CN-224222235-U - Device for treating gate valve pollution in vacuum cavity

CN224222235UCN 224222235 UCN224222235 UCN 224222235UCN-224222235-U

Abstract

The utility model relates to the technical field of vacuum cavity equipment, in particular to a device for treating gate valve pollution in a vacuum cavity. The utility model provides a movable small manipulator device with sweeping and sucking functions in a vacuum cavity, the device comprises a pumping pipeline and pump set system, a small manipulator, a extension arm, an angle adjusting and locking mechanism, a vacuum three-way flange, a small manipulator shaft lever, a supporting and telescopic control mechanism and a three-piece flange ball valve. The device can clear up the residual source material pollutant of flashboard valve surface etc. under the condition of not opening the cavity, not breaking vacuum, can effectively ensure the leakproofness, the stability of flashboard valve to can effectively reduce the shut down number of times that the residual source material pollutant caused of open cavity processing, thereby increased the life of flashboard valve, reduced its replacement cost, and then reduced the maintenance cost of vacuum cavity equipment.

Inventors

SONG LIYUAN
LI ZHUANGZHUANG
TAO XIANTONG
Cheng Zengci
CAO XINGGUO
YANG CHUNZHANG
WANG SHANLI
JI RONGBIN
YANG JIN
ZHAO JUN
KONG JINCHENG
LI YANHUI
Duan Yingrui

Assignees

昆明物理研究所

Dates

Publication Date: 20260512
Application Date: 20250528

Claims (10)

1. The device for treating the gate valve pollution in the vacuum cavity comprises a pump set system for providing suction force, and is characterized by comprising a small manipulator (1), a suction pipeline (2), a small manipulator shaft lever (3) and an external rotating strong magnetic sleeve (4); The small manipulator (1) is positioned in the vacuum cavity (7), is detachably connected with the suction pipeline (2) and is internally and fixedly connected with a small manipulator shaft lever (3), the whole small manipulator (1) is of a cylindrical structure, one end of the small manipulator is provided with a sweeping ring (11) and a plurality of suction slits (12) and has sweeping and suction functions, and the small manipulator (1) is also fixedly connected with a small manipulator flange (13); The suction pipeline (2) is detachably connected to a vacuum cavity wall through hole (71) of the vacuum cavity (7) at one side of the gate valve (72), one end of the suction pipeline is detachably connected with the small manipulator (1) through a small manipulator flange (13), and the other end of the suction pipeline is connected with the pump group system to provide suction force for the small manipulator (1); One end of the small manipulator shaft lever (3) is fixedly connected with the small manipulator (1), and the other end of the small manipulator shaft lever is provided with an internal strong magnetic rotating shaft (31), and the small manipulator shaft lever (3) is arranged in the magnetic sleeve coupling fixed sleeve (34) through a first bearing (32) and a second bearing (33); The external rotating strong magnetic sleeve (4) is arranged outside the magnetic sleeve coupling fixed sleeve (34) through a bearing, and forms magnetic coupling rotation control with the internal strong magnetic rotating shaft (31), and the rotation of the small manipulator shaft lever (3) is controlled through the rotating strong magnetic sleeve (4).
2. The device for treating the pollution of the gate valve in the vacuum cavity according to claim 1, wherein the suction slit (12) is rectangular and is uniformly distributed at one end of the small manipulator (1) in a radial shape.
3. The device for treating the pollution of the gate valve in the vacuum cavity according to claim 1, wherein the suction pipeline (2) is composed of four parts of an extension arm (21), an angle adjusting and locking mechanism (22), a vacuum three-way flange (23) and a flange ball valve (24); The extension arm (21) is detachably connected with the angle adjusting and locking mechanism (22); One end of the angle adjusting and locking mechanism (22) is detachably connected with the extension arm (21), and the other end of the angle adjusting and locking mechanism is detachably connected with the vacuum three-way flange (23); One end of the vacuum three-way flange (23) is detachably connected with the angle adjusting and locking mechanism (22), and the other end of the vacuum three-way flange is detachably connected with the flange ball valve (24); The flange ball valve (24) is connected with the pump set system through a pipeline.
4. A device for treating contamination of a shutter valve in a vacuum chamber according to claim 3, wherein the extension arm (21) is composed of three parts, i.e., a small manipulator butt flange (211), a first bellows (212), and a mounting flange (213), and has an axial expansion function; The small manipulator butt flange (211) is detachably connected with the small manipulator (1); The mounting flange (213) is detachably connected with the angle adjusting and locking mechanism (22), and the mounting flange (213) is detachably connected with the vacuum cavity (7) through a flange on the vacuum cavity wall through hole (71).
5. A device for treating contamination of a shutter valve in a vacuum chamber according to claim 3, wherein the angle adjusting and locking mechanism (22) is composed of four parts, namely a second bellows front flange (221), a second bellows (222), a second bellows rear flange (223), and an adjusting screw assembly (224); a plurality of first ear plates (2211) are distributed on the second corrugated pipe front flange (221); One end of the second corrugated pipe (222) is fixedly connected with the second corrugated pipe front flange (221), and the other end of the second corrugated pipe is fixedly connected with the second corrugated pipe rear flange (223); a plurality of second ear plates (2231) are distributed on the second corrugated pipe rear flange (223), and the number of the second ear plates (2231) is the same as that of the first ear plates (2211); the adjusting screw rod assembly (224) is provided with a plurality of groups, and the number of the adjusting screw rod assembly is the same as that of the first lug plate (2211) and the second lug plate (2231).
6. The apparatus for treating gate valve contamination in a vacuum chamber according to claim 5, wherein the adjusting screw assembly (224) is composed of five parts, namely a first adjusting screw (2241), a nut (2242), a locking sleeve (2243), a first limit ball (2244) and a second limit ball (2245); The first adjusting screw rod (2241) is detachably connected to the first ear plate (2211) through a locking sleeve (2243) and penetrates through the second ear plate (2231) and the second limiting ball (2245); The two nuts (2242) are respectively connected to the two sides of the second lug plate (2231) on the first adjusting screw rod (2241); The locking sleeve (2243) is detachably connected with the first ear plate (2211); the first limit ball (2244) is fixedly connected to the first adjusting screw rod (2241); The second limit ball (2245) is connected in the second ear plate (2231).
7. A device for handling valve contamination in a vacuum chamber according to claim 3, wherein the flanged ball valve (24) is a three-piece flanged ball valve.
8. The device for treating the pollution of the gate valve in the vacuum cavity according to claim 1, further comprising a supporting and telescopic control mechanism (5) and an adapting flange (6), wherein the supporting and telescopic control mechanism (5) is detachably connected with the suction pipeline (2) through the adapting flange (6) and comprises six parts of a third corrugated pipe front flange (51), a second adjusting screw (52), a supporting rod (53), a third corrugated pipe (54), a third corrugated pipe rear flange (55) and a fixing block (56); One end of the second adjusting screw rod (52) is fixedly connected with the front flange (51) of the third corrugated pipe, and the other end of the second adjusting screw rod is fixedly connected with the fixed block (56); the support rods (53) are provided with a plurality of support rods, one end of each support rod is fixedly connected with the front flange (51) of the third corrugated pipe, and the other end of each support rod is fixedly connected with the fixing block (56); One end of the third corrugated pipe (54) is fixedly connected with the third corrugated pipe front flange (51), the other end of the third corrugated pipe is fixedly connected with the third corrugated pipe rear flange (55), and the third corrugated pipe (54) is arranged at the centers of the second adjusting screw rod (52) and the supporting rod (53); the fixed block (56) is provided with a through hole, and the rotary handle (57) passes through the through hole and is connected with the second adjusting screw rod (52).
9. An arrangement for handling valve contamination in a vacuum chamber according to claim 8, characterized in that the third bellows front flange (51) is centrally connected with a third bearing (511).
10. The device for treating the pollution of the gate valve in the vacuum cavity according to claim 8, wherein the third corrugated pipe rear flange (55) is provided with a through hole which is penetrated on the second adjusting screw rod (52) and the supporting rod (53) and can slide on the second adjusting screw rod (52) and the supporting rod (53).

