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CN-224221815-U - Spin coating device

CN224221815UCN 224221815 UCN224221815 UCN 224221815UCN-224221815-U

Abstract

The utility model provides a spin coating device which comprises a box body, wherein a connecting plate is arranged in the box body, a rotating plate is rotatably arranged in the connecting plate through a rotating column, a mounting plate is arranged on the rear side of the box body, a liquid spraying head is arranged in the mounting plate in a sliding manner, a protective frame plate is arranged in a butt joint groove formed in the upper end of the box body in a sliding manner, and quick dismounting mechanisms for quickly dismounting the protective frame plate are respectively arranged on the left side and the right side of the box body. According to the spin coating device, the protecting piece can be quickly detached and cleaned outside, so that inconvenience in operation in a narrow space is avoided, the cleaning efficiency is improved, and in addition, more effective cleaning methods such as a high-pressure water gun and ultrasonic cleaning can be used, so that the cleaning is convenient for operators to perform comprehensive and thorough cleaning.

Inventors

  • ZHENG YUANYUAN
  • ZHENG HUI

Assignees

  • 旭川新材料(广东)股份有限公司

Dates

Publication Date
20260512
Application Date
20250506

Claims (7)

  1. 1. The spin coating device comprises a box body (101) and is characterized in that a connecting plate (103) is arranged in the box body (101), a rotating plate (107) is arranged in the connecting plate (103) through rotation of a rotating column, a mounting plate (104) is arranged on the rear side of the box body (101), a liquid spraying head (105) is arranged in the mounting plate (104) in a sliding mode, a protective frame plate (201) is arranged in a butt joint groove formed in the upper end of the box body (101) in a sliding mode, and quick dismounting mechanisms for quickly dismounting the protective frame plate (201) are respectively arranged on the left side and the right side of the box body (101).
  2. 2. The spin-coating device of claim 1, wherein the quick-assembly-and-disassembly mechanism comprises chute frames (202) respectively arranged on the left side and the right side of the box body (101), a rectangular frame plate (203) is arranged between the front and the rear adjacent chute frames (202) in a sliding mode, two sliding columns are arranged on the inner side face of each rectangular frame plate (203), locking holes (209) are respectively formed on the left side and the right side of each protection frame plate (201), a plurality of locking columns (212) penetrate through the butt joint holes formed in the upper end of the box body (101) to be respectively inserted into the adjacent locking holes (209), rotating bases (206) are respectively arranged on the inner side face of each rectangular frame plate (203), rotating connecting rods (207) are respectively hinged to the inner side face of each rotating base (206), connecting plates (204) are arranged at the lower end of the box body (101), a plurality of guide columns (210) are arranged in the inner side of each connecting plate (204), two connecting rotating frames (208) are respectively arranged on the outer cambered surface of each guide column (210), the plurality of guide columns (210) are respectively connected in a sliding mode, the connecting frames (208) are respectively connected with the inner connecting rods (211) in a two-way, and the connecting rods (211) are respectively connected with the inner rotating frames in a two-way.
  3. 3. A spin coating apparatus according to claim 2, wherein a knob (205) is provided at the front end of the bi-directional screw (211).
  4. 4. A spin coating apparatus according to claim 1, wherein a motor (108) is provided at the lower end of the connection plate (103), and an output shaft of the motor (108) is connected to the lower end of the spin column via a coupling.
  5. 5. A spin coating apparatus according to claim 1, wherein an electric push rod (106) is provided on the rear side of the mounting plate (104), and a telescopic end of the electric push rod (106) is connected to the lower end of the liquid ejecting head (105).
  6. 6. The spin coating apparatus of claim 1, wherein a drain pipe (102) is disposed on the right side of the lower end of the housing (101), the drain pipe (102) is communicated with the interior of the housing (101), and an electromagnetic valve (109) is connected in series with the middle of the drain pipe (102).
  7. 7. A spin coating apparatus according to claim 1, wherein a supporting frame (110) is provided at a lower end of the case (101).

Description

Spin coating device Technical Field The utility model belongs to the technical field of spin coating devices, and particularly relates to a spin coating device. Background The spin coating device is a device for uniformly coating a liquid material (such as photoresist, paint, etc.) on a surface of a substrate, and its working principle is to rapidly spread and uniformly distribute the liquid material dropped in the center of the substrate on the surface of the substrate by centrifugal force through rotating the substrate at a high speed, and the technology is widely applied to the fields of semiconductor manufacturing, optical coating, biosensors, etc. The existing spin coating device is characterized in that the substrate is placed on the mounting assembly through the substrate, then the substrate on the mounting assembly is driven to rotate, then the liquid material to be spin coated is required on the surface of the substrate, then the liquid material is rapidly diffused and uniformly distributed on the surface of the substrate by utilizing centrifugal force, spin coating of the substrate is realized, the liquid material is usually shielded by the protection plate in order to avoid the centrifugal force during rotation, however, the liquid material can be adhered to the inner wall of the protection plate, the protection plate is fixedly arranged and cannot be removed, and therefore cleaning work becomes complex and time-consuming. The operator must use a brush or other tool to manually clean, which increases labor intensity and is inconvenient for the operator to clean. Disclosure of utility model In view of the above, the utility model provides a spin coating device, which can be quickly dismantled to clean the protective piece outside, so that the inconvenience of operation in a narrow space is avoided, the cleaning efficiency is improved, and in addition, more effective cleaning methods such as high-pressure water gun, ultrasonic cleaning and the like can be used, so that the cleaning is convenient for operators to clean comprehensively and thoroughly. In order to solve the technical problems, the technical scheme includes that the spin coating device comprises a box body, a connecting plate is arranged in the box body, the box body and the connecting plate are fixed through welding, a rotating plate is arranged in the connecting plate through rotating a rotating column, a mounting plate is arranged on the rear side of the box body, a liquid spraying head is arranged in the mounting plate in a sliding mode, a protection frame plate is arranged in a sliding mode in a butt joint groove formed in the upper end of the box body in a sliding mode, quick dismounting mechanisms for quickly dismounting the protection frame plate are respectively arranged on the left side and the right side of the box body, each quick dismounting mechanism comprises a sliding groove frame respectively arranged on the left side and the right side of the box body, a rectangular frame plate is arranged between the front sliding groove frame and the rear sliding groove frame respectively, two sliding columns are arranged on the inner side of each rectangular frame plate, locking holes are respectively formed in the left side and the right side of each rectangular frame plate, and a plurality of locking columns penetrate through the butt joint holes formed in the upper end of the box body and are respectively spliced with the adjacent locking holes. The inside of every rectangle framed board all is provided with the rotation seat on the medial surface, the inside of every rotation seat all articulates and rotates and to have the rotation connecting rod, the lower extreme of box is provided with connects the framed board, the inside of connecting the framed board is provided with a plurality of guide posts, slide on the extrados of a plurality of guide posts and be provided with two connection rotating frames, the front and back position of two connection rotating frames corresponds, a plurality of rotation connecting rods respectively with adjacent connection rotating frame inside rotation connection, the inside rotation of connecting the framed board is provided with two-way lead screw, a plurality of connection rotating frames correspond end threaded connection with the front and back of two-way lead screw respectively, the front end of two-way lead screw is provided with the knob. As a further improvement of the utility model, the rear side of the mounting plate is provided with an electric push rod, and the telescopic end of the electric push rod is connected with the lower end of the liquid spraying head. As a further improvement of the utility model, the lower end of the box body is provided with a supporting frame, and the box body and the supporting frame are fixed by welding. As a further improvement of the utility model, the lower end of the connecting plate is provided with a motor, and an output shaft of the motor is con