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CN-224222176-U - Workpiece cleaning device

CN224222176UCN 224222176 UCN224222176 UCN 224222176UCN-224222176-U

Abstract

The utility model discloses a workpiece cleaning device which comprises a water bath tank, a soaking tank, a supporting component and a stirring mechanism, wherein a heating device is fixedly arranged in the water bath tank, the soaking tank is fixedly embedded in the water bath tank, cleaning liquid is injected into the soaking tank, the supporting component is detachably arranged in the soaking tank, and the stirring mechanism stretches into the soaking tank. The cleaning device improves the cleaning effect through heating and stirring, and further improves the cleaning efficiency.

Inventors

  • WU DAN
  • LIU SHUYUE
  • WANG JUNYONG
  • HE JUNFANG

Assignees

  • 北京博宇半导体工艺器皿技术有限公司
  • 博宇（天津）半导体材料有限公司

Dates

Publication Date
20260512
Application Date
20250419

Claims (10)

  1. 1. A workpiece cleaning apparatus, comprising: A water bath (1) is fixedly provided with a heating device (11) inside; the soaking tank (2) is fixedly embedded in the water bath tank (1), and cleaning liquid (21) is injected into the soaking tank; a support assembly (3) detachably mounted in the soaking tank (2) for forming a multi-layer workpiece (7) support structure in the soaking tank (2); and the stirring mechanism (4) stretches into the soaking tank (2) and is used for stirring the cleaning liquid (21) among the workpiece supporting structures of each layer.
  2. 2. Workpiece cleaning device according to claim 1, characterized in that the heating device (11) is a number of electric heating pipes distributed at least symmetrically around the periphery of the soaking tank (2).
  3. 3. Workpiece cleaning device according to claim 1, characterized in that the top inner periphery of the water bath (1) is provided with a ring of support frames (12), the top outer periphery of the soaking tank (2) is provided with a ring of large edges (22) matching with the support frames (12) for sealing the water bath (1).
  4. 4. The workpiece cleaning device according to claim 3, wherein a positioning assembly (5) is arranged between the supporting frame (12) and the large edge (22), the positioning assembly (5) comprises a plurality of positioning grooves (51) formed in the top surface of the supporting frame (12), and positioning pins (52) which are in one-to-one correspondence with the positioning grooves (51) are fixedly arranged on the bottom surface of the large edge (22).
  5. 5. The workpiece cleaning device according to claim 1, wherein the supporting component (3) comprises a first bracket (31), a partition plate (32) and a workpiece bracket (33), a plurality of partition plates (32) are arranged in the soaking tank (2) along the vertical direction, through holes are densely distributed on the partition plates (32), the first bracket (31) is arranged at the bottom of the lowest partition plate (32) and is separated between the adjacent partition plates (32), and the workpiece bracket (33) is arranged on the top surface of the partition plate (32).
  6. 6. The workpiece cleaning device according to claim 5, characterized in that the workpiece support (33) is provided with a plurality of hollowed-out placing grooves, wherein the placing grooves comprise a plurality of different shapes and sizes.
  7. 7. The workpiece cleaning device according to claim 5, wherein the stirring mechanism (4) comprises stirring rods (41) extending into the soaking tank (2), stirring blades (42) are fixedly arranged between adjacent partition boards (32) on the stirring rods (41), avoiding grooves are formed in the partition boards (32) and the workpiece support (33) corresponding to the stirring rods (41) and the stirring blades (42), movable and fixed second supports are arranged on the outer side of the water bath (1), a stirring motor fixedly connected with the second supports is arranged above the soaking tank, the top ends of the stirring rods (41) are fixedly connected with output shafts of the stirring motor, waterproof magnetic stirrers (43) are arranged at the bottoms in the water bath (1), and stirring magnets (44) of the waterproof magnetic stirrers (43) are arranged at the bottoms in the soaking tank (2), and the rotation direction of the stirring rods (41) is opposite to that of the waterproof magnetic stirrers (43).
  8. 8. The workpiece cleaning device according to claim 7, characterized in that the output shaft of the stirring motor is fixedly sleeved with a connecting sleeve, and the top end of the stirring rod (41) is detachably inserted into the connecting sleeve and is detachably and fixedly connected with the connecting sleeve through a bolt.
  9. 9. The workpiece cleaning device according to claim 7, characterized in that the top of the soaking tank (2) is covered with a cover plate (6), and the cover plate (6) is provided with a avoiding hole corresponding to the stirring rod (41).
  10. 10. The workpiece cleaning device according to claim 9, characterized in that the first support (31), the partition (32), the workpiece support (33) and the cover plate (6) are all made of corrosion-resistant materials.

Description

Workpiece cleaning device Technical Field The utility model relates to the technical field of workpiece cleaning, in particular to a workpiece cleaning device. Background Oled the vapor deposition material is composed of ytterbium, silver, magnesium, lithium fluoride, etc., the vapor deposition material is put into a vapor deposition vessel, the upper opening of the vapor deposition vessel is matched with a gas distribution fitting, and the vapor deposition material is heated under vacuum condition to be melted and deposited on a substrate through the gas distribution fitting. In this process, evaporation material can be adhered to evaporation ware, gas distribution accessory etc. and need to be cleaned up before the next use, otherwise can influence the evaporation effect. The vapor deposition attachments are removed by corrosion with specific solvents (acid liquor, alkali liquor and the like), and meanwhile, vapor deposition vessels and gas distribution devices are kept intact. It should be noted that the evaporation vessel and the gas distribution fittings are fragile and need to be placed stably and have collision protection, so that the existing cleaning devices mostly adopt standing soaking. This cleaning method is time consuming and inefficient. Disclosure of utility model In view of the above-described drawbacks or shortcomings of the related art, it is desirable to provide a workpiece cleaning apparatus that improves cleaning efficiency by improving cleaning effect through heating and stirring. The utility model provides a workpiece cleaning device, comprising: the water bath tank is fixedly provided with a heating device; The soaking tank is fixedly embedded in the water bath tank, and cleaning liquid is injected into the soaking tank; The support component is detachably arranged in the soaking tank and is used for forming a multi-layer workpiece support structure in the soaking tank; And the stirring mechanism stretches into the soaking tank and is used for stirring the cleaning liquid among the workpiece supporting structures of each layer. Further, the heating device is at least a plurality of electric heating pipes symmetrically distributed on the periphery of the soaking tank. Further, the inner periphery of the top of the water bath tank is provided with a circle of supporting frame, and the outer periphery of the top of the soaking tank is provided with a circle of large edge matched with the supporting frame and used for sealing the water bath tank. Furthermore, a positioning assembly is arranged between the supporting frame and the large edge, the positioning assembly comprises a plurality of positioning grooves formed in the top surface of the supporting frame, and positioning pins which are in one-to-one correspondence with the positioning grooves are fixedly arranged on the bottom surface of the large edge. Further, support the subassembly and include first support, baffle and work piece support, be provided with a plurality of along vertical direction in the soaking tank the baffle, densely covered has the through-hole on the baffle, is located the below the bottom of baffle and adjacent all separate be provided with between the baffle first support, the top surface of baffle all is provided with the work piece support. Further, a plurality of hollowed-out placing grooves are formed in the workpiece support, and the placing grooves comprise various different shapes and sizes. Further, rabbling mechanism is including stretching into puddler in the soaking tank, lie in on the puddler adjacent all fixedly provided with stirring flabellum between the baffle, correspond on baffle and the work piece support puddler and stirring flabellum has been seted up and has been dodged the groove, the outside of water bath is provided with portable and fixed second support, the top of soaking tank be provided with second support fixed connection's agitator motor, the top of puddler with agitator motor's output shaft detachable fixed connection, the bottom in the water bath is provided with waterproof magnetic stirrer, waterproof magnetic stirrer's stirring magnet set up in the bottom in the soaking tank, the rotation direction of puddler with waterproof magnetic stirrer's stirring direction is opposite. Further, the output shaft of the stirring motor is fixedly sleeved with a connecting sleeve, and the top end of the stirring rod is detachably inserted into the connecting sleeve and is detachably and fixedly connected with the connecting sleeve through a bolt. Further, the top of the soaking tank is covered with a cover plate, and the cover plate is provided with a avoidance hole corresponding to the stirring rod. Furthermore, the first bracket, the partition plate, the workpiece bracket and the cover plate are all made of corrosion-resistant materials. Compared with the prior art, the utility model has the beneficial effects that: (1) The cleaning device is provided with the water bath, the soaking t