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CN-224222170-U - Cleaning system for bell jar of polysilicon reduction furnace

CN224222170UCN 224222170 UCN224222170 UCN 224222170UCN-224222170-U

Abstract

The utility model discloses a cleaning system for a bell jar of a polysilicon reduction furnace, relates to the technical field of bell jar cleaning, and mainly aims to provide a cleaning system for a bell jar of a polysilicon reduction furnace, which can improve the cleaning quality and the cleaning period of the bell jar. The main technical scheme is that the cleaning system for the bell jar of the polysilicon reduction furnace comprises a placing component, a liquid supply component and a hot air component, wherein the placing component is used for placing the bell jar, the liquid supply component comprises a spray head, a liquid supply pipeline, a water supply tank and an alkali liquor tank, the spray head penetrates through and stretches into the placing component, one end of the liquid supply pipeline is connected with the spray head, the other end of the liquid supply pipeline is connected with the water supply tank and the alkali liquor tank, the hot air component comprises a blower, a filter, a heater and an air outlet pipeline, one end of the air outlet pipeline penetrates through and stretches into the placing component, and the other end of the air outlet pipeline is sequentially connected with the heater, the filter and the blower. The utility model is mainly used for cleaning the bell jar.

Inventors

  • YE XINGJIAN
  • TIAN FENG
  • Wei xinxing
  • HOU TIANQIANG
  • Man Yinxia

Assignees

  • 新疆大全新能源股份有限公司

Dates

Publication Date
20260512
Application Date
20250513

Claims (7)

  1. 1. A cleaning system for a polysilicon reduction furnace bell jar, comprising: a placement member on which a bell jar is placed; The liquid supply component comprises a spray head, a liquid supply pipeline, a water supply tank and an alkali liquor tank, wherein the spray head penetrates through and stretches into the placing component, one end of the liquid supply pipeline is connected with the spray head, and the other end of the liquid supply pipeline is connected with the water supply tank and the alkali liquor tank; The hot air component comprises a blower, a filter, a heater and an air outlet pipeline, wherein one end of the air outlet pipeline penetrates through and stretches into the placing component, and the other end of the air outlet pipeline is sequentially connected with the heater, the filter and the blower.
  2. 2. The cleaning system for a polysilicon reduction furnace bell jar as set forth in claim 1, further comprising: The recovery part comprises a discharge pipeline, a waste liquid tank, a water treatment part and a silicon powder recovery tank, wherein one end of the discharge pipeline is connected with the placement part, the other end of the discharge pipeline is connected with the waste liquid tank, one end of the water treatment part is connected with the waste liquid tank, and the other end of the water treatment part is connected with the silicon powder recovery tank.
  3. 3. A cleaning system for a polysilicon reduction furnace bell jar as set forth in claim 2, wherein, The recovery part further comprises a clarification tank, a waste liquid pipeline and a waste liquid pump, wherein the discharge pipeline is connected with the clarification tank, one end of the waste liquid pipeline is connected with the clarification tank, the other end of the waste liquid pipeline is connected with the water treatment part, and the waste liquid pump is arranged on the waste liquid pipeline.
  4. 4. A cleaning system for a polysilicon reduction furnace bell jar as set forth in claim 3, wherein, The recycling component further comprises a nitrogen pipeline and a vent pipeline, wherein the nitrogen pipeline is connected with the alkali liquid tank and the waste liquid tank, and the vent pipeline is connected with the alkali liquid tank, the waste liquid tank and the discharge pipeline.
  5. 5. A cleaning system for a polysilicon reduction furnace bell jar as set forth in claim 3, wherein, The waste liquid pipeline is respectively connected to the bottoms of the waste liquid tank and the alkali liquid tank.
  6. 6. A cleaning system for a polysilicon reduction furnace bell jar as set forth in claim 3, wherein, The bottom of the clarifying tank is connected with the silicon powder recovery tank.
  7. 7. A cleaning system for a bell jar of a polysilicon reduction furnace as set forth in any one of claims 1 to 6, wherein, The liquid supply part further comprises a booster pump and a plunger pump, and the booster pump and the plunger pump are arranged on the liquid supply pipeline.

