groove (5), a connecting column (7) is coaxially arranged at the bottom of each circular groove (5), the connecting column (7) is rotatably arranged at the bottom of each circular groove (5), fixed air holes (8) are formed in the bottom of each circular groove (5) on the side face of each connecting column (7), the fixed air holes (8) are communicated with the vacuum cavity (3), and movable air holes (9) are correspondingly formed in the cover plate (6).
  2. 2. The tray for the spin coater of claim 1, wherein a plurality of moving air holes (9) are formed in the annular array on the cover plate (6), the moving air holes (9) are different in size, and a cover plate for completely covering the fixed air holes (8) is arranged among the moving air holes (9).
  3. 3. A spin coater tray according to claim 2, wherein the cover plate (6) is provided with a cross groove (10).
  4. 4. The tray for the spin coater for micro-nano machining according to claim 1, wherein a plurality of small air holes (11) are formed in the center of the upper surface of the tray body (1).
  5. 5. The tray for the micro-nano processing spin coater according to claim 4, wherein the outer side of the small air hole (11) is provided with an arc-shaped air hole (12).

Description

Tray for spin coater for micro-nano processing Technical Field The utility model relates to the technical field of micro-nano processing, in particular to a tray for a spin coater for micro-nano processing. Background In the micro-nano machining process, when the surface of a workpiece is coated, a spin coater is needed, wherein the spin coater is used for adsorbing the workpiece on a tray, dripping different glue solutions on the surface of the workpiece, and uniformly coating the glue solutions on the workpiece by virtue of centrifugal force through high-speed rotation. According to the tray for even machine of processing is received to chinese patent publication No. CN218691192U disclosed, "a tray for even machine of processing is received to a little", relates to even machine of processing tray equipment technical field, including the tray main part, the pivot is installed through the bearing rotation to the interior bottom of tray main part, the upper end of pivot is provided with the vacuum suction block, the suction opening has been seted up on the surface of vacuum suction block, the bottom of vacuum suction block is provided with the vacuum storehouse, the upper end fixed connection of pivot is in the bottom of vacuum storehouse, the air flue has been seted up to the inside of pivot, the upper end of air flue communicates in the vacuum storehouse. The device is characterized in that a plurality of groups of suction holes are formed in the vacuum suction block and are communicated with the vacuum bin, and the processing component is fixed through multi-point adsorption, so that the fixing capability of the processing component is guaranteed, damage caused by single-point stress of the processing component is avoided, and meanwhile, the suction force of the vacuum bin is shared by the suction holes, so that the problem of blockage caused by overlarge suction glue of the single-point suction force can be avoided. The device sets up a plurality of gas pockets on the tray, realizes the multiple spot absorption, but a plurality of gas pockets that its set up are the open state, can't be according to the shape and the size of different work pieces, adjust the quantity of the gas pocket of opening, and the suitability is poor. Disclosure of utility model Aiming at the defects of the prior art, the utility model aims to provide the tray for the spin coater for micro-nano processing, and a plurality of fixed air holes on the surface of the tray body can be independently set to be in an open or closed state, so that the multi-point adsorption can be realized, the number of the opened fixed air holes can be adjusted according to the shapes and the sizes of different workpieces, and the applicability of the device is improved. In order to solve the technical problems, the utility model provides the following technical scheme: The utility model provides a tray for even quick-witted that receives processing a little, includes the disk body, the bottom coaxial shaft that is provided with of base, the inside of disk body is provided with the vacuum chamber, the inside of pivot is provided with the intercommunication to the air flue of vacuum chamber, the surface of disk body is provided with a plurality of circular slot, all is provided with a cover plate in every circular slot, the bottom coaxial of cover plate is provided with the spliced pole, and the spliced pole rotates the setting and is in the bottom of circular slot, the bottom of the circular slot of spliced pole side is provided with fixed gas pocket, fixed gas pocket with the vacuum chamber intercommunication, correspond with fixed gas pocket on the cover plate and be provided with the removal gas pocket. Preferably, a plurality of moving air holes are arranged on the covering plate in an annular array, the sizes of the moving air holes are different, and a covering plate for completely covering the fixed air holes is arranged among the moving air holes. Preferably, the cover plate is provided with a cross groove. Preferably, a plurality of small air holes are formed in the center of the upper surface of the tray body. Preferably, the outer side of the small air hole is provided with an arc-shaped air hole. Compared with the prior art, the utility model has the following beneficial effects: The fixed air holes are used for adsorbing the workpiece, the fixed air holes are covered by the covering plate and are closed, the movable air holes on the covering plate are rotated to be aligned with the fixed air holes by rotating the covering plate, the fixed air holes are opened, the fixed air holes on the surface of the tray body can be independently arranged to be in an opened or closed state, multi-point adsorption can be realized, the number of the opened fixed air holes can be adjusted according to the shapes and the sizes of different workpieces, and the applicability of the device is improved. Drawings FIG. 1 is a schematic diagram of the overall structur