Description

Device for treating gate valve pollution in vacuum cavity Technical Field The utility model relates to the technical field of vacuum cavity equipment, in particular to a device for treating gate valve pollution in a vacuum cavity. Background In vacuum cavity equipment, a gate valve is a key control part, is widely used in vacuum equipment for preparing semiconductor materials, such as thermal evaporation equipment, magnetron sputtering equipment and molecular beam epitaxy equipment, and can be used for effectively connecting and isolating different vacuum cavities by opening and closing the gate valve, so that the vacuum degree of different cavities is effectively maintained and regulated, the normal operation of the equipment is ensured, and different process requirements are met. The precise control capability, good sealing and stability of the gate valve are important to ensure the smooth progress of the process. In the vacuum growth cavity, residual source materials evaporated or sputtered in the sample growth process can be deposited on the plate surface of the gate valve, gaps between the gate valve and the valve base and the like, so that the gate valve is polluted, gas leakage is further caused, and the stability and the process effect of the whole vacuum system are directly affected. At present, the treatment method for the gate valve polluted by the residual source material is generally to periodically stop and open cavities to inspect and clean the plate surface of the gate valve, gaps between the gate valve and a valve base and the like, but the method can cause production interruption and even lower quality of grown sample materials to cause economic loss, and the treatment method also increases the shutdown times and maintenance workload except equipment faults and increases maintenance and replacement costs if the gate valve cleaning method is improper. Disclosure of utility model In view of the above-mentioned working needs and problems in the background art, the inventors have made their thought and innovations, and have aimed at providing a device for handling gate valve contamination in a vacuum chamber, for cleaning source material contaminants of the gate valve without opening the vacuum chamber. In order to solve the problems and achieve the purposes, the utility model adopts the following technical scheme: The device for treating the gate valve pollution in the vacuum cavity comprises a pump set system for providing suction force, wherein the device comprises a small manipulator, a suction pipeline, a small manipulator shaft lever and an external rotating strong magnetic sleeve; The small manipulator is positioned in the vacuum cavity, is detachably connected with the suction pipeline and is fixedly connected with a small manipulator shaft lever, is integrally of a cylinder structure, and has a sweeping ring and a plurality of suction slits at one end and has sweeping and suction functions; The suction pipeline is detachably connected to a vacuum cavity wall through hole of the vacuum cavity body positioned at one side of the gate valve, one end of the suction pipeline is detachably connected with the small manipulator through a small manipulator flange, and the other end of the suction pipeline is connected with the pump group system through a pipeline to provide suction force for the small manipulator; One end of the small manipulator shaft lever is fixedly connected with the small manipulator, and the other end of the small manipulator shaft lever is provided with an internal strong magnetic rotating shaft; the external rotating strong magnetic sleeve is arranged outside the magnetic sleeve coupling fixed sleeve through a bearing, and forms magnetic coupling rotation control with the internal strong magnetic rotating shaft, and the rotation of the small manipulator shaft lever is controlled through the rotating strong magnetic sleeve. Preferably, the suction slits are rectangular and are uniformly distributed at one end of the small manipulator body in a radial shape. Preferably, the suction pipe comprises four parts of an extension arm, an angle adjusting and locking mechanism, a vacuum three-way flange and a flange ball valve, wherein the extension arm is detachably connected with the angle adjusting and locking mechanism, one end of the angle adjusting and locking mechanism is detachably connected with the extension arm, the other end of the angle adjusting and locking mechanism is detachably connected with the vacuum three-way flange, one end of the vacuum three-way flange is detachably connected with the angle adjusting and locking mechanism, the other end of the vacuum three-way flange is detachably connected with the flange ball valve, and the flange ball valve is connected with the pump system through a pipeline. The extension arm is composed of a small manipulator butt flange, a first corrugated pipe and a mounting flange, and has an axial telescopic function, the small ma