Description

Cleaning system for bell jar of polysilicon reduction furnace Technical Field The utility model relates to the technical field of bell jar cleaning, in particular to a cleaning system for a polycrystalline silicon reduction furnace bell jar. Background The reduction furnace bell jar is a core component in polysilicon production equipment, is mainly used for forming a closed reaction environment in a chemical vapor deposition process, is used as a core sealing structure of a reaction cavity, ensures stable reaction of a silicon core and gaseous raw materials in a high-temperature and high-pressure environment, is mainly used for producing polysilicon by an improved Siemens method, covers the requirement of high-purity silicon from an industrial level to an electronic level, and needs to be efficiently cleaned by adopting a high-pressure water automatic cleaning system or a special cleaning agent because reaction byproducts are easy to adhere to the inner wall so as to avoid polluting the silicon core and influencing the product quality. The existing high-pressure water automatic cleaning system is mainly used for alternately flushing for many times through water or weak base liquid, and the following problems exist in the mode: the silicon powder remained on the surface of the bell jar is not thoroughly removed, so that subsequent production pollution is caused; in the process of alternate flushing, a great amount of water resources and alkali liquor are wasted; alkaline cleaning solution can remain on the surface of the bell jar, thereby causing corrosion of the equipment. Disclosure of utility model In view of the above, the embodiment of the utility model provides a cleaning system for a bell jar of a polysilicon reduction furnace, and the main purpose is to provide a cleaning system for a bell jar of a polysilicon reduction furnace, which can improve the cleaning quality and the cleaning period of the bell jar. In order to achieve the above purpose, the present utility model mainly provides the following technical solutions: The embodiment of the utility model provides a cleaning system for a bell jar of a polysilicon reduction furnace, which comprises the following components: a placement member on which a bell jar is placed; The liquid supply component comprises a spray head, a liquid supply pipeline, a water supply tank and an alkali liquor tank, wherein the spray head penetrates through and stretches into the placing component, one end of the liquid supply pipeline is connected with the spray head, and the other end of the liquid supply pipeline is connected with the water supply tank and the alkali liquor tank; The hot air component comprises a blower, a filter, a heater and an air outlet pipeline, wherein one end of the air outlet pipeline penetrates through and stretches into the placing component, and the other end of the air outlet pipeline is sequentially connected with the heater, the filter and the blower. Further, the recovery part comprises a discharge pipeline, a waste liquid tank, a water treatment part and a silicon powder recovery tank, one end of the discharge pipeline is connected with the placement part, the other end of the discharge pipeline is connected with the waste liquid tank, one end of the water treatment part is connected with the waste liquid tank, and the other end of the water treatment part is connected with the silicon powder recovery tank. Further, the recovery unit further comprises a clarifier, a waste liquid pipeline and a waste liquid pump, wherein the discharge pipeline is connected to the clarifier, one end of the waste liquid pipeline is connected to the clarifier, the other end of the waste liquid pipeline is connected to the water treatment unit, and the waste liquid pump is arranged on the waste liquid pipeline. Further, the recovery unit further includes a nitrogen gas pipe connected to the alkali liquid tank and the waste liquid tank, and a vent pipe connected to the alkali liquid tank, the waste liquid tank, and the discharge pipe. Further, the waste liquid pipeline is respectively connected to the bottoms of the waste liquid tank and the alkali liquid tank. Further, the bottom of the clarification tank is connected with the silicon powder recovery tank. Further, the liquid supply part further comprises a booster pump and a plunger pump, and the booster pump and the plunger pump are arranged on the liquid supply pipeline. Compared with the prior art, the utility model has the following technical effects: according to the technical scheme, the placing component is used for fixing the bell jar, the bell jar is placed on the placing component, the liquid supply component is used for conveying desalted water and NaOH solution into the bell jar, the liquid supply component comprises a spray head, a liquid supply pipeline, a water supply tank and an alkali liquor tank, the spray head penetrates through and stretches into the placing component, one end of